JPH01214092A - Manufacture of printed wiring board - Google Patents

Manufacture of printed wiring board

Info

Publication number
JPH01214092A
JPH01214092A JP3749188A JP3749188A JPH01214092A JP H01214092 A JPH01214092 A JP H01214092A JP 3749188 A JP3749188 A JP 3749188A JP 3749188 A JP3749188 A JP 3749188A JP H01214092 A JPH01214092 A JP H01214092A
Authority
JP
Japan
Prior art keywords
resist film
resin layer
photosensitive resist
photosensitive
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3749188A
Other languages
Japanese (ja)
Inventor
Isao Kobayashi
功 小林
Hitoshi Arai
等 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3749188A priority Critical patent/JPH01214092A/en
Publication of JPH01214092A publication Critical patent/JPH01214092A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0094Filling or covering plated through-holes or blind plated vias, e.g. for masking or for mechanical reinforcement

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

PURPOSE:To prevent a metal plate layer within a through hole from coming off needlessly by etching due to insufficient exposure by forming a resin layer for protecting a resist film having excellent permeability to ultraviolet rays on a photosensitive resist film. CONSTITUTION:A photosensitive resist film 3 is formed by electric deposition on an insulating board 1 on which a through hole 1a and a metal plate layer 2 are provided. A resin layer 4A for protecting a resist film having excellent permeability to ultraviolet rays is formed thereon. Next, the resin layer 4A is exposed from a light source 6 via a mask film 4, and the photosensitive film 3 of the necessary part is hardened, after which the part where the photosensitive resist film is not hardened and the resin layer 4A are removed by development. After that, using the photosensitive resist film 3 left after development as a resist, the metal plate layer 2 of an unnecessary part is removed by etching. Said resin layer 4A is formed, for example, by impregnating the insulating board 1 in an aqueous paint containing resist-film protecting resin and by drying it.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、金属メッキ層をエツチングによって形成し
たプリントパターンを有するプリント配線板の製造方法
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a printed wiring board having a printed pattern formed by etching a metal plating layer.

〔従来の技術〕[Conventional technology]

第2因は従来のプリント配線板の製造方法を示す製造工
程図であり、図において、1は絶縁板、2はこの絶縁板
1上に設けられた金属メッキ層で、スルーホール1aの
内面にも均等に設けられて、いる。3は金属メッキ層2
の全面に電着塗装法などにより形成された感光性レジス
ト膜、4はこの感光性レジスト膜3上に形成され九レジ
スト膜保護用樹脂層、5はマスクフィルム、6は光源、
7は紫外線である。
The second factor is a manufacturing process diagram showing a conventional printed wiring board manufacturing method. They are evenly spaced. 3 is metal plating layer 2
4 is a photosensitive resist film formed on the entire surface of the photosensitive resist film 3 by electrodeposition coating method, 9 is a resin layer for protecting the resist film, 5 is a mask film, 6 is a light source,
7 is ultraviolet light.

次に、動作について説明する。Next, the operation will be explained.

まず、金属メッキ層2を有する絶縁板1上に、第2図(
a)に示すように、電着によって感光性レジスト膜3を
形成する。次に、この感光性レジスト膜3を有する絶縁
板1をレジスト膜保護用樹脂の水溶化塗料中に浸漬し、
その後、乾燥を行−って、第2図(b)に示すようにレ
ジスト膜保護用樹脂層4を形成する。続いて、第2図(
e)に示すように、バター二ンクニ必要なマスクフィル
ム5をレジスト膜保護用樹脂層4上に合わせ、走査型露
光機の光源6から紫外!I7を照射し、感光性レジスト
膜3の必要な部分に露光し、硬化させる。
First, on the insulating plate 1 having the metal plating layer 2, as shown in FIG.
As shown in a), a photosensitive resist film 3 is formed by electrodeposition. Next, the insulating plate 1 having the photosensitive resist film 3 is immersed in a water-soluble paint of a resin for protecting the resist film,
Thereafter, drying is performed to form a resist film protective resin layer 4 as shown in FIG. 2(b). Next, Figure 2 (
As shown in e), the necessary mask film 5 is placed on the resist film protective resin layer 4, and ultraviolet light is applied from the light source 6 of the scanning exposure machine. A necessary portion of the photosensitive resist film 3 is exposed to I7 and cured.

