JPH01162231U - - Google Patents
Info
- Publication number
- JPH01162231U JPH01162231U JP1988050397U JP5039788U JPH01162231U JP H01162231 U JPH01162231 U JP H01162231U JP 1988050397 U JP1988050397 U JP 1988050397U JP 5039788 U JP5039788 U JP 5039788U JP H01162231 U JPH01162231 U JP H01162231U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- supply mechanism
- raw
- material supply
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988050397U JPH0710489Y2 (ja) | 1988-04-13 | 1988-04-13 | 原料供給機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988050397U JPH0710489Y2 (ja) | 1988-04-13 | 1988-04-13 | 原料供給機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01162231U true JPH01162231U (th) | 1989-11-10 |
| JPH0710489Y2 JPH0710489Y2 (ja) | 1995-03-08 |
Family
ID=31276449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988050397U Expired - Lifetime JPH0710489Y2 (ja) | 1988-04-13 | 1988-04-13 | 原料供給機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0710489Y2 (th) |
-
1988
- 1988-04-13 JP JP1988050397U patent/JPH0710489Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0710489Y2 (ja) | 1995-03-08 |
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