JPH01169042U - - Google Patents
Info
- Publication number
- JPH01169042U JPH01169042U JP1988066176U JP6617688U JPH01169042U JP H01169042 U JPH01169042 U JP H01169042U JP 1988066176 U JP1988066176 U JP 1988066176U JP 6617688 U JP6617688 U JP 6617688U JP H01169042 U JPH01169042 U JP H01169042U
- Authority
- JP
- Japan
- Prior art keywords
- channel regions
- channel
- semiconductor substrate
- image sensor
- state image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
第１図乃至第３図は本考案の一実施例を示し、
第１図は平面図、第２図は第１図に示すＡ―Ａ′
線断面図、第３図は第１図に示すＢ―Ｂ′線断面
図である。第４図は従来の固体撮像素子の平面図
である。
１，１１，１２……転送電極、２……給電線、
１０……コンタクトホール、２０……半導体基板
、２２……チヤンネルストツプ領域、２３……チ
ヤンネル領域。
1 to 3 show an embodiment of the present invention,
Figure 1 is a plan view, Figure 2 is A-A' shown in Figure 1.
3 is a sectional view taken along the line BB' shown in FIG. 1. FIG. 4 is a plan view of a conventional solid-state image sensor. 1, 11, 12...transfer electrode, 2...power supply line,
DESCRIPTION OF SYMBOLS 10... Contact hole, 20... Semiconductor substrate, 22... Channel stop region, 23... Channel region.
Claims (1)
区画分離するチヤンネルストツプ領域とが半導体
基板表面部に並列配置され、この半導体基板上に
絶縁膜を介して上記チヤンネル領域と直交する複
数の電荷転送電極が並列配置された固体撮像素子
に於いて、上記チヤンネルストツプ領域で区画分
離され、夫々均一な受光面積を有する複数の絵素
の電極構造が少なくとも２種類から構成されたこ
とを特徴とする固体撮像素子。 A plurality of channel regions and a channel stop region that separates the channel regions are arranged in parallel on the surface of the semiconductor substrate, and a plurality of charge transfer electrodes perpendicular to the channel regions are arranged in parallel on the semiconductor substrate with an insulating film interposed therebetween. A solid-state image sensor, characterized in that the arranged solid-state image sensor comprises at least two types of electrode structures for a plurality of picture elements that are segmented by the channel stop region and each have a uniform light-receiving area. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988066176U JPH0749809Y2 (en) | 1988-05-19 | 1988-05-19 | Solid-state image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988066176U JPH0749809Y2 (en) | 1988-05-19 | 1988-05-19 | Solid-state image sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01169042U true JPH01169042U (en) | 1989-11-29 |
| JPH0749809Y2 JPH0749809Y2 (en) | 1995-11-13 |
Family
ID=31291588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988066176U Expired - Lifetime JPH0749809Y2 (en) | 1988-05-19 | 1988-05-19 | Solid-state image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749809Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5732548A (en) * | 1980-08-06 | 1982-02-22 | Nec Corp | Frequency controller for crystron |
| JPS59211384A (en) * | 1983-05-17 | 1984-11-30 | Fuji Photo Film Co Ltd | Frame transfer type charge transfer imaging device and imaging device using the same |
-
1988
- 1988-05-19 JP JP1988066176U patent/JPH0749809Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5732548A (en) * | 1980-08-06 | 1982-02-22 | Nec Corp | Frequency controller for crystron |
| JPS59211384A (en) * | 1983-05-17 | 1984-11-30 | Fuji Photo Film Co Ltd | Frame transfer type charge transfer imaging device and imaging device using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0749809Y2 (en) | 1995-11-13 |