次に、M&光性レジスト膜3のうち露光されない部分お
よびレジスト膜保護用樹脂層4を現像によって除去し、
第2図(d) K示すようにする。続いて、残った感光
性レジスト膜3をレジストとしてエツチングを行い、不
必要な金属メッキ層2を除去して、82図(e)に示す
ようにバターニングしtプリント配線板を得る。
Next, the unexposed portion of the M&photo resist film 3 and the resist film protective resin layer 4 are removed by development,
Figure 2(d) Make it as shown in K. Subsequently, etching is performed using the remaining photosensitive resist film 3 as a resist, unnecessary metal plating layer 2 is removed, and patterning is performed as shown in FIG. 82(e) to obtain a T printed wiring board.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のプリント配線板の製造方法は以上のようであるの
で、第2図(b)に示すように、スルーホール1a内の
レジスト膜保挫用樹脂層4が厚い場合には、紫外線7が
これを透過できない九め、感光性レジスト膜3に到達で
きなくなり、硬化する必要がある上記スルーホール1a
内の感光性レジスト膜3が硬化せずに、現像工程で除去
されてしまい、次のエツチング工程で、スルーホール1
a内の金属メッキ層2の一部に欠落部ができてしまうな
どの問題点かあっ次。
Since the conventional method of manufacturing a printed wiring board is as described above, as shown in FIG. Ninth, the through hole 1a cannot reach the photosensitive resist film 3 and needs to be cured.
The photosensitive resist film 3 inside is removed during the development process without being cured, and the through hole 1 is removed during the next etching process.
There are problems such as a missing part being formed in a part of the metal plating layer 2 in a.

この発明は上記のような問題点を解消するためになされ
次もので、露光不十分によってスルーホール内の金属メ
ッキ層がエツチングによって不必要に欠落するのを防止
できるプリント配線板の製造方法を得ることを目的とす
る。
This invention has been made to solve the above-mentioned problems, and provides a method for manufacturing a printed wiring board that can prevent the metal plating layer in the through hole from being unnecessarily removed due to etching due to insufficient exposure. The purpose is to

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係るプリント配線板の製造方法は、絶縁板の
金属メッキ層上に感光性レジスト膜を浸漬塗布や電着な
どによって形成し、この感光性レジスト膜上にレジスト
膜保護用樹脂層を形成し、このレジスト膜保獲用樹脂層
上にマスクフィルムを介して露光することにより必要部
分のμ光性レジスト膜を硬化させ、硬化しない感光性レ
ジスト膜およびレジスト膜保護用樹脂層を現像によって
除去し、残った感光性レジスト膜をレジストとして上記
金属メッキ層の不必要部分をエツチングによって除去す
るようにしたものである。
The method for manufacturing a printed wiring board according to the present invention includes forming a photosensitive resist film on a metal plating layer of an insulating board by dip coating or electrodeposition, and forming a resist film protective resin layer on the photosensitive resist film. Then, by exposing the resist film retention resin layer to light through a mask film, the required portions of the μ-photosensitive resist film are cured, and the uncured photosensitive resist film and the resist film protection resin layer are removed by development. Then, using the remaining photosensitive resist film as a resist, unnecessary portions of the metal plating layer are removed by etching.

〔作用〕[Effect]

この発明における樹脂層形成工種は感光性レジスト膜の
上に1紫外線を通し易いアクリル系などのレジスト膜保
護用樹脂層を浸漬塗布tたは電着などの方法によって設
けるものであり、このレジスト膜保護用樹脂がスルーホ
ールに肉厚状態にて入り込んでも、紫外線はこれを容易
に透過してそのスルーホール内の感光性レジスト膜に到
達し、この感光性レジスト膜を確実に硬化可能にする。
The type of resin layer forming process in this invention is to provide a resist film protective resin layer, such as acrylic resin, which easily transmits ultraviolet rays, on the photosensitive resist film by dip coating or electrodeposition. Even if the protective resin enters the through hole in a thick state, ultraviolet rays easily pass through it and reach the photosensitive resist film within the through hole, thereby making it possible to reliably cure the photosensitive resist film.

