JPH01184480A - Inspecting device - Google Patents

Abstract

PURPOSE:To take measurement as to plural items accurately and speedily by one kind of probe base by arraying and supporting probe pins which each have one end arranged opposite each measurement end and the other end side connected to a tester side on a two-dimensional surface, and moving them up and down. CONSTITUTION:The probe pins 41 which each have one end arranged opposite a body 30 where many measurement ends 12 are present in plane and the other end side connected to the side of a tester 20 are arrayed and supported on the two-dimensional surface to form the probe base 40. The body 30 to be measured or probe pins 41 are moved up and down selectively to bring only probe pins 41 corresponding to an inspection item into contact with measurement terminals 12. For the purpose, the height of the probe pins 41 on the probe base 40 is set in plural stages and the body to be inspected or probe base are moved up and down relatively.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Field of Application) The present invention uses, for example, an electronic circuit board assembled by mounting various electronic components on a circuit board as an object to be measured. The present invention relates to a testing device for functionally testing the body.

(Prior art) In this type of testing equipment, there is a gap between the circuit board and the tester.
A functional test of the circuit board is performed by arranging a member called a test fixture and connecting the pattern surface of the circuit board to the output terminal of the tester.

Here, as shown in FIG. 3, the conventional test fixture has a probe base 1. It is constructed by fixing two bases 1 and 2, called interface bases 2, to a support base 3 so as to face each other.

The probe base 1 is arranged to support an array of probe pins 5, which are disposed facing the pattern of the circuit board, one end 5a is in contact with the pattern surface, and the other end 5b is connected to the wire rod 4. The interface paste 2 refers to the wire rod 4 at one end 6a facing the probe pin 5.
The interface pins 6 are arrayed and supported, and the other end 6b is brought into contact with the output terminal of the tester.

Then, by relative vertical movement of the circuit board or the probe base, one end 5a of all the probe pins 5 is brought into contact with the pattern surface of the circuit board at once, a signal is sent from the tester side, and this output is detected by the tester. A functional test was performed by doing this.

(Problems to be Solved by the Invention) In the inspection device configured as described above, all the probe pins 5 on the probe base 1 come into contact with the pattern surface at once, so depending on a certain inspection item, unnecessary patterns may also be electrically conductive. Particularly in the case of high-frequency measurements, contact with unnecessary patterns causes stray capacitance, making it impossible to perform accurate high-frequency measurements.

Therefore, if you want to perform an inspection according to the measurement item using the conventional device described above, it is necessary to prepare multiple probe bases according to the measurement item and replace the probe base every time the item changes. This increases the manufacturing cost of the probe base, requires wiring connections when replacing it, and requires a long inspection time, making it impossible to carry out efficient measurements.

Alternatively, it may be possible to perform the inspection using a different inspection device for each measurement item, but this does not solve the problem of requiring a probe base for each measurement item, it is troublesome to attach and detach the circuit board to the inspection device, and it is more expensive. The cost increase was unavoidable due to the need for multiple inspection devices.

If an all-pin contact type probe base is used to perform inspections according to the measurement items, it is necessary to control switching of relays, etc. on the tester side, and even with this method, it is inevitable that the cost of the equipment will increase. There was also the problem that the device became larger.

In addition, an inspection device in which about 2 to 4 bins of probe pins are arranged on an X-Y table and the table is driven to move the probe pins on a two-dimensional plane and make contact with the pattern surface according to the item has also been put into practical use. However, this method cannot be applied to an inspection device using multiple bins, and there is also the problem that the X-Y table is expensive.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned conventional problems and provide an inspection device that is based on one type of probe and can quickly perform accurate measurements on multiple items. It is in.

[Structure of the Invention] (Means for Solving the Problems) The present invention provides an object to be measured in which a large number of measurement ends are present in a plane, one end of which is arranged opposite to each measurement end, and the other end of which is disposed opposite to each measurement end. A probe base that supports probe pins connected to the tester side arranged on a two-dimensional surface, and ``By selective vertical movement of the object to be measured or the probe pins, only the probe pins corresponding to the test items come into contact with the measurement end. The inspection device includes a driving means for causing the inspection.

In realizing the above configuration, it is preferable to set the height of the probe pin on the probe base at multiple levels so that the object to be inspected or the probe base can be moved up and down relatively.

Alternatively, each of the probe pins on the probe base may be configured to be able to move up and down independently.

(Function) In the present invention, since the object to be measured or the probe pins are selectively moved up and down by the driving means, all the probe pins do not touch the measuring end at the same time, and the probe according to the measurement item is moved. Only the pins can selectively contact the measurement end, making it possible to test multiple types of measurement items despite using a single probe base.Moreover, since it does not touch unnecessary measurement ends, it is easy to use on the tester side. Measurements can be made without the need for switching control using relays or the like, and even in the case of high-frequency measurements, stray capacitance is reduced, making it possible to perform accurate inspections at all times.

