JPH0123858B2 - - Google Patents
Info
- Publication number
- JPH0123858B2 JPH0123858B2 JP55133552A JP13355280A JPH0123858B2 JP H0123858 B2 JPH0123858 B2 JP H0123858B2 JP 55133552 A JP55133552 A JP 55133552A JP 13355280 A JP13355280 A JP 13355280A JP H0123858 B2 JPH0123858 B2 JP H0123858B2
- Authority
- JP
- Japan
- Prior art keywords
- information
- information recording
- recording
- film
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24318—Non-metallic elements
- G11B2007/24322—Nitrogen
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
- G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Description
【発明の詳細な説明】
本発明は、レーザ光や電子線等のエネルギービ
ームの照射により情報記録膜に凹部あるいは孔部
を形成して、画像、音声信号あるいは電子計算機
等の情報を記録するようにした情報記録媒体に関
する。Detailed Description of the Invention The present invention provides a method for recording information such as images, audio signals, electronic computers, etc. by forming recesses or holes in an information recording film by irradiating an energy beam such as a laser beam or an electron beam. Regarding information recording media.
近年、レーザ光等のエネルギービームにより各
種情報の書込み、読み出し等を行なう方法が注目
を集めている。これは高い記録密度で情報の蓄積
が可能であり、また情報の書込み、読み出しが非
接触即ち、書込み、読み出しの過程で情報記録用
部材及び情報変換素子を破壊することなく、且つ
高速で行なえる他幾つかの利点があるためであ
る。 In recent years, methods of writing and reading various information using energy beams such as laser beams have been attracting attention. This allows information to be stored at a high recording density, and information can be written and read without contact, that is, without destroying the information recording member and information conversion element during the writing and reading process, and at high speed. This is because there are several other advantages.
この種の情報記録方式に関しては、例えば
IEEE Spectrum AUGUST1978に提示された
「Optical disk systems emerge」他に記載され
ているが、第１図に基づき簡単に原理を説明す
る。第１図中、１は記録媒体としてのデイスクで
あり、基板１１とその上に形成された情報記録膜
１２から構成されている。このデイスク１に光学
レンズ２を所定の距離迄接近させた後、レーザ光
発生装置３より記録すべき情報に対応したパルス
状レーザ光を照射する。この様な操作を行なう
と、上記情報記録膜１２のうちレーザ光を照射さ
れた部分は、レーザ光により加熱され熔解若しく
は蒸発し、孔部若しくは凹部が形成される。即ち
情報が記録されたことになる。次に、レーザ光発
生装置３よりレーザ光をレンズ２を介して照射
し、例えばその反射光をハーフミラー４を介し、
光検出器５で受けると、孔部若しくは凹部が検出
されている部分は、レーザ光の照射を受けなかつ
た部分に比べ、光の反射率が異なるため、反射光
の強度変化として孔部若しくは凹部の有無、位置
等が検出可能である。即ち、情報が読取られたこ
とになる。ここで情報を読取る際のレーザ光は、
書込む際に比べて十分強度の小さいものとする。 Regarding this type of information recording method, for example,
Although it is described in ``Optical disk systems emerge'' presented in IEEE Spectrum AUGUST 1978 and elsewhere, the principle will be briefly explained based on Fig. 1. In FIG. 1, reference numeral 1 denotes a disk as a recording medium, which is composed of a substrate 11 and an information recording film 12 formed on the substrate. After the optical lens 2 is brought close to the disk 1 to a predetermined distance, a pulsed laser beam corresponding to the information to be recorded is irradiated from the laser beam generator 3. When such an operation is performed, the portion of the information recording film 12 that is irradiated with the laser beam is heated by the laser beam, melts or evaporates, and a hole or a recess is formed. In other words, information has been recorded. Next, a laser beam is irradiated from the laser beam generator 3 through the lens 2, and the reflected light is transmitted through the half mirror 4, for example.
When the light is received by the photodetector 5, the part where the hole or recess is detected has a different reflectance than the part which has not been irradiated with the laser beam, so the change in the intensity of the reflected light is reflected in the hole or recess. It is possible to detect the presence or absence, position, etc. In other words, the information has been read. The laser light used to read the information here is
The strength shall be sufficiently lower than that for writing.
