JPH0121903B2 - - Google Patents
Info
- Publication number
- JPH0121903B2 JPH0121903B2 JP8328980A JP8328980A JPH0121903B2 JP H0121903 B2 JPH0121903 B2 JP H0121903B2 JP 8328980 A JP8328980 A JP 8328980A JP 8328980 A JP8328980 A JP 8328980A JP H0121903 B2 JPH0121903 B2 JP H0121903B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic flux
- magnet
- sensor
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004907 flux Effects 0.000 claims description 34
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 21
- 239000007789 gas Substances 0.000 claims description 21
- 229910052760 oxygen Inorganic materials 0.000 claims description 21
- 239000001301 oxygen Substances 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005408 paramagnetism Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/74—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Description
【発明の詳細な説明】
本発明は酸素特有の磁気的性質(常磁性)を測
定原理に利用した磁気式酸素濃度測定装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic oxygen concentration measuring device that utilizes the magnetic property (paramagnetism) unique to oxygen as a measurement principle.
磁気式酸素濃度測定装置には、熱磁気式及びダ
ンベルを使つた磁気力式や磁気圧式がある。これ
らの各方式は、優れた長所を有するが、短所もあ
る。例えば、熱磁気式は被測定ガスに含まれる可
燃性成分の影響や設置姿勢の影響を受ける。ダン
ベルを使用したものには、ダンベルを吊る部材の
断線事故が付随する。磁気圧式は、微少な磁気圧
変化を検出する方式なので、高精度測定には難点
がある。 Magnetic oxygen concentration measuring devices include a thermomagnetic type, a magnetic force type using a dumbbell, and a magnetic pressure type. Although each of these methods has significant advantages, there are also disadvantages. For example, the thermomagnetic type is affected by combustible components contained in the gas to be measured and by the installation orientation. When using dumbbells, there is a risk of disconnection of the member that hangs the dumbbells. Since the magnetic pressure method detects minute changes in magnetic pressure, it is difficult to measure with high precision.
本発明は、かゝる従来の磁気式酸素濃度測定装
置の欠点に鑑みてなされたものである。 The present invention has been made in view of the drawbacks of the conventional magnetic oxygen concentration measuring device.
本発明は、被測定ガスの熱伝導率の変化による
影響や保守工数を軽減するために、熱線及び可動
部をもたない構成の簡単な磁気式酸素濃度測定装
置を実現した。 The present invention has realized a simple magnetic oxygen concentration measuring device having no hot wire or moving parts in order to reduce the influence of changes in thermal conductivity of the gas to be measured and the number of maintenance steps.
即ち、本発明は、磁束密度に対応した信号を検
出するセンサと、このセンサに差動的に磁束を与
える第1及び第2の磁石と、第1の磁石による磁
場内に、又は、その磁場を含んで配設する被測定
ガスを満たした第1の室と、第2の磁石による磁
場内に、若しくは、その磁場を含んで配設する標
準ガスを満たした第2の室、又は、第2の磁石に
よる磁場内に配設する磁性体とを有している。 That is, the present invention provides a sensor that detects a signal corresponding to magnetic flux density, first and second magnets that differentially apply magnetic flux to the sensor, and a magnetic field within or within the magnetic field of the first magnet. a first chamber filled with a gas to be measured and disposed containing a gas to be measured, and a second chamber filled with a standard gas disposed within a magnetic field of a second magnet or containing the magnetic field; and a magnetic body disposed within the magnetic field of the second magnet.
以下、図面を参照し、本発明について詳しく説
明する。 Hereinafter, the present invention will be explained in detail with reference to the drawings.
第1図は、本発明の原理を説明するための図で
ある。第1図において、極性の異なる磁極N極及
びS極を適当な間隔Xを設けて、対向配設した場
合、漏れ磁束φlが両磁極間に生ずる。そして、漏
れ磁束φlと磁極周囲の酸素濃度Cとの間に(1)式が
成立つ。 FIG. 1 is a diagram for explaining the principle of the present invention. In FIG. 1, when N and S magnetic poles of different polarity are arranged facing each other with an appropriate interval X, a leakage magnetic flux φ l is generated between the two magnetic poles. Then, equation (1) holds true between the leakage magnetic flux φ l and the oxygen concentration C around the magnetic pole.
