JPH01169034U - - Google Patents
Info
- Publication number
- JPH01169034U JPH01169034U JP1988066122U JP6612288U JPH01169034U JP H01169034 U JPH01169034 U JP H01169034U JP 1988066122 U JP1988066122 U JP 1988066122U JP 6612288 U JP6612288 U JP 6612288U JP H01169034 U JPH01169034 U JP H01169034U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- spring
- semiconductor substrate
- storing
- packaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988066122U JPH01169034U (is) | 1988-05-19 | 1988-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988066122U JPH01169034U (is) | 1988-05-19 | 1988-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01169034U true JPH01169034U (is) | 1989-11-29 |
Family
ID=31291537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988066122U Pending JPH01169034U (is) | 1988-05-19 | 1988-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01169034U (is) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005112106A1 (ja) * | 2004-05-19 | 2005-11-24 | Nippon Mining & Metals Co., Ltd. | ウェハ保管容器 |
| JP2008531416A (ja) * | 2005-02-27 | 2008-08-14 | インテグリス・インコーポレーテッド | 絶縁システムを備えるレチクルポッド |
| JP2010165882A (ja) * | 2009-01-16 | 2010-07-29 | Lintec Corp | 半導体ウエハの搬送装置及び搬送方法 |
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1988
- 1988-05-19 JP JP1988066122U patent/JPH01169034U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005112106A1 (ja) * | 2004-05-19 | 2005-11-24 | Nippon Mining & Metals Co., Ltd. | ウェハ保管容器 |
| JPWO2005112106A1 (ja) * | 2004-05-19 | 2008-07-31 | 日鉱金属株式会社 | ウェハ保管容器 |
| US7510082B2 (en) | 2004-05-19 | 2009-03-31 | Nippon Mining & Metals Co., Ltd. | Wafer storage container |
| JP4676430B2 (ja) * | 2004-05-19 | 2011-04-27 | Ｊｘ日鉱日石金属株式会社 | ウェハ保管容器 |
| JP2008531416A (ja) * | 2005-02-27 | 2008-08-14 | インテグリス・インコーポレーテッド | 絶縁システムを備えるレチクルポッド |
| JP2010165882A (ja) * | 2009-01-16 | 2010-07-29 | Lintec Corp | 半導体ウエハの搬送装置及び搬送方法 |