ところで現在実用に供し得るレーザ光発生装置
としてはガスレーザ装置があり、実用化しつつあ
るレーザ光発生装置としては半導体レーザ装置が
ある。ガスレーザ装置は比較的高出力が得られる
利点はあるものの、レーザ管の他に外部変調器、
内部変調器、ドライバ等各種の大形装置から構成
されているため、全体として、かなり大形の装置
になり、従つて、これを用いると情報記録読取り
装置が大形化してしまうという欠点がある。 By the way, there is a gas laser device as a laser beam generating device that can be put into practical use at present, and a semiconductor laser device is a laser beam generating device that is being put into practical use. Gas laser devices have the advantage of relatively high output, but in addition to the laser tube, they also require an external modulator,
Since it is composed of various large devices such as an internal modulator and a driver, the device as a whole becomes quite large, and its use has the disadvantage that the information recording/reading device becomes large. .
一方、半導体レーザ発生装置は小形、軽量、高
効率で直接変調が出来、更にレンズ系や光検出系
と一体化した超小形化も可能と云う長所があるも
のの、極めて低出力しか得られないと云う欠点が
ある。また、半導体レーザには、高出力で駆動さ
れた場合、特に劣化が著しく、寿命が低下すると
云う難点もある。 On the other hand, semiconductor laser generators have the advantage of being small, lightweight, highly efficient, capable of direct modulation, and can be made ultra-compact by being integrated with a lens system or photodetection system, but they can only obtain extremely low output. There is a drawback. Semiconductor lasers also have the disadvantage that, when driven at high output, they deteriorate particularly markedly and have a shortened lifespan.
そこで上述のような記録方式の情報記録読取り
装置を小形、軽量かつ低価格ならしめるために
は、低出力のエネルギービームにても記録可能
な、即ち高感度の情報記録媒体の開発が望まれて
いる。この種の情報記録媒体に適した情報記録膜
としては、例えばビスマスBi、テルルTe、ロジ
ウムRh等の金属ないし半金属材料、カルコゲン
ガラス材料他数多くのものが知られているが、こ
れらはいずれも記録感度の点で不満足なものであ
る。例えばBiを記録膜とした場合、情報の書込
みには100ｍＪ／cm2程度以上のエネルギーが必要
だが、パルス照射時間を100nsec程度に設定する
と、要求されるレーザビームの強度は、記録膜の
面上で100ｍＷ／μm2となり、光学系での損失等
を考慮すれば、現在実用化されている半導体レー
ザを用いては、実用化は極めて困難である。 Therefore, in order to make an information recording/reading device using the above-mentioned recording method compact, lightweight, and low-cost, it is desired to develop an information recording medium that can record even with a low-output energy beam, that is, has high sensitivity. There is. There are many known information recording films suitable for this type of information recording medium, including metals or semimetals such as bismuth Bi, tellurium Te, rhodium Rh, chalcogen glass materials, etc. The recording sensitivity is unsatisfactory. For example, when Bi is used as a recording film, an energy of about 100 mJ/ cm2 or more is required to write information, but if the pulse irradiation time is set to about 100 nsec, the required laser beam intensity will reach the surface of the recording film. The output power is 100 mW/μm 2 , and if losses in the optical system are considered, it is extremely difficult to put it into practical use using the semiconductor lasers currently in use.
本発明の目的は、かかる従来の欠点を除去し、
低出力のエネルギービームにても書込み可能な高
感度の情報記録媒体を提供することにある。 The object of the present invention is to eliminate such conventional drawbacks and
An object of the present invention is to provide a highly sensitive information recording medium that can be written even with a low-power energy beam.
本発明は上記目的を達成するために、窒素
（Ｎ）を含むテルル（Te）膜を情報記録膜として
使用することを特徴としている。 In order to achieve the above object, the present invention is characterized in that a tellurium (Te) film containing nitrogen (N) is used as an information recording film.
本発明の記録媒体は、プラスチツク、ガラス等
の基板上に記録材料を薄膜化して被覆して製作さ
れる。基板には形状の制限はなく、薄いフイルム
状のものを使用することもあり得る。また、本発
明の記録媒体は、第１図のような構造の他、第２
図の如く基板１１と記録膜１２との接着性ないし
光学的性質を改良する目的で適当な下地層１３を
形成することもあり得るし、第３図の如く記録膜
１２を保護する目的で、記録膜１２上に更に保護
層１４を設けた構造で使用されることもあり得
る。 The recording medium of the present invention is manufactured by coating a substrate such as plastic or glass with a thin film of recording material. There are no restrictions on the shape of the substrate, and a thin film may be used. Furthermore, the recording medium of the present invention has a structure as shown in FIG.