φl=Kc(1−C) (1)
但し、Kc……定数
酸素濃度Cの変化に伴う漏れ磁束φlの変化分を
Δφとおけば、(1)式より、変化分Δφと酸素濃度C
との関係は、第2図の直線イのように、直線的な
ものとなる。また、磁束センサによる検出信号を
Epとおけば、信号Epと変化分Δφとの間に(2)式が
成立ち、第2図の直線ロのような線形的なものと
なる。 φ l =K c (1-C) (1) However, K c ...constant If the change in leakage magnetic flux φ l due to the change in oxygen concentration C is set as Δφ, then from equation (1), the change Δφ and Oxygen concentration C
The relationship is linear, as shown by line A in Figure 2. In addition, the detection signal from the magnetic flux sensor
If E p is set, then equation (2) is established between the signal E p and the variation Δφ, resulting in a linear line like the straight line B in FIG.
Ep=KsΔφ (2)
但し、Ks……定数
したがつて、被測定ガスの中に、N極とS極が
対向する磁石と、その磁石の漏れ磁束を検出する
センサを配設し、センサの検出信号から被測定ガ
スの酸素濃度を測定することができる。 E p = K s Δφ (2) However, K s ...constant Therefore, a magnet with N and S poles facing each other and a sensor that detects the leakage magnetic flux of the magnet are placed in the gas to be measured. However, the oxygen concentration of the gas to be measured can be measured from the detection signal of the sensor.
第3図は、本発明の一実施例による酸素濃度測
定装置の構成説明図である。 FIG. 3 is an explanatory diagram of the configuration of an oxygen concentration measuring device according to an embodiment of the present invention.
酸素濃度測定装置は、磁束センサ30と、セン
サ30を挾んでほぼ対称的な構成をなす参照系1
0と測定系20とを有する。参照系10は、磁極
121と122が対向するコア12、コア12の
胴部123に巻回する励磁コイル13及びコイル
13に基準電流Irを流す電源14で構成され、コ
イル13に流れる電流Irによつて、磁極122が
N極、121がS極となる電磁石11と、この電
磁石11を内設すると共に、参照ガスを満たした
ケース15とを有する。一方、測定系20は、磁
極221と222が対向するコア22、コア20
の胴部223に巻回する励磁コイル23及びコイ
ル23に制御電流Icを流す可変機構241付き電
源24で構成され、コイル23に流れる電流Icに
よつて、磁極221がN極、222がS極となる
電磁石21と、この電磁石11を内設すると共
に、流入口251から流出口252へと流れる被
測定ガスを満たしたケース25とを有する。ケー
ス15と25は、いずれも、センサ30を含んで
構成され、各室は完全に独立した構造となつてい
る。また、ケース15の流入口及び流出口は、図
において省略されている。さらに、センサ30
は、市販の磁束密度測定装置のセンサ部であつ
て、磁束密度と検出信号とが直線関係にあるもの
が用いられている。なお、図において、磁束密度
測定装置の電源部、表示部等が省略されている。 The oxygen concentration measuring device includes a magnetic flux sensor 30 and a reference system 1 having a substantially symmetrical configuration with the sensor 30 in between.
0 and a measurement system 20. The reference system 10 includes a core 12 in which magnetic poles 121 and 122 face each other, an excitation coil 13 wound around the body 123 of the core 12, and a power source 14 that supplies a reference current I r to the coil 13. It has an electromagnet 11 in which the magnetic pole 122 is the north pole and the magnetic pole 121 is the south pole, and a case 15 in which the electromagnet 11 is installed and filled with a reference gas. On the other hand, the measurement system 20 includes a core 22 with magnetic poles 221 and 222 facing each other;
It consists of an excitation coil 23 wound around the body 223 of the coil 23, and a power source 24 with a variable mechanism 241 that flows a control current Ic through the coil 23.The current Ic flowing through the coil 23 causes the magnetic pole 221 to be the N pole and the magnetic pole 222 to be the N pole. It has an electromagnet 21 serving as an S pole, and a case 25 in which the electromagnet 11 is installed and filled with gas to be measured flowing from an inlet 251 to an outlet 252. Both cases 15 and 25 are configured to include a sensor 30, and each chamber has a completely independent structure. Further, the inlet and outlet of the case 15 are omitted in the figure. Furthermore, the sensor 30
is a sensor section of a commercially available magnetic flux density measuring device, in which the magnetic flux density and the detection signal have a linear relationship. Note that in the figure, the power supply section, display section, etc. of the magnetic flux density measuring device are omitted.
