JPH01262924A - hydrogen separation membrane - Google Patents
hydrogen separation membraneInfo
- Publication number
- JPH01262924A JPH01262924A JP8812888A JP8812888A JPH01262924A JP H01262924 A JPH01262924 A JP H01262924A JP 8812888 A JP8812888 A JP 8812888A JP 8812888 A JP8812888 A JP 8812888A JP H01262924 A JPH01262924 A JP H01262924A
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen
- alloy
- palladium
- curve
- hydrogen separation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000001257 hydrogen Substances 0.000 title claims description 60
- 229910052739 hydrogen Inorganic materials 0.000 title claims description 60
- 239000012528 membrane Substances 0.000 title claims description 24
- 238000000926 separation method Methods 0.000 title claims description 19
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title claims 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 31
- 229910052763 palladium Inorganic materials 0.000 claims description 15
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 11
- 229910052720 vanadium Inorganic materials 0.000 claims description 9
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 42
- 150000002431 hydrogen Chemical class 0.000 description 17
- 238000000034 method Methods 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 11
- 230000035699 permeability Effects 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910000990 Ni alloy Inorganic materials 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 229910000531 Co alloy Inorganic materials 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000004678 hydrides Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- -1 etc. Chemical compound 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910000756 V alloy Inorganic materials 0.000 description 1
- 229910000946 Y alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 1
- 229940043276 diisopropanolamine Drugs 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- UBQALOXXVZQHGR-UHFFFAOYSA-N palladium yttrium Chemical compound [Y].[Pd] UBQALOXXVZQHGR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000629 steam reforming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Hydrogen, Water And Hydrids (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は水素分離膜に関する。更に詳しくは水素含有ガ
スから超高純度の水素を低温においても高透過度で分離
し、かつ耐久性に優れた水素分離膜に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to hydrogen separation membranes. More specifically, the present invention relates to a hydrogen separation membrane that separates ultra-high purity hydrogen from hydrogen-containing gas with high permeability even at low temperatures and has excellent durability.
近年、半導体産業、光フアイバー製造業などの発展に伴
い高純度水素の需要が高まっている。In recent years, demand for high-purity hydrogen has increased with the development of the semiconductor industry, optical fiber manufacturing industry, etc.
水素は天然ガス、ナフサなどの化石燃料を原料とし、水
蒸気改質法あるいは部分酸化法などで主に製造されてい
る。その他に石油精製プロセスあるいは食塩電解による
副産物として、また水電解によって水素が製造されてい
る。これらの方法によって製造された水素ガス中には、
Ｃ０１ＣＯ２、水蒸気、炭化水素などの不純物が含有さ
れているため、高純度の水素を得るためには水素を分離
精製する必要がある。Hydrogen is produced from fossil fuels such as natural gas and naphtha using steam reforming or partial oxidation methods. Hydrogen is also produced as a byproduct of the oil refining process or salt electrolysis, and by water electrolysis. Hydrogen gas produced by these methods contains
Since it contains impurities such as CO1CO2, water vapor, and hydrocarbons, it is necessary to separate and refine hydrogen in order to obtain high-purity hydrogen.
従来技術
従来、水素の精製法としては、パラジウム合金膜を用い
る拡散法、カセイソーダ、ジイソプロパツールアミンな
どを用いる化学吸収法、水、深冷メタノールなどを用い
る物理吸収法、活性炭、アルミナゲル、モレキュラーシ
ーブスなどを用いる吸着法、液体窒素、液体空気などを
用いる深冷分離法、ポリジメチルシロキサン、ポリイミ
ドなどを用いる高分子膜による分離法などが行われてい
る。Conventional technology Conventionally, hydrogen purification methods include a diffusion method using a palladium alloy membrane, a chemical absorption method using caustic soda, diisopropanol amine, etc., a physical absorption method using water, cryogenic methanol, etc., activated carbon, alumina gel, etc. Adsorption methods using molecular sieves, cryogenic separation methods using liquid nitrogen, liquid air, etc., and separation methods using polymer membranes using polydimethylsiloxane, polyimide, etc., have been used.
