JPH01160839U - - Google Patents
Info
- Publication number
- JPH01160839U JPH01160839U JP1988049600U JP4960088U JPH01160839U JP H01160839 U JPH01160839 U JP H01160839U JP 1988049600 U JP1988049600 U JP 1988049600U JP 4960088 U JP4960088 U JP 4960088U JP H01160839 U JPH01160839 U JP H01160839U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- transporting
- storing
- semiconductor substrates
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988049600U JPH01160839U (fr) | 1988-04-12 | 1988-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988049600U JPH01160839U (fr) | 1988-04-12 | 1988-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160839U true JPH01160839U (fr) | 1989-11-08 |
Family
ID=31275690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988049600U Pending JPH01160839U (fr) | 1988-04-12 | 1988-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160839U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007115785A (ja) * | 2005-10-18 | 2007-05-10 | Oki Electric Ind Co Ltd | 薄板用支持容器 |
| JP2008042155A (ja) * | 2006-08-04 | 2008-02-21 | King Yuan Electronics Co Ltd | ウエハカセット補助装置 |
-
1988
- 1988-04-12 JP JP1988049600U patent/JPH01160839U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007115785A (ja) * | 2005-10-18 | 2007-05-10 | Oki Electric Ind Co Ltd | 薄板用支持容器 |
| JP2008042155A (ja) * | 2006-08-04 | 2008-02-21 | King Yuan Electronics Co Ltd | ウエハカセット補助装置 |