As shown in the figure, an appropriate underlayer 13 may be formed for the purpose of improving the adhesion or optical properties between the substrate 11 and the recording film 12, or as shown in FIG. 3, for the purpose of protecting the recording film 12. A structure in which a protective layer 14 is further provided on the recording film 12 may also be used.
レーザ光等のエネルギービームで記録膜に孔部
若しくは凹部が形成されるのは、記録膜がレーザ
光等を吸収し、そのエネルギーの一部が熱エネル
ギーに変換され、その結果記録膜のレーザ光照射
部分が融点あるいは沸点等の温度迄上昇して、光
の反射率や透過率が変化することによる。しかし
変換された熱エネルギーの全てが記録膜の温度上
昇に費やされるのではなく、その一部は基板側へ
流れ、基板を加熱するのに費される。従つて、記
録膜の記録感度を向上させるには、光の吸収率が
大であり、融点、沸点等で決める記録温度が低
く、かつ熱伝導率、熱拡散率が小さい材料を選定
することが重要である。 Holes or depressions are formed in a recording film by an energy beam such as a laser beam because the recording film absorbs the laser beam, and a portion of that energy is converted into thermal energy, resulting in the formation of holes or depressions in the recording film. This is because the temperature of the irradiated area rises to the melting point or boiling point, and the reflectance or transmittance of light changes. However, not all of the converted thermal energy is used to raise the temperature of the recording film, but a portion of it flows to the substrate side and is used to heat the substrate. Therefore, in order to improve the recording sensitivity of a recording film, it is necessary to select a material that has high light absorption, low recording temperature determined by melting point, boiling point, etc., and low thermal conductivity and thermal diffusivity. is important.
本発明における情報記録膜は、Te膜にＮを含
ませることによりかかる高感度化に必要な条件を
ほぼ満たすことができる。即ち、Ｎを含ませるこ
とにより、光の吸収率や熱伝導率に余り変化を与
えることなく、記録温度の低下を図ることが可能
となつた。これはレーザ光等を照射したとき、
Teの融点よりかなり低い温度でN2ガス遊離によ
る体積変化が生じることによる。 The information recording film of the present invention can almost satisfy the conditions necessary for such high sensitivity by including N in the Te film. That is, by including N, it has become possible to lower the recording temperature without significantly changing the light absorption rate or thermal conductivity. This is when irradiated with laser light, etc.
This is due to the volume change due to N 2 gas liberation occurring at a temperature considerably lower than the melting point of Te.
以下、実施例に基づき説明する。 The following will explain based on examples.
スパツタ装置内を真空度10-6mmHgに排気後、
N2ガスを10-4mmHg以上の真空度を保つよう導入
した。これは、安定にプラズマを発生させるため
である。次いで、電極間に高周波電界を印加し、
窒素ガスプラズマを発生させ、金属Teのターゲ
ツトをスパツタし、基板上にＮを含むTe膜を形
成した。この記録膜の組成はTe（80％）、Ｎ（20
％）〔原子％〕であつた。高周波電界の電力は
200Wとした。また、比較例として蒸着法にて基
板上にTe膜を形成した情報記録媒体を製作した。 After evacuating the inside of the sputtering device to a vacuum level of 10 -6 mmHg,
N 2 gas was introduced to maintain a vacuum level of 10 −4 mmHg or higher. This is to generate plasma stably. Next, a high frequency electric field is applied between the electrodes,
Nitrogen gas plasma was generated and a metal Te target was sputtered to form a Te film containing N on the substrate. The composition of this recording film is Te (80%) and N (20%).
%) [atomic %]. The power of the high frequency electric field is
It was set to 200W. In addition, as a comparative example, an information recording medium was manufactured in which a Te film was formed on a substrate using a vapor deposition method.
