JPH01161334U - - Google Patents
Info
- Publication number
- JPH01161334U JPH01161334U JP1988057447U JP5744788U JPH01161334U JP H01161334 U JPH01161334 U JP H01161334U JP 1988057447 U JP1988057447 U JP 1988057447U JP 5744788 U JP5744788 U JP 5744788U JP H01161334 U JPH01161334 U JP H01161334U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- wafer
- cassette positioning
- wafers
- positioning jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の一実施例を示すウエハカセ
ツト位置決め治具の断面図、第２図は従来のウエ
ハカセツト位置決め治具を示す断面図である。
図に於いて、１はウエハ、２はウエハカセツト
、３はウエハカセツト位置決め治具、４はウエハ
ガイド、５はウエハ支持面、６はウエハガイド取
付ねじを示す。なお、図中、同一符号は同一部分
を示す。
FIG. 1 is a sectional view of a wafer cassette positioning jig showing an embodiment of this invention, and FIG. 2 is a sectional view of a conventional wafer cassette positioning jig. In the figure, 1 is a wafer, 2 is a wafer cassette, 3 is a wafer cassette positioning jig, 4 is a wafer guide, 5 is a wafer support surface, and 6 is a wafer guide mounting screw. Note that in the figures, the same reference numerals indicate the same parts.
Claims (1)
セツト位置決め部にウエハをウエハカセツト底面
部より浮かせるウエハガイド部を併設させた事を
特徴とするウエハカセツト位置決め治具。 A wafer cassette positioning jig characterized in that a wafer cassette positioning part used in a process of chemically processing wafers is provided with a wafer guide part for floating the wafers above the bottom surface of the wafer cassette.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988057447U JPH01161334U (en) | 1988-04-27 | 1988-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988057447U JPH01161334U (en) | 1988-04-27 | 1988-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01161334U true JPH01161334U (en) | 1989-11-09 |
Family
ID=31283303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988057447U Pending JPH01161334U (en) | 1988-04-27 | 1988-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01161334U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020008949A (en) * | 2000-07-21 | 2002-02-01 | 김광교 | A wafer boat for a semiconductor device fabrication |
-
1988
- 1988-04-27 JP JP1988057447U patent/JPH01161334U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020008949A (en) * | 2000-07-21 | 2002-02-01 | 김광교 | A wafer boat for a semiconductor device fabrication |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6237932U (en) | ||
| JPH03128943U (en) | ||
| JPH01107126U (en) | ||
| JPH01146535U (en) | ||
| JPS60100748U (en) | Photoresist coating equipment | |
| JPH0313741U (en) | ||
| JPS60927U (en) | Semiconductor wafer pasting equipment | |
| JPS5939937U (en) | Semiconductor wafer support stand | |
| JPH0288233U (en) | ||
| JPS63153537U (en) | ||
| JPS6289144U (en) | ||
| JPS6236531U (en) | ||
| JPS642442U (en) | ||
| JPS60156751U (en) | Storage jig for semiconductor wafers | |
| JPH01165623U (en) | ||
| JPS61125041U (en) | ||
| JPS6132077U (en) | Tray for transporting semiconductor wafers | |
| JPS5924229U (en) | floating chuck | |
| JPS59146941U (en) | Semiconductor cleaning jig | |
| JPS58124952U (en) | Storage jig for semiconductor wafers | |
| JPH0265341U (en) | ||
| JPH0487629U (en) | ||
| JPH0170340U (en) | ||
| JPH0180933U (en) | ||
| JPH0256442U (en) |