次に、上記構成をなす酸素濃度測定装置の動作
について説明する。 Next, the operation of the oxygen concentration measuring device having the above configuration will be explained.
コイル13に流れる電流Irによる電磁石11の
漏れ磁束がφrで、コイル23に流れる電流Icによ
る電磁石21の漏れ磁束がφcであれば、これらの
漏れ磁束は、センサ30によつて差動的に検出さ
れ、その出力Epは(3)式となる。 If the leakage magnetic flux of the electromagnet 11 due to the current I r flowing through the coil 13 is φ r and the leakage magnetic flux of the electromagnet 21 due to the current I c flowing through the coil 23 is φ c , then these leakage magnetic fluxes are It is detected dynamically, and its output E p is expressed by equation (3).
Ep=KsΔφ=Ks(φr−φc) (3)
上記関係を磁気等価回路で示すと第4図とな
る。即ち、第4図において、R1はコア12の鉄
心部の磁気抵抗、Rrはコア12のギヤツプ部
(磁極121と122間)の磁気抵抗、R2はコア
22の鉄心部の磁気抵抗、Rcはコア22のギヤ
ツプ部(磁極221と222間)の磁気抵抗であ
つて、これらの各磁気抵抗でブリツジを構成し、
変化分Δφ=φr−φcがセンサ30によつて検出さ
れるように動作する。 E p =K s Δφ=K s (φ r −φ c ) (3) The above relationship is shown in a magnetic equivalent circuit as shown in FIG. That is, in FIG. 4, R 1 is the magnetic resistance of the iron core part of the core 12, R r is the magnetic resistance of the gap part (between magnetic poles 121 and 122) of the core 12, R 2 is the magnetic resistance of the iron core part of the core 22, R c is the magnetic resistance of the gap part of the core 22 (between the magnetic poles 221 and 222), and each of these magnetic resistances constitutes a bridge,
The sensor 30 operates so that the change Δφ=φ r −φ c is detected by the sensor 30 .
実際の測定にあたつて、ケース25にも参照ガ
スを流して、センサ30の検出信号Epが零となる
ように可変機構241を調整する。しかる後、ケ
ース25に被測定ガスを流す。調整後のセンサ3
0の検出信号Epは、電磁石21の漏れ磁束φc、即
ち、被測定ガスの酸素濃度に比例したものとな
る。第5図は、本発明者が実際で得たデータをグ
ラフにしたものである。実験データは、両磁極間
のギヤツプX1(第3図参照)を10mm、コア12と
21の間隔X2(第3図参照)を9mm、電磁石11
の磁点密度Br及び電磁石21の磁束密度Bcを0.5
mT(ニ5G)に設定し、センサ30に市販のフラ
ツクスセンサを用いて得たものである。 In actual measurement, the reference gas is also flowed into the case 25, and the variable mechanism 241 is adjusted so that the detection signal E p of the sensor 30 becomes zero. After that, the gas to be measured is caused to flow into the case 25. Sensor 3 after adjustment
The detection signal E p of 0 is proportional to the leakage magnetic flux φ c of the electromagnet 21, that is, the oxygen concentration of the gas to be measured. FIG. 5 is a graph of data actually obtained by the inventor. The experimental data shows that the gap between both magnetic poles X 1 (see Figure 3) is 10 mm, the distance between cores 12 and 21 X 2 (see Figure 3) is 9 mm, and the electromagnet 11
The magnetic spot density B r and the magnetic flux density B c of the electromagnet 21 are 0.5
It was obtained by setting mT (d5G) and using a commercially available flux sensor as the sensor 30.
次に、本発明の第2の実施例について説明す
る。 Next, a second embodiment of the present invention will be described.
上記第3図で示した実施例において、参照系1
0を電磁石11、参照ガスを満たしたケース15
及びセンサ30で構成したが、第2の実施例で
は、ケース15に代えて、電磁石11による磁場
内に磁性体ブロツクを配設する構成を特徴とす
る。磁性体ブロツクを配設することによつて、電
磁石11による磁場内の透磁率を所望の値に設定
することができるので、第3図における参照系1
0と同様な作用効果を得ることができる。 In the embodiment shown in FIG. 3 above, the reference system 1
0, electromagnet 11, case 15 filled with reference gas
However, the second embodiment is characterized by a structure in which a magnetic block is disposed in the magnetic field of the electromagnet 11 instead of the case 15. By arranging the magnetic block, the magnetic permeability in the magnetic field generated by the electromagnet 11 can be set to a desired value, so that the reference system 1 in FIG.