しかし、９９．９９９９９ ％以上の超高純度の水素を
得る方法としては、前記のパラジウム合金膜を用いる拡
散法しかない。パラジウム合金膜としてはパラジウムに
銀を数１０％添加した合金膜が代表的なものである。し
かし、この合金は低温における水素透過度が小さいため
、水素分離能を上げるためには３００℃以上で使用しな
ければならなく、その上高価である問題点がある。However, the only way to obtain ultra-high purity hydrogen of 99.99999% or higher is the diffusion method using the palladium alloy membrane described above. A typical palladium alloy film is an alloy film in which several ten percent of silver is added to palladium. However, since this alloy has a low hydrogen permeability at low temperatures, it must be used at temperatures above 300° C. in order to improve its hydrogen separation ability, and it is also expensive.
発明が解決しようとする課題
本発明は従来のパラジウム合金膜からなる水素分離膜に
おける問題点を解消しようとするもので、低温において
も高透過度で超高純度の水素を分離し得られ、かつ安価
に耐久性の水素分離膜を提供しようとするものである。Problems to be Solved by the Invention The present invention aims to solve the problems with conventional hydrogen separation membranes made of palladium alloy membranes, and is capable of separating ultra-high purity hydrogen with high permeability even at low temperatures. The purpose is to provide a durable hydrogen separation membrane at low cost.
課題を解決するための手段
水素分離膜における水素透過度は、水素の拡散係数と水
素の固溶度の積で表わすことができる。バナジウムの水
素の拡散係数はパラジウムのそれに比べて、２００〜３
００℃の温度において５倍以上と大きく、また水素の固
溶度も大きい。Means for Solving the Problems Hydrogen permeability in a hydrogen separation membrane can be expressed as the product of hydrogen diffusion coefficient and hydrogen solid solubility. The hydrogen diffusion coefficient of vanadium is 200 to 3 compared to that of palladium.
At a temperature of 00°C, it is as large as 5 times or more, and the solid solubility of hydrogen is also large.
従って、バナジウムの水素透過度はパラジウムのそれに
比べて著しく太きい。Therefore, the hydrogen permeability of vanadium is significantly higher than that of palladium.
本発明者らは、バナジウムを水素分離膜の素材として使
用すべく研究の結果、バナジウムは低い水素圧で多量の
水素を吸収し、また２００℃以下では水素化物を形成し
水素脆性を起こし易い。また、酸化し易く、表面に水素
の透過の障害となる酸化皮膜を形成する。従ってそのま
までは水素分離膜としては使用できない。The present inventors conducted research to use vanadium as a material for hydrogen separation membranes, and found that vanadium absorbs a large amount of hydrogen at low hydrogen pressures, and forms hydrides at temperatures below 200° C., which tends to cause hydrogen embrittlement. In addition, it is easily oxidized, forming an oxide film on the surface that impedes hydrogen permeation. Therefore, it cannot be used as a hydrogen separation membrane as it is.
そこで、バナジウムにニッケルまたはコバルト、あるい
はその両者を５〜２０原子チの範囲に加えて合金膜とす
ると、バナジウムの水素透過度を大きく減することなく
、水素脆性を改良し得られ、水素分離用合金膜として使
用し得られることを見出した。Therefore, by adding 5 to 20 atoms of nickel or cobalt, or both, to vanadium to form an alloy film, it is possible to improve the hydrogen embrittlement without significantly reducing the hydrogen permeability of vanadium. It has been found that it can be used as an alloy film.
また、この合金膜の表面にパラジウムあるいはパラジウ
ム合金を被覆すると、耐酸化性となると共に、２００℃
以上で使用すると、合金成分がパラジウム皮膜に拡散し
、これにより硬化し水素脆化を起こし難くなると言う新
しい知見を得た。これらの知見に基づいて本発明を完成
した。In addition, if the surface of this alloy film is coated with palladium or palladium alloy, it becomes oxidation resistant and
When used in the above conditions, the new knowledge was obtained that the alloy components diffuse into the palladium film, which hardens it and makes it difficult to cause hydrogen embrittlement. The present invention was completed based on these findings.