得られた情報記録媒体の記録感度を以下、の方
法で測定した。即ち、上記記録媒体の夫々に同一
記録情報に対応させ、パルス変調されたレーザビ
ームを照射し、書込みを行なつた。レーザはHe
−Neガスレーザ（6238Å）でビーム径は約1μｍ
である。レーザビームの強度は、フイルターを用
い１ｍＷから20ｍＷになるよう変化させた。記録
情報の読み出しは、0.8ｍＷのHe−Neレーザビ
ームを照射し、反射光の強度変化を検出した。こ
の検出器の出力と書き込み用レーザビームの強度
との関係から書込み閾値を求めた。比較例のTe
膜の書込み閾値は60ｍＪ／cm2であるのに対し、実
施例のＮを含むTe膜の閾値は30ｍＪ／cm2と約1/2
であつた。 The recording sensitivity of the obtained information recording medium was measured by the following method. That is, each of the recording media was made to correspond to the same recording information, and writing was performed by irradiating the same with a pulse-modulated laser beam. The laser is He
-Beam diameter is approximately 1μm with Ne gas laser (6238Å)
It is. The intensity of the laser beam was varied from 1 mW to 20 mW using a filter. To read the recorded information, a 0.8 mW He--Ne laser beam was irradiated, and changes in the intensity of reflected light were detected. The writing threshold was determined from the relationship between the output of this detector and the intensity of the writing laser beam. Comparative example Te
The write threshold of the film is 60 mJ/cm 2 , whereas the threshold of the Te film containing N in the example is 30 mJ/cm 2 , about 1/2
It was hot.
上述した如く、本発明の情報記録媒体を用いる
ことにより、半導体レーザ等低出力のエネルギー
ビームによる情報記録を行なうことが出来る。 As described above, by using the information recording medium of the present invention, information can be recorded using a low-output energy beam such as a semiconductor laser.
また凹部あるいは孔部による記録情報の読取り
は、第１図のような反射光の強度検出による方式
の他、透過光の強度検出による方式でもよい。 Further, the reading of the recorded information through the recesses or holes may be performed not only by detecting the intensity of reflected light as shown in FIG. 1, but also by detecting the intensity of transmitted light.
第１図は本発明が適用される情報記録読取り装
置の一例を示す図、第２図および第３図は本発明
が適用される情報記録媒体の構成例を示す図であ
る。
１……デイスク（記録媒体）、１１……基板、
１２……情報記録膜。
FIG. 1 is a diagram showing an example of an information recording/reading device to which the present invention is applied, and FIGS. 2 and 3 are diagrams showing an example of the configuration of an information recording medium to which the present invention is applied. 1... Disk (recording medium), 11... Substrate,
12... Information recording film.
Claims (1)
報に応じた凹部あるいは孔部が形成される情報記
録膜が設けられた情報記録媒体において、前記情
報記録膜は窒素を含有するテルル膜であることを
特徴とする情報記録媒体。1. An information recording medium provided with an information recording film on a substrate in which recesses or holes according to information are formed by irradiation with an energy beam, characterized in that the information recording film is a tellurium film containing nitrogen. Information recording medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55133552A JPS5758250A (en) | 1980-09-25 | 1980-09-25 | Information recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55133552A JPS5758250A (en) | 1980-09-25 | 1980-09-25 | Information recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5758250A JPS5758250A (en) | 1982-04-07 |
| JPH0123858B2 true JPH0123858B2 (en) | 1989-05-09 |
Family
ID=15107476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55133552A Granted JPS5758250A (en) | 1980-09-25 | 1980-09-25 | Information recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5758250A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3275985D1 (en) * | 1981-12-31 | 1987-05-14 | Western Electric Co | Optical recording media |
| JPS5999777U (en) * | 1982-12-24 | 1984-07-05 | 共同印刷株式会社 | ID card with optical memory |
| JPS5999779U (en) * | 1982-12-24 | 1984-07-05 | 共同印刷株式会社 | ID card with optical memory medium |
| JPS6211685A (en) * | 1985-07-10 | 1987-01-20 | Mitsubishi Chem Ind Ltd | Optical recording medium |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5211906A (en) * | 1975-07-18 | 1977-01-29 | Hitachi Ltd | Material for recording |
-
1980
- 1980-09-25 JP JP55133552A patent/JPS5758250A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5758250A (en) | 1982-04-07 |
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