JPH01161262U - - Google Patents
Info
- Publication number
- JPH01161262U JPH01161262U JP3247489U JP3247489U JPH01161262U JP H01161262 U JPH01161262 U JP H01161262U JP 3247489 U JP3247489 U JP 3247489U JP 3247489 U JP3247489 U JP 3247489U JP H01161262 U JPH01161262 U JP H01161262U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- chamber
- continuous discharge
- reaction treatment
- discharge reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002360 preparation method Methods 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims 2
- 230000037431 insertion Effects 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3247489U JPH01161262U (2) | 1989-03-23 | 1989-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3247489U JPH01161262U (2) | 1989-03-23 | 1989-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01161262U true JPH01161262U (2) | 1989-11-09 |
Family
ID=31258983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3247489U Pending JPH01161262U (2) | 1989-03-23 | 1989-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01161262U (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55154571A (en) * | 1979-05-19 | 1980-12-02 | Nec Corp | Vacuum vapor deposition apparatus |
-
1989
- 1989-03-23 JP JP3247489U patent/JPH01161262U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55154571A (en) * | 1979-05-19 | 1980-12-02 | Nec Corp | Vacuum vapor deposition apparatus |
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