Note that if the height of the probe pin is changed in stages and installed, inspections can be performed according to the measurement item by moving the object to be measured or the probe base up and down relative to the height of the stages. If it is possible and each probe pin has a vertical movement function, it can be made possible by controlling the vertical movement of the probe pin according to the measurement item.

(Embodiment) Hereinafter, an embodiment in which the present invention is applied to a circuit board inspection device will be specifically described with reference to the drawings.9 First, an overall outline of the embodiment device will be explained with reference to FIG. explain.

The apparatus of this embodiment can be roughly divided into a circuit board 10 on which an electronic component is mounted as an object to be inspected, a tester 20 for performing a functional test of this circuit board 10, and a tester 20 on which the circuit board 10 is placed and fixed. , and a test fixture that connects the pattern surface of the circuit board 10 and the output terminal of the tester 20.

The tester 20 includes a lid 21 that supports the test fixture 30 in a vertically movable manner, a locating pin 22 that is an example of a guide member that positions and guides an interface base 50 of the test fixture 30, which will be described later. It has a vacuum port 23 for vacuum suctioning the interface base 50, and a contact probe 24 with a spring, which is an output terminal of the tester 20, on the surface facing the test fixture 30.

Next, the test fixture 30, which is a characteristic configuration of the apparatus of this embodiment, will be explained with reference to FIG.

The test fixture 30 includes a guide base 35, a probe base 40, and an interface base 50, and the probe base 40 and the interface base 50 are fixed in parallel by a support 31. Further, the guide base 35 is supported by a compression coil spring 37 arranged between the guide base 35 and the probe base 40 such that the distance between the guide base 35 and the probe base 40 can be varied.

Vacuum holes 43 and 52 are provided in the probe base 40 and the interface base 50, respectively, and the vacuum tube 32 is connected between these holes to create a vacuum.
The guide base 35 can be attracted to the probe base 40 side, and when released, can be returned to the initial position by the biasing force of the compression coil spring 37, and the above mechanism can move the guide base 35 up and down. Note that the guide base 35 and probe base 40
Since the structure is such that a vacuum is drawn between the two, there is a sealed structure that prevents air leakage.

Next, the probe base 40 will be explained.

The probe base 40 is a base that supports a probe pin that comes into contact with the measurement end 12 of the circuit board 10 on the side opposite to the component mounting surface.

In this embodiment, two types of probe pins 41.4 are used.
2.

As shown in detail in FIG. 1, the probe pins 41, 42 have connection pieces 41a, 41b electrically connected to both ends thereof.
or 42a, 42b, the upper connection piece 41a,
42a has a spring pin structure so as to be biased to protrude toward one end in the axial direction, which is the direction of the arrow in the figure.

The probe pins 41 and 42 are connected to the probe base 4.
It is inserted into an insertion hole 40a formed at 0 and is supported and fixed.

The difference between the two probe pins 41 and 42 is that the upper terminals 41a and 42a have different heights, with the terminal 41a being located higher than the terminal 42a.

The guide plate 35 arranged above the probe base 40 has guide holes 35a corresponding to the arrangement positions of the probe pins 41, 42, and stoppers on both sides thereof that also serve as movable guide pins. pin 36.3
6, and this stopper pin 36.36 is inserted into a guide hole 44.44 formed in the probe base 40 and extends below the guide hole 44.44.

Further, a circuit board 10 is mounted on the upper surface of the guide base 35.
A guide pin 38 for use as a guide pin 38 is vertically provided so that the substrate 10 can be accurately positioned on the pin guide base 35.

Next, the interface page 50 will be explained.

This interface base 50 is connected to the tester 20.
in contact with the spring-loaded contact probe 24 of
It is a base that functions as an interface,
Interface pins 51 are supported on this base 50 at respective positions facing the spring-equipped contact probes 24 of the tester 20. This interface pin 51 has connecting pieces 51a and 51b that are electrically conductive at both ends thereof.

Further, a guide hole (not shown) is formed in the interface base 50, which is a guided member through which the locating pin 22 of the tester 20 is inserted, so that accurate positioning with respect to the tester can be achieved. It has become.

Incidentally, as will be described later, this interface base 50 is vacuum-suctioned toward the tester 20.
It has a structure that prevents air from flowing into the 0 side.

Further, a connection piece 41b of the probe pin 41 fixed to the probe base 40 and a connection piece 5 of the interface pin 51 supported by the interface base 50 are provided.
1a is connected by a wire 70.

Further, on the interface base 50, there is a cam 6 having a first surface 60a and a second surface 60b having different heights.
0 is slidably arranged and movable by an air cylinder 61.

Next, the effect will be explained.

The interface base 50, which is the base of the test fixture 30, is sucked toward the tester 20 by the vacuum boat 23 of the tester 20, and the connecting piece 51b of the interface pin 51 supported by the interface base 50 is pulled into the tester 20. Contact probe 24 with a spring is brought into contact.

