JPH01163337U - - Google Patents
Info
- Publication number
- JPH01163337U JPH01163337U JP6049388U JP6049388U JPH01163337U JP H01163337 U JPH01163337 U JP H01163337U JP 6049388 U JP6049388 U JP 6049388U JP 6049388 U JP6049388 U JP 6049388U JP H01163337 U JPH01163337 U JP H01163337U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- transport mechanism
- vertical movement
- support pedestal
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 1
- 230000005611 electricity Effects 0.000 description 1
Description
第１図ａは、本考案によるウエハー搬送機構の
実施例を示す、無通電時の状態における要部の側
面図。第１図ｂは、本考案によるウエハー搬送機
構の実施例における通電時の状態を示す要部の側
面図。第２図は、従来例によるウエハー搬送機構
を示す要部の側面図。
FIG. 1a is a side view of the main parts of an embodiment of the wafer transport mechanism according to the present invention in a non-energized state. FIG. 1b is a side view of the main parts of the embodiment of the wafer transport mechanism according to the present invention, showing the state when electricity is applied. FIG. 2 is a side view of essential parts of a conventional wafer transport mechanism.
Claims (1)
下動作を支持する支持架台とにより構成されるウ
エハーの搬送機構において、アームと支持架台と
の間に、上下動作を再現する形状記憶合金を取り
付けたことを特徴とするウエハーの搬送機構。 In a wafer transport mechanism consisting of an arm that holds the wafer and a support pedestal that supports the vertical movement of the arm, we have installed a shape memory alloy between the arm and the support pedestal that reproduces the vertical movement. Characteristic wafer transport mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6049388U JPH01163337U (en) | 1988-05-07 | 1988-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6049388U JPH01163337U (en) | 1988-05-07 | 1988-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01163337U true JPH01163337U (en) | 1989-11-14 |
Family
ID=31286202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6049388U Pending JPH01163337U (en) | 1988-05-07 | 1988-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01163337U (en) |
-
1988
- 1988-05-07 JP JP6049388U patent/JPH01163337U/ja active Pending
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