It is possible to obtain the same effects as 0.
さらに、本発明の第3の実施例について説明す
る。上記第3図で示した実施例は、センサ30の
検出信号を被測定ガスの酸素濃度に対応させる構
成となつている。第3の実施例では、電源24の
可変機構241を作動して、センサ30の検出信
号を、常時、あらかじめ定めた値にする手段を具
備することを特徴とする。即ち、零位法の測定系
を構成することを特徴とする装置である。この実
施例は、感度、安定性等の点で優れている。 Furthermore, a third embodiment of the present invention will be described. The embodiment shown in FIG. 3 is configured to make the detection signal of the sensor 30 correspond to the oxygen concentration of the gas to be measured. The third embodiment is characterized by comprising means for operating the variable mechanism 241 of the power source 24 to always set the detection signal of the sensor 30 to a predetermined value. That is, this device is characterized in that it constitutes a measurement system using the zero-position method. This example is excellent in terms of sensitivity, stability, etc.
次に、第6図を参照して、本発明の第4の実施
例について説明する。第6図において、第3図に
付した符号と同一のものは、同一意味をもたせて
あるので、ここでの説明を省略する。 Next, a fourth embodiment of the present invention will be described with reference to FIG. In FIG. 6, the same reference numerals as those in FIG. 3 have the same meanings, so their explanations will be omitted here.
第6図における構成の特徴は、ケース15と2
5とを、先端にセンサ30を有するプローブ40
を導入する非磁性体で構成するハウジグ50に固
着した点にある。 The features of the configuration in Figure 6 are cases 15 and 2.
5 and a probe 40 having a sensor 30 at its tip.
This is because it is fixed to a housing 50 made of a non-magnetic material into which the magnetic flux is introduced.
上記構成であれば、コア11と21の固定を堅
固にすることができるので、微小な振動に対して
安定した検出特性を得ることができる。 With the above configuration, since the cores 11 and 21 can be firmly fixed, stable detection characteristics against minute vibrations can be obtained.
なお、上記各実施例において、参照系10及び
測定系20の磁場は、電磁石11及び21によつ
て作成される構成を示したが、本発明はこれに限
定するものではない。参照系10及び測定系20
の双方、若しくは、一方を永久磁石、又は、電磁
石と永久磁石の結合体で構成してもよい。 In each of the above embodiments, the magnetic fields of the reference system 10 and the measurement system 20 are created by the electromagnets 11 and 21, but the present invention is not limited to this. Reference system 10 and measurement system 20
Both or one of them may be composed of a permanent magnet, or a combination of an electromagnet and a permanent magnet.
以上詳しく説明したように、本発明の装置によ
れば、磁束密度検出手段で磁石の漏れ磁束を検出
し、被測定ガスの酸素濃度を測定するようにした
ため、被測定ガスの熱伝導率の変化による影響が
なく精度の良い測定ができる。また、ダンベル方
式ではないので、構成が簡単で設置姿勢による誤
差がなく、かつ、保守工数の軽減も実現できる。 As explained in detail above, according to the apparatus of the present invention, the leakage magnetic flux of the magnet is detected by the magnetic flux density detection means and the oxygen concentration of the gas to be measured is measured, so that the change in thermal conductivity of the gas to be measured is Accurate measurements can be made without any influence from Furthermore, since it is not a dumbbell type, the configuration is simple, there are no errors due to installation posture, and maintenance man-hours can be reduced.
第1図及び第2図は、本発明の測定原理説明
図、第3図は、本発明の一実施例による磁気式酸
素測定装置の構成説明図、第4図は、磁気等価回
路構成図、第5図は、出力特性図、第6図は、本
発明の他の実施例による磁気式酸素濃度測定装置
の構成説明図である。
10……参照系、20……測定系、30……セ
ンサ、11及び21……電磁石、12及び22…
…コア、13及び23……コイル、14及び24
……電源、15及び25……ケース。
1 and 2 are diagrams explaining the measurement principle of the present invention, FIG. 3 is a diagram explaining the configuration of a magnetic oxygen measuring device according to an embodiment of the present invention, and FIG. 4 is a diagram illustrating the configuration of a magnetic equivalent circuit. FIG. 5 is an output characteristic diagram, and FIG. 6 is an explanatory diagram of the configuration of a magnetic oxygen concentration measuring device according to another embodiment of the present invention. 10... Reference system, 20... Measurement system, 30... Sensor, 11 and 21... Electromagnet, 12 and 22...