After setting in this state, with the cam 60 set at the position shown in FIG. and the guide base 35
is lowered to the probe base 40 side. This downward movement is caused by the stopper pin 3 extending downward from the guide base 35.
6 until it comes into contact with the first surface 60a of the cam 60. Then, as shown in the figure, the stopper pin 36 is
By contacting the surface 60a of the probe pin 41, the connection end 41a of the probe pin 41 is reliably brought into contact with the measurement end 12 of the circuit board 10 due to its spring function.

Here, if the probe pin 41 that is contacted first is set to correspond to the measurement item to be executed first, by energizing the circuit board 10 by the tester 20, the measurement terminal corresponding to the first measurement item is set. 12 can now be energized and its functionality can be tested.

Therefore, unlike in the past, measurement ends that are not related to the measurement item are not touched, and stray capacitance is reduced even when measuring high frequencies, allowing accurate inspection. There is no need to replace the probe base when performing inspections according to the measurement items.
Alternatively, there is no need to change the testing device, and furthermore, there is no need to perform a switching operation on the tester side, so the testing throughput is improved and the testing can be performed using equipment that is cheaper than before.

After completing the first measurement item, the air cylinder 61 is driven to move the cam 60 to the right side in FIG. 1, and the evacuation operation described above is continued.

Then, the guide base 35 further descends toward the probe base 40, and this downward movement continues until the stopper pin 36 comes into contact with the second surface 60b of the cam 60. Then, the stopper pin 36
By connecting to the surface 60b, not only the probe pin 41 that was in contact earlier but also the probe pin 42 that was located below this comes into contact with the measurement end 12. Note that at this time, the probe pin 41 contracts due to its spring function, so that contact with the measurement end 12 can be ensured.

Then, by applying current from the tester 20 while the two types of probe pins 41 and 42 are in contact with each other,
It is possible to perform a functional test corresponding to the second measurement item.

Note that the present invention is not limited to the above embodiments, and various modifications can be made within the scope of the gist of the present invention.

For example, when configuring the probe pin by changing its height as described above, the height setting is not limited to two types, but can be set to multiple levels depending on the measurement item, and, In the case of such a configuration, the circuit board 1.0 is not limited to being moved stepwise as in the above embodiment, but even if the probe base 40 side is moved up and down,
A similar effect can be obtained.

Further, as the vertical movement mechanism, a vacuum system may be adopted as in the above embodiment, but a mechanism that moves up and down by mechanical pushing may also be used. In this case, there is no need for a stopper such as a cam to ensure gradual stopping as in the previous embodiment, and this can be achieved by its movement stroke.

In the above-mentioned embodiment, as long as one probe base is prepared regardless of the number of measurement items, it is possible to inspect many circuit boards of one company without having to replace the probe base. However, it is also possible to go further and adopt a configuration in which one probe base can be used for all types of circuit boards and measurement items.

For this purpose, each probe pin may be configured to be able to move up and down independently on the probe base. In this way, only the probe pin of the mouse can be selectively moved according to the measurement item and brought into contact with the measurement end, and the probe pin can be moved up and down regardless of the frequency of measurement of the circuit board and the measurement item "1". By selecting the motion, the probe pin can be moved to and brought into contact with the required measurement position.

When such a configuration is adopted, a system may be used in which a large number of probe pins are moved up and down independently by mechanical driving, but this would complicate the configuration and increase the size of the device. However, in recent years, various small and inexpensive means that can displace the position by energization have been provided, such as solenoids, bimetals, shape temperature alloys, piezoelectric elements, etc., and it is difficult to adopt these. Therefore, it is possible to provide a highly versatile inspection device that is inexpensive and compact.

Further, in the above embodiments, a circuit board inspection device has been described, but similar effects can be obtained even if the present invention is applied to a drive circuit of a matrix liquid crystal display device, etc.

[Effect of the invention 1 As explained above, according to the present invention, even though one type of probe base is used, by ensuring contact only with the measurement end according to the measurement item, it is possible to perform step-by-step measurement according to the measurement item. We can provide an inexpensive inspection device that can accurately perform inspections. In particular, even if the detection signal is a high-frequency signal, it can always perform accurate functional inspections. Also, it can selectively move up and down to adjust to the measurement item. Since we can carry out inspections according to your needs,
This has the effect of significantly improving inspection throughput compared to conventional methods.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view showing the tPi structure of a test fixture in a circuit board device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram showing the overall configuration of an inspection device using the test fixture shown in FIG. Explanatory diagram, FIG. 3 is a schematic explanatory diagram of a conventional inspection device.910...Circuit board, 20...Tester, 30...Test fixture, 35...Guide base, 40...Probe Base, 41. 42... Probe pin, agent Patent attorney Inoue - (1 other person) Figure 2 20 Tester

Claims (1)

[Claims] A device to be measured in which a large number of measuring ends are present in a plane, and a probe pin whose one end is arranged opposite to each measuring end and whose other end is connected to a tester side is arranged on a two-dimensional plane. By selectively moving the array-supported probe base and the object to be measured or probe pins up and down,
An inspection device comprising a drive means for bringing only the probe pins corresponding to inspection items into contact with a measurement end.