JPH01202090A - solid-state imaging device - Google Patents

Abstract

PURPOSE:To rapidly and highly accurately fix the position of a solid-state image pickup part on a prism block by forming two joint faces intersecting approximately at right angles on the outer periphery of connecting members and connecting respective joint faces to the solid-state image pickup part and the prism block respectively through adhesive layers. CONSTITUTION:Two joint faces intersecting approximately at right angles are formed on the outer periphery of the connecting members 23-26 and respective joint faces are connected to the image pickup part and the prism block respectively through the adhesive layers. Since connecting members 23-26 of the two joint faces intersecting approximately at right angles are formed, the two joint faces of the members 23-26 are arranged along the image pickup part 21 and the prism block 22 and connected at optional positional relation through the adhesive layers. The curing/shrinkage of the adhesive layers can be allowed to follow up the movement of the members 23-26 and the part 21 and the block can be cured while keeping them highly accurate without changing the positional relation between the part 21 and the block 22.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a solid-state imaging device such as a television camera that uses a solid-state imaging device such as an aaD (charge coupled device).

2. Description of the Related Art In recent years, solid-state imaging devices such as three-chip color television cameras that use three solid-state imaging devices have been developed. 6th
The figure is a sectional view of a color separation optical system of a three-panel color television camera. In FIG. 6, reference numeral 1 indicates a light beam that has passed through an imaging lens optical system such as a zoom lens, and 2 indicates prism members 2 and 2B.

This is a color separation prism made of 2C, which was published in 1977.
It is described in the publication No.-23724. After the luminous flux 1 is color-separated into luminous fluxes 5 to 7 of different colors by a gicroic mirror 3.4 provided in the color separation prism 2,
The light is received by solid-state image sensors 8 to 10, respectively. The image signals of each of the solid-state image sensors 8 to 10 are combined to obtain a color television signal.

In such a three-panel color television camera, the solid-state image sensors 8 to 1o are required to be in extremely correct positions. If the solid-state imaging devices 8 to 1o are not in the correct positional relationship, when the imaging signals are combined and the images are superimposed, color shift and false signals will occur, and the resolution will also decrease. Therefore, the solid-state image sensors 8 to 10 are fixed to the color separation prism 2 after precise alignment adjustment in six degrees of freedom (x, y, z directions and rotational directions) while imaging the test chart. be done. This fixing must be performed in a manner that maintains sufficient positional accuracy in each of the six degrees of freedom. The method still needs to be able to maintain stable positional accuracy against vibrations, temperature changes, etc. even after fixation. This alignment adjustment is called registration adjustment, and its positional accuracy is called registration accuracy. The positional accuracy that must be ensured is on the order of 1 μm for high-end models, and the conventional method for fixing it is JP-A-61-251.
No. 392 describes a method using an adhesive.

Problems to be Solved by the Invention The problems of the above-mentioned conventional fixing method will be explained. Advantages of using an adhesive include that it is easier to fix with six degrees of freedom than with screw fastening, and that there is no need to apply external force that causes deformation during fixation.

Compared to soldering, there is no need to apply heat that causes thermal expansion when fixing. Therefore, it can be said that the fixing method using adhesive is basically a method that allows easy fixation with high precision in six degrees of freedom. However, when it becomes necessary to replace parts such as the solid-state image sensor, there is a problem in that it is difficult to remove compared to screw fastening or soldering. Furthermore, adhesives generally have a property of so-called curing shrinkage, in which the volume shrinks by several inches upon curing, and this also poses a problem of deteriorating positional accuracy during fixation. Conventional fixing methods using adhesives have not taken appropriate consideration to solve both of these problems.

In view of these points, the present invention has a strong structure that can be fixed while maintaining the position of the solid-state image sensor with high precision against curing and shrinkage of the adhesive, and that maintains stable positional accuracy after fixing. It is an object of the present invention to provide a solid-state imaging device that can be easily removed when replacing parts and has a simple configuration with high manufacturability.

Means for Solving the Problems The present invention provides a prism block that divides a light beam that has passed through an imaging lens into a plurality of light beams and emits them, and a plurality of solid-state imaging components that each receive an image of the plurality of light beams. and a connecting member for connecting and fixing the solid-state imaging component and the prism block, at least two joining surfaces intersecting at a substantially right angle are formed on the outer periphery of the connecting member, and one of the joining surfaces is connected to the solid-state imaging component. Adhesive layers are provided on one component and the other on the prism block, respectively, for bonding.

Effects The effects of the above means will be described. By adjusting the six degrees of freedom of the solid-state imaging component, the positional relationship between the fixed portions of the solid-state imaging component and the prism block varies microscopically. However, by proving a connecting member that has two joining surfaces that intersect at approximately right angles, the two joining surfaces of this connecting member can be aligned with both the solid-state imaging component and the prism block, and Can be connected in any positional relationship. Curing and shrinkage of the adhesive layer can be followed by the movement of the connecting member, and the solid-state imaging component and the prism block can be cured while maintaining high precision without changing their positional relationship. Since the connection member, the solid-state imaging component, and the prism block can be bonded together by so-called surface bonding, in which surfaces are bonded together, strong fixation can be achieved that ensures sufficient positional stability after fixation.

