JPH01173940U - - Google Patents
Info
- Publication number
- JPH01173940U JPH01173940U JP1988068927U JP6892788U JPH01173940U JP H01173940 U JPH01173940 U JP H01173940U JP 1988068927 U JP1988068927 U JP 1988068927U JP 6892788 U JP6892788 U JP 6892788U JP H01173940 U JPH01173940 U JP H01173940U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- placement section
- section
- setter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068927U JPH01173940U (cs) | 1988-05-25 | 1988-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068927U JPH01173940U (cs) | 1988-05-25 | 1988-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173940U true JPH01173940U (cs) | 1989-12-11 |
Family
ID=31294221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988068927U Pending JPH01173940U (cs) | 1988-05-25 | 1988-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173940U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04369243A (ja) * | 1991-06-17 | 1992-12-22 | Nissin Electric Co Ltd | ウエ−ハ−搬送機構 |
| US8500916B2 (en) | 2004-11-05 | 2013-08-06 | HGST Netherlands B.V. | Method for aligning wafers within wafer processing equipment |
-
1988
- 1988-05-25 JP JP1988068927U patent/JPH01173940U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04369243A (ja) * | 1991-06-17 | 1992-12-22 | Nissin Electric Co Ltd | ウエ−ハ−搬送機構 |
| US8500916B2 (en) | 2004-11-05 | 2013-08-06 | HGST Netherlands B.V. | Method for aligning wafers within wafer processing equipment |