JPH0117860Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a piezoelectric vibrator suitable for photoetching.

[Prior Art] Here, explanation will be given using a GT cut crystal resonator as an example. The conventional vibrator, as shown in Figure 1,
In order to prevent the energy of the diaphragm from being transmitted to the support parts 4 and 5 on the extensions of the pull-out parts 2 and 3 pulled out from both sides of the diaphragm 1 and the support parts 4 and 5, ring parts 6,
7 was set. On both sides of the diaphragm 1, excitation electrodes 8 and 9 for excitation (9 is on the back side and cannot be seen in the drawing) are arranged, and the excitation electrodes 8 and 9 are arranged on the drawer parts 2 and 3, the support parts 4 and 5, and the ring parts 6 and 7. In this case, extraction electrodes 10 and 11 (11 cannot be seen on the back side) are arranged. This vibrator has a structure that is difficult to support because the supporting parts are in opposing directions. Therefore, as shown in Fig. 2, an attempt is made to extend the pull-out parts 2 and 3 from both sides of the diaphragm 1 and provide legs 13 along the sides of the diaphragm 1 to support it in the same direction. Since vibrations are transmitted through the legs and propagated to the base, frequency fluctuations and output level reductions occur depending on the position where the terminals 15 are fixed.
Therefore, in order to lengthen the legs, curved parts 17 and 18 are provided along the sides of the diaphragm 1 as shown in Fig. 3 in an attempt to attenuate the transmission of vibrations, but this still does not allow the diaphragm to Vibration is transmitted to the base via the legs.

[Object of the present invention] An object of the present invention is to provide a piezoelectric vibrator that eliminates the above-mentioned drawbacks, and examples of the present invention will be shown below.

[Function] The present invention has one resonant system in the curved part and another resonant system in the leg and base, and by matching the resonance frequencies and gradually widening the width of the leg toward the base. Therefore, the vibration of the diaphragm can be gradually damped.

[Example] FIG. 4 shows an example of the present invention. In conventional vibrators, the legs drawn out from the diaphragm have a substantially constant width dimension, and are connected from the diaphragm to the base.
However, as shown in Fig. 4, the width W of the leg part from the diaphragm to the leg part is smaller than the width dimension drawn out by the diaphragm. It has become wider and has a widened leg dimension W ₂ .
By matching the resonance frequency of the curved part with the resonance frequency of the legs and base, and gradually damping the vibration between the legs and base, the vibration at the base is reduced, and the frequency and output level It is possible to reduce the change in

In the above embodiments, the curved portion is U-shaped, but the curved portion may be U-shaped, V-shaped, or the like. Furthermore, although quartz is used as an example of the piezoelectric material, other materials such as lithium tantalate, lithium niobate, or piezoelectric ceramic may also be used.

[Effects] With this invention, the transmission of vibration from the diaphragm to the base is reduced, there is no frequency fluctuation or decrease in output level due to the support system, the support system can be supported in the same direction, and the influence of connecting terminals is reduced. You can.

[Brief explanation of drawings]

1, 2, and 3 are perspective views showing a conventional technique, and FIG. 4 is a perspective view showing an embodiment of the present invention. 1... Vibration plate, 2, 3... Drawer part, 17, 18
...Curved part, 19, 20... Leg part, 14... Base, 8, 9... Excitation electrode, W ₁ ... Curved part dimension,
W ₂ ...Dimensions of expanded legs.

Claims (1)

[Scope of utility model registration request] Two drawer parts drawn out from the ends of both sides of the diaphragm on a line that passes through the center of gravity of the diaphragm processed into a quadrilateral shape and bisects the diaphragm, and from the two drawer parts along the side surface of the diaphragm. A curved portion that curves in one direction, two legs that extend from the curved portion in the other direction along the side surface of the diaphragm, and a base that connects the two legs are integrated from the diaphragm. an excitation electrode is disposed on the diaphragm, and in the piezoelectric vibrator supporting the base, the width of the leg gradually increases as the leg approaches the base. Features a piezoelectric vibrator.