こうすれば、スルーホール内の金属メッキ層に、エツチ
ングによる欠けを生じることがなくなり、品質の良いプ
リント配線板を製造できる。
In this way, the metal plating layer inside the through hole will not be chipped due to etching, and a high quality printed wiring board can be manufactured.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明の一実施例を図について説明する。@1
図において、4Aは紫外線透過率の良いレジスト膜保護
用樹脂層であり、このほか第2図に示したものと同一の
構成部分には同一符号を付して、その重複する説明を省
略する。
An embodiment of the present invention will be described below with reference to the drawings. @1
In the figure, 4A is a resist film protection resin layer with good ultraviolet transmittance, and the same components as those shown in FIG.

久に、動作について説明する。I will explain the operation shortly.

まず、金属メッキ層2を有する絶縁板1上に1第1図(
&)K示すように、電着によって感光性レジスト膜3を
形成する。次に1この感光性レジスト膜31:有する絶
縁板1を、紫外線透過率の良いアクリル系などのレジス
ト膜保護用樹脂からなる水溶化塗料中に浸漬し、その後
、乾燥を行って、第1図伽)に示すようにレジスト膜保
護用樹脂層4Aを形成する。続いて、第1図(c)に示
すように1マスクフイルム5をレジスト膜保護用樹脂層
4A上に合わせ、光源6から紫外線7を照射し、感光性
レジスト膜3の必要な部分に露光し、硬化させる。
First, on an insulating plate 1 having a metal plating layer 2 (see FIG. 1),
&) As shown in K, a photosensitive resist film 3 is formed by electrodeposition. Next, the insulating plate 1 having the photosensitive resist film 31 is immersed in a water-soluble paint made of a resist film protective resin such as acrylic with good ultraviolet transmittance, and then dried. As shown in FIG. 3), a resist film protective resin layer 4A is formed. Subsequently, as shown in FIG. 1(c), a mask film 5 is placed on the resist film protective resin layer 4A, and ultraviolet rays 7 are irradiated from the light source 6 to expose the required portions of the photosensitive resist film 3. , harden.

このときレジスト膜保護用樹脂層4Aは紫外線Tを十分
に透過し、感光性レジスト膜3に対する露光を十分とな
す。
At this time, the resist film protecting resin layer 4A sufficiently transmits the ultraviolet rays T, and the photosensitive resist film 3 is sufficiently exposed.

次に1感光性レジスト膜3のうち露光されない部分およ
びレジスト膜保護用樹脂層4Aを現像により除去し、第
11(d)K示すようKする。これによれば、スルーホ
ール1瓢内の感光性レジスト膜3も、上記十分な露光お
よび硬化によって均等に残り、続くエツチング工程にお
いても、絶縁板1(7)Xルーホール1a内に金属メッ
キ層2t、gl丙(e)に示すように確実に残すことが
できる。
Next, the unexposed portions of the photosensitive resist film 3 and the resist film protective resin layer 4A are removed by development, and subjected to K as shown in step 11(d). According to this, the photosensitive resist film 3 inside the through hole 1 also remains uniformly due to the above-mentioned sufficient exposure and curing, and even in the subsequent etching process, the metal plated layer 2t is formed inside the insulating plate 1 (7) x through hole 1a. , gl C (e).

なお、上記実施例では紫外線透過率の良いレジスト膜保
護用樹脂としてアクリル系のものを用い九が、紫外線を
透過しやすいあらゆる樹脂を用いることができる。
In the above embodiments, an acrylic resin was used as the resist film protective resin with good UV transmittance, but any resin that easily transmits UV rays can be used.