... Core, 13 and 23 ... Coil, 14 and 24
...Power supply, 15 and 25...Case.
Claims (1)
に配置されこの磁束センサ内に互いに逆向きの磁
束を形成する第1及び第2の磁石と、前記第1の
磁石を収容する第1のケースと、前記第2の磁石
を収容する第2のケースとを具備し、前記第1の
ケース内に被測定ガスを流し、前記第2のケース
内に参照ガスを流し、前記磁束センサで検出され
る前記第1及び第2の磁石の磁束差に対応した検
出信号に基づき前記被測定ガス中の酸素濃度を測
定することを特徴とする磁気式酸素濃度測定装
置。 2 磁束センサと、この磁束センサを挟んで対称
に配置されこの磁束センサ内に互いに逆向きの磁
束を形成する第1及び第2の磁石と、前記第1の
磁石を収容するケースと、前記第2の磁石の磁場
内に設けられた磁束調整用の磁性体ブロツクとを
具備し、前記第2の磁石によつて基準磁束を形成
し、前記ケース内に被測定ガスを流して、前記磁
束センサで検出される前記第1及び第2の磁石の
磁束差に対応した検出信号に基づき前記被測定ガ
ス中の酸素濃度を測定することを特徴とする磁気
式酸素濃度測定装置。[Scope of Claims] 1. A magnetic flux sensor, first and second magnets that are arranged symmetrically with this magnetic flux sensor in between and form mutually opposite magnetic fluxes in this magnetic flux sensor, and a housing that accommodates the first magnet. and a second case housing the second magnet, a gas to be measured flows in the first case, a reference gas flows in the second case, and a second case houses the second magnet. A magnetic oxygen concentration measuring device, characterized in that the oxygen concentration in the gas to be measured is measured based on a detection signal corresponding to a magnetic flux difference between the first and second magnets detected by a magnetic flux sensor. 2. A magnetic flux sensor, first and second magnets that are arranged symmetrically across the magnetic flux sensor and form magnetic fluxes in opposite directions within the magnetic flux sensor, a case that accommodates the first magnet, and a case that accommodates the first magnet. and a magnetic block for magnetic flux adjustment provided in the magnetic field of the second magnet, the reference magnetic flux is formed by the second magnet, the gas to be measured is caused to flow in the case, and the magnetic flux sensor is A magnetic oxygen concentration measuring device, characterized in that the oxygen concentration in the gas to be measured is measured based on a detection signal corresponding to a magnetic flux difference between the first and second magnets detected by the sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8328980A JPS578442A (en) | 1980-06-19 | 1980-06-19 | Magnetic measuring apparatus for concentration of oxygen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8328980A JPS578442A (en) | 1980-06-19 | 1980-06-19 | Magnetic measuring apparatus for concentration of oxygen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS578442A JPS578442A (en) | 1982-01-16 |
| JPH0121903B2 true JPH0121903B2 (en) | 1989-04-24 |
Family
ID=13798223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8328980A Granted JPS578442A (en) | 1980-06-19 | 1980-06-19 | Magnetic measuring apparatus for concentration of oxygen |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS578442A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021070925A1 (en) | 2019-10-09 | 2021-04-15 | 日本製鉄株式会社 | Steel sheet and method for manufacturing same |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4667157A (en) * | 1984-04-03 | 1987-05-19 | The Babcock & Wilcox Company | Linear Hall effect oxygen sensor with auxiliary coil magnetic field balancing |
| JP2002107345A (en) * | 2000-10-03 | 2002-04-10 | Showa Tansan Co Ltd | Oxygen concentration measuring device such as filling filler |
| US8542009B2 (en) | 2008-05-14 | 2013-09-24 | Koninklijke Philips N. V. | Oxygen concentration measurement with GMR |
| US8935128B2 (en) * | 2008-11-20 | 2015-01-13 | Mechaless Systems Gmbh | Interference-compensated sensor |
-
1980
- 1980-06-19 JP JP8328980A patent/JPS578442A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021070925A1 (en) | 2019-10-09 | 2021-04-15 | 日本製鉄株式会社 | Steel sheet and method for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS578442A (en) | 1982-01-16 |
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