JPH01165647U - - Google Patents

Info

Publication number
JPH01165647U
JPH01165647U JP6207288U JP6207288U JPH01165647U JP H01165647 U JPH01165647 U JP H01165647U JP 6207288 U JP6207288 U JP 6207288U JP 6207288 U JP6207288 U JP 6207288U JP H01165647 U JPH01165647 U JP H01165647U
Authority
JP
Japan
Prior art keywords
wafer
holder
clamper
holds
holding mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6207288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0737318Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6207288U priority Critical patent/JPH0737318Y2/ja
Publication of JPH01165647U publication Critical patent/JPH01165647U/ja
Application granted granted Critical
Publication of JPH0737318Y2 publication Critical patent/JPH0737318Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6207288U 1988-05-13 1988-05-13 枚葉ウエハ処理装置用ウエハ保持機構 Expired - Lifetime JPH0737318Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6207288U JPH0737318Y2 (ja) 1988-05-13 1988-05-13 枚葉ウエハ処理装置用ウエハ保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6207288U JPH0737318Y2 (ja) 1988-05-13 1988-05-13 枚葉ウエハ処理装置用ウエハ保持機構

Publications (2)

Publication Number Publication Date
JPH01165647U true JPH01165647U (th) 1989-11-20
JPH0737318Y2 JPH0737318Y2 (ja) 1995-08-23

Family

ID=31287706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6207288U Expired - Lifetime JPH0737318Y2 (ja) 1988-05-13 1988-05-13 枚葉ウエハ処理装置用ウエハ保持機構

Country Status (1)

Country Link
JP (1) JPH0737318Y2 (th)

Also Published As

Publication number Publication date
JPH0737318Y2 (ja) 1995-08-23

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