また、上記実施例で&i感光性レジスト膜3を有する絶
縁板1を、レジスト膜保護用樹脂の水溶化塗料中に浸漬
させた後乾燥して、その上にレジスト膜保護用樹脂層4
Ae形成した場合について説明し比が、電解槽に正また
は負に帯電した紫外線透過率の良いレジスト膜保護用樹
脂を収容し、こnに上記感光性レジスト膜3を金属メッ
キ層2上に有する絶縁板1を入れて電着処理することに
よっても、レジスト膜保護用樹脂層4Aを形成でき、上
記実施例と同様の効果を奏する。
Further, in the above embodiment, the insulating plate 1 having the &i photosensitive resist film 3 is immersed in a water-solubilized paint of a resist film protecting resin and then dried, and a resist film protecting resin layer 4 is applied thereon.
The case where Ae is formed is explained, and the ratio is such that a positively or negatively charged resist film protective resin with good ultraviolet transmittance is contained in an electrolytic bath, and the above-mentioned photosensitive resist film 3 is formed on the metal plating layer 2. The resist film protecting resin layer 4A can also be formed by inserting the insulating plate 1 and carrying out the electrodeposition process, and the same effects as in the above embodiment can be achieved.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によればプリント配線板の製造
過程において、紫外線透過率の良いアクリル系などの樹
脂によりレジスト膜保護用樹脂膜を形成シ念ので、スル
ーホールに埋った上記レジスト膜保論用樹脂が紫外光を
連断することがなくなり、スルーホール内に形成した感
光性レジスト膜を十分に露光硬化させることができるも
のが得られる効果がある。
As described above, according to the present invention, in the process of manufacturing a printed wiring board, a resin film for protecting the resist film is formed using a resin such as acrylic resin with good UV transmittance, so that the resist film buried in the through hole can be protected. This has the effect that the theoretical resin no longer blocks ultraviolet light and that the photosensitive resist film formed in the through hole can be sufficiently exposed and cured.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例によるプリント配線板の製
造方法を示す工程図、第2図は従来のプリント配線板の
製造方法を示す工程図である。 1は絶縁板、1aはスルーホール、2は金属メッキ層、
3は感光性レジスト膜、4Aは紫外線透過率の良いレジ
スト膜保護用樹脂層、5はマスクフィルム、6は光源、
7は紫外線。 なお、図中、同一符号は同一、または相当部分金示す。 特許出願人  三菱電機株式会社 (外2名)
FIG. 1 is a process diagram showing a method for manufacturing a printed wiring board according to an embodiment of the present invention, and FIG. 2 is a process diagram showing a conventional method for manufacturing a printed wiring board. 1 is an insulating plate, 1a is a through hole, 2 is a metal plating layer,
3 is a photosensitive resist film, 4A is a resist film protective resin layer with good ultraviolet transmittance, 5 is a mask film, 6 is a light source,
7 is ultraviolet rays. In the drawings, the same reference numerals indicate the same or equivalent parts. Patent applicant: Mitsubishi Electric Corporation (2 others)

Claims (1)

【特許請求の範囲】[Claims] スルーホールを有し、かつ金属メッキ層が設けられた絶
縁板上に、電着によつて感光性レジスト膜を形成するレ
ジスト膜形成工程と、上記感光性レジスト膜の上に紫外
線透過率の良いレジスト膜保護用樹脂層を形成する樹脂
層形成工程と、上記レジスト膜保護用樹脂層上に光源か
らマスクフィルムを介して露光し、必要部分の上記感光
性レジスト膜を硬化させる硬化工程と、上記感光性レジ
スト膜のうち硬化しない部分および上記レジスト膜保護
用樹脂層を現像によつて除去する現像工程と、この現像
によつて残つた上記感光性レジスト膜をレジストとして
、エッチングによつて不必要部分の上記金属メッキ層を
除去するエツチング工程とからなるプリント配線板の製
造方法。
A resist film forming step in which a photosensitive resist film is formed by electrodeposition on an insulating plate having through holes and a metal plating layer, and a resist film having good ultraviolet transmittance is formed on the photosensitive resist film. a resin layer forming step of forming a resist film protective resin layer; a curing step of exposing the resist film protective resin layer from a light source through a mask film to harden necessary portions of the photosensitive resist film; A development step in which the uncured portion of the photosensitive resist film and the resist film protective resin layer are removed by development, and the photosensitive resist film remaining after this development is used as a resist to remove unnecessary parts by etching. A method for manufacturing a printed wiring board, comprising an etching step for removing the metal plating layer in a portion.
JP3749188A 1988-02-22 1988-02-22 Manufacture of printed wiring board Pending JPH01214092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3749188A JPH01214092A (en) 1988-02-22 1988-02-22 Manufacture of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3749188A JPH01214092A (en) 1988-02-22 1988-02-22 Manufacture of printed wiring board

Publications (1)

Publication Number Publication Date
JPH01214092A true JPH01214092A (en) 1989-08-28

Family

ID=12498993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3749188A Pending JPH01214092A (en) 1988-02-22 1988-02-22 Manufacture of printed wiring board

Country Status (1)

Country Link
JP (1) JPH01214092A (en)

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