Further, when removing the adhesive layer, the outer side of the connecting member is rapidly heated to cause the connecting member to expand rapidly, and thermal strain is generated in the adhesive layer, thereby promoting peeling. As a result, it can be easily removed without damaging the solid-state imaging components or the prism block.

Embodiments Hereinafter, embodiments of the solid-state imaging device of the present invention will be described based on the drawings. FIG. 1 is a perspective view of essential parts of a solid-state imaging device according to an embodiment of the present invention, in which solid-state imaging devices 8 to 10 in a color separation optical system of a three-panel color television camera as shown in FIG. The installation corresponds to the configuration.

In FIG. 1, a solid-state imaging component 21 represents a solid-state imaging device or a component incorporating the solid-state imaging device, and here it is a package member made of a ceramic material. 22
is a prism block, which represents a color separation prism or a component attached to it. 22 is a member of the prism block, and is a trimming filter plate that is attached to the output surface of the prism block, or an end-face attachment that is made of metal or ceramic material and has a window (not shown in the figure) through which the output light flux passes. Attached is a board.

Although the number of 22 members is not necessarily necessary in the present invention, it is effective when the exit surface of the prism block 22 is small. 23, 24.

25 and 26 refer to the solid-state imaging component 21 as the prism block 2.
This is a connecting member that connects and fixes the 2.It is made of glass and transmits ultraviolet rays.

When joining the connecting members 23, 24, 25, and 26, the solid-state imaging component 21 is first separated from the prism block 22, and a registration adjustment device (not shown) is used to perform chunking and alignment adjustment. be done.

Since this positioning adjustment is a six-degree-of-freedom adjustment for the light emitted from the prism block 22, the solid-state imaging component 21 will microscopically vary in distance and inclination with respect to the exit surface. In this aligned state, after applying ultraviolet curable resin to the joining surfaces of each of the connecting members 23 to 26, the solid-state imaging component 2 is attached as shown in the figure.
The prism block 22 is pasted along the outer peripheral side surface of the prism block 1 and the output surface of the prism block 22.

At this time, the connecting members 23 to 26 are not irradiated with ultraviolet light yet.
is held by the adhesive force of the ultraviolet curing resin as a liquid, and no external force is applied. Solid-state imaging component 2
1 remains chucked in the registration adjustment device.

In this state, the connecting members 23 to 26 are irradiated with ultraviolet rays from the outside to gradually cure the ultraviolet curing resin, and after curing is completed, the solid-state imaging component 21 is removed from the registration adjustment device.

Referring to FIG. 2, the above bonding process will be explained in detail. FIG. 2 is a sectional view showing the connection of the connecting member 23 of FIG. 1. The layer 27 shown in the shaded area is an ultraviolet curable resin layer before curing, and the connecting member 23 is first bonded to the connecting member 23 by the adhesive force of this liquid.
hold. 23 people.

Reference numeral 23B is a joint surface of the connecting member 23, and by making this a substantially right-angled positional relationship, the side surface 21 of the solid-state imaging component 21 and the output surface 22B of the prism block 22 can be used as they are, resulting in a simple configuration. . Moreover, even if the positional relationship between the two varies due to registration adjustment, it can be easily pasted without creating any gaps.

In FIG. 2, the solid-state imaging component 21 is a prism block 22.
The figure shows a state that is somewhat similar to that of the previous model, but such a state is caused by machining errors of each part.

Next, as shown by the arrows, when ultraviolet rays are irradiated from the outer surfaces 23G and 23D of the connecting member 23, they reach the ultraviolet curing resin layer 27, and curing and curing shrinkage proceed. As a result, the positions of the connecting members 23 are 23G, 23
Move from position D to positions 23E and 23F indicated by dotted lines. At this time, the positional relationship between the solid-state imaging component 21 and the prism block 22 does not change because it is held by the registration adjustment device, and only the connecting member 23 is in a free state. Therefore, highly accurate fixing that absorbs curing shrinkage of the ultraviolet curable resin layer 27 is possible. 23 joint surfaces of the connecting member 23.

Setting 23B at a substantially right angle is effective in that it facilitates the movement of the connecting member 23 due to curing shrinkage at this time, and also makes it difficult for the solid-state imaging component 21 to be affected by the movement. In addition, the bonding surfaces 23 and 23B of the connecting member 23 allow so-called surface bonding, which secures the bonding area by bonding surfaces together, to ensure sufficient fixing strength and positional stability after fixing. be enhanced. In particular, in the embodiment shown in FIG. 1, by joining the connecting members 23 to 26 from four directions around the solid-state imaging component 21, in addition to increasing the bonding area, structural rigidity can be increased and stability can be achieved. Improving sexuality. This has many advantages, such as making it possible to use a smaller connecting member with a narrower width.

