JPH01181036U - - Google Patents

Info

Publication number
JPH01181036U
JPH01181036U JP7691388U JP7691388U JPH01181036U JP H01181036 U JPH01181036 U JP H01181036U JP 7691388 U JP7691388 U JP 7691388U JP 7691388 U JP7691388 U JP 7691388U JP H01181036 U JPH01181036 U JP H01181036U
Authority
JP
Japan
Prior art keywords
pellicle frame
periphery
attached
female screw
predetermined thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7691388U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7691388U priority Critical patent/JPH01181036U/ja
Publication of JPH01181036U publication Critical patent/JPH01181036U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の構成を示す図、第２図は従来
のペリクルフレームの剥離方法説明図を示す。 図において、１は原版、２は接着剤、３はペリ
クルフレーム、６は雌ネジ孔、７は雄ネジをそれ
ぞれ示す。

Claims (1)

  1. 【実用新案登録請求の範囲】 フオトマスクを形成した原版１の表面の周縁に
    接着剤２によつて貼付された所定の厚みを有する
    ペリクルフレーム３の周縁に、当該厚みを貫通す
    る複数の雌ネジ孔６を設け、 前記貼付された面と反対側の前記雌ネジ孔６に
    螺合する雄ネジ７を螺入することによつて前記貼
    付された面の剥離を行うようにしたことを特徴と
    するペリクルフレームの剥離機構。
JP7691388U 1988-06-09 1988-06-09 Pending JPH01181036U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7691388U JPH01181036U (ja) 1988-06-09 1988-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7691388U JPH01181036U (ja) 1988-06-09 1988-06-09

Publications (1)

Publication Number Publication Date
JPH01181036U true JPH01181036U (ja) 1989-12-27

Family

ID=31301918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7691388U Pending JPH01181036U (ja) 1988-06-09 1988-06-09

Country Status (1)

Country Link
JP (1) JPH01181036U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002131892A (ja) * 2000-10-27 2002-05-09 Asahi Kasei Electronics Co Ltd ペリクルの剥離方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002131892A (ja) * 2000-10-27 2002-05-09 Asahi Kasei Electronics Co Ltd ペリクルの剥離方法及びその装置

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