Next, the solid-state imaging component 21 is removed when replacing the component, but basically the connecting member 23°, 24.25.
26, an example of which is shown in FIG. FIG. 3 is a perspective view showing a method for removing the connecting member 23. In the figure, 28 is a heating body having a structure similar to that of an electric soldering iron, and heating surfaces 28A and 28B of the cutout portion are shown.
has. After heating this heating body 28 in advance, the heating surfaces 28A and 28B are pressed against the outer surface of the connecting member 23 (23 and 23F in FIG. 2), causing rapid thermal expansion of the connecting member 23, and Thermal strain is generated at the joint where the cured resin layer is located. As a result, it becomes possible to cause peeling and remove the connecting member 23 in a short time without damaging the solid-state imaging component 21 or the prism block 22.

In the embodiment, since the connecting members 23 to 26 have a square prism shape, a large outer area for heating can be secured,
It also makes heating easier. Another advantage of this quadrangular prism shape is that parts having substantially right-angled surfaces can be easily processed, which is particularly advantageous when processing glass materials.

Note that, in order to further improve the workability of removal, measures such as lowering the melting point of the adhesive or making the coefficient of thermal expansion of the connecting member 23 different from that of other members may be applied in combination.

FIG. 4 is a perspective view of essential parts of a solid-state imaging device according to another embodiment of the present invention, in which the solid-state imaging devices 8 to 8 in the color separation optical system of a three-panel color television camera as shown in FIG. The attachment of 1o corresponds to the configuration. In FIG. 4, 31 is a solid-state imaging component, and 32 is a prism block. Connection members 33 to 36 connect and fix the solid-state imaging component 31 to the prism block 22, and each has two bonding surfaces that are substantially perpendicular to each other. This is joined to the front surface of the solid-state imaging component 31 and the outer circumferential side surface of the prism block 32 in a manner as shown in the figure. The joining method and the detaching method can be performed in the same manner as in the embodiment shown in FIG. 1, and the same effects can be obtained. The embodiment shown in FIG. 4 is effective when the output surface of the prism block 32 and the trimming filter plate 32A provided thereon are made smaller than the solid-state imaging component 31. On the other hand, the embodiment shown in FIG. 1 is effective when the solid-state imaging component 21 is made smaller than the exit surface of the prism block 32.

It is also possible to use a combination of the embodiments shown in FIGS. 1 and 4.

Note that the connecting member is not necessarily in the shape of a square prism. FIG. 6 shows a perspective view of another embodiment of the connecting member. It smells like a picture, 4o
shows an L-angle-shaped connecting member made by bending sheet metal. The surfaces of 40mm and 40B are approximately perpendicular to each other,
This becomes the joint surface. Since the connecting member 4o does not pass ultraviolet rays, it is preferable to use a two-component thermosetting resin or the like for the adhesive layer.

In that case as well, removal can be performed by rapid heating. Further, 41 is a triangular prism-shaped connecting member, which is made by cutting metal such as stainless steel. 41 people.

The surface 41B is in a substantially right-angled positional relationship and becomes a bonding surface.

Advantages of using metal as the material for the connecting member include the ability to select a material with a large coefficient of thermal expansion and thermal conductivity against rapid heating during removal, and ease of cutting.

Effects of the Invention As described above, according to the present invention, the position of the solid-state imaging component relative to the prism block can be fixed quickly and with high precision with a simple configuration, and the positional accuracy after fixing can be stably maintained. Moreover, the workability and economical efficiency of removal are improved3.
Solid-state imaging devices such as plate-type color television cameras can be realized.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a main part of a solid-state imaging device according to an embodiment of the present invention, FIG. 2 is a sectional view of a main part of the device, and FIG. 3 is a perspective view of a main part showing a method for removing parts in the device. FIG. 4 is a perspective view of essential parts of a solid-state imaging device according to another embodiment of the present invention, and FIG. 6 is a perspective view showing another shape of the connecting member in each of the devices,
FIG. 6 is a sectional view of a color separation optical system of a three-panel color television camera in a general solid-state imaging device. 21.31... Solid-state imaging components, 22.32...
. . . Prism block, 23-26. 33-36° 40.41 . . . Connection member, 27 . . . Ultraviolet curing resin layer, 28 . . . Heating body. Name of agent: Patent attorney Toshio Nakao and one other person? 3
．． 24.2';, 2b-Irregularly packed g5 material Fig. 1 Fig. 2

Claims (2)

[Claims] (1) a prism block that divides the light beam that has passed through the imaging lens into a plurality of light beams and emits them; a plurality of solid-state imaging components that each receive an image of the plurality of light fluxes; a connecting member that connects and fixes the prism block, and at least two joining surfaces that intersect at a substantially right angle are formed on the outer periphery of the connecting member, one of the joining surfaces is connected to the solid-state imaging component, and the other is connected to the prism block. and a solid-state imaging device bonded to each other by providing an adhesive layer. (2) The solid-state imaging device according to claim 1, wherein the connecting member is a rectangular prism-shaped glass member that transmits ultraviolet rays, and the adhesive layer is an ultraviolet curing resin layer.