本発明の要旨は、
Ｎｉ、Ｃｏの１種または２種の元素５〜２０原子チ、残
部バナジウムからなる合金膜の表面に、パラジウムまた
はパラジウム合金を被覆させたものからなる水素分離膜
、にある。The gist of the present invention is a hydrogen separation membrane consisting of an alloy membrane consisting of 5 to 20 atoms of one or two of Ni and Co, and the balance being vanadium, the surface of which is coated with palladium or a palladium alloy. .
本発明におけるバナジウム合金のＮｉ、Ｃｏまたはその
両元素の量が、５原子チ未満では水素脆性を改善しえな
く、また２０原子チを超えると合金中の水素の固溶度が
小さくなるため、水素透過度が小さくなると共に著しく
硬化し加工が困難となる。従ってそれらの量は５〜２０
原子チの範囲であることが適当である。If the amount of Ni, Co, or both elements in the vanadium alloy in the present invention is less than 5 atoms, hydrogen embrittlement cannot be improved, and if it exceeds 20 atoms, the solid solubility of hydrogen in the alloy decreases. As the hydrogen permeability decreases, it hardens significantly and becomes difficult to process. Therefore, their amount is 5 to 20
Suitably, the range is within the range of atomic atoms.
パラジウム、パラジウム合金の被覆はメツキ法、蒸着法
、スパッタ法などによって行うことができる。パラジウ
ム合金としては、パラジウム−銀合金（銀２０〜３０原
子％）、パラジウム−イツトリウム合金等が挙げられる
。Coating with palladium or palladium alloy can be performed by a plating method, a vapor deposition method, a sputtering method, or the like. Examples of the palladium alloy include palladium-silver alloy (silver 20 to 30 atomic %), palladium-yttrium alloy, and the like.
発明の効果 本発明の水素分離膜は次のような効果を有する。Effect of the invention The hydrogen separation membrane of the present invention has the following effects.
１）２００℃のような低温においても、大きな水素透過
度を示すので、水素分離を省エネルギーで行うことがで
きる。1) Since it exhibits high hydrogen permeability even at low temperatures such as 200°C, hydrogen separation can be performed with energy savings.
２）水素透過度はパラジウムのみから成る膜よりも大き
く、優れている。2) Hydrogen permeability is higher and better than a membrane made only of palladium.
３）水素化物を形成しないので、水素脆性が起こらず、
また水素吸収・放出過程において塑性変化が起こらない
ので耐久性に優れている。3) Since no hydride is formed, hydrogen embrittlement does not occur,
Furthermore, since no plastic changes occur during the hydrogen absorption/release process, it has excellent durability.
４）合金膜表面にパラジウムまたはパラジウム合金膜が
被覆されているので、炭素、オイルミストなどの付着に
よる水素分離性能の劣化は、２００〜３００℃で空気を
導入するベーキング処理により回復させることができ、
高能率操業が可能である。4) Since the alloy membrane surface is coated with palladium or palladium alloy membrane, deterioration in hydrogen separation performance due to adhesion of carbon, oil mist, etc. can be recovered by baking treatment that introduces air at 200 to 300°C. ,
High efficiency operation is possible.
５）バナジウムはパラジウムの約１０分の１の価値であ
るので、既存のパラジウム合金膜に比較して安価である
。5) Since vanadium is about one-tenth the value of palladium, it is cheaper than existing palladium alloy membranes.
実施例１
アルゴン中のアーク溶解法により、■−１５原子％Ｎｉ
合金および■−１５原子％ＣＯ合金を溶製し、熱間圧延
により約１鵡厚の膜とした。これらの膜の表面に電解メ
ツキ法により厚さｌ Ｏｎｍのパラジウム被覆をした。Example 1 ■-15 atomic% Ni was melted by arc melting in argon.
The alloy and the -15 atomic % CO alloy were melted and hot-rolled into a film with a thickness of about 1 mm. The surfaces of these films were coated with palladium to a thickness of 1 Onm by electrolytic plating.
これらの水素透過の温度依存性を示すと、第１図の曲線
１（Ｖ−Ｎｉ合金）１曲線２（Ｖ−Ｃｏ合金）の通りで
ある。The temperature dependence of these hydrogen permeations is shown in curve 1 (V-Ni alloy) and curve 2 (V-Co alloy) in FIG.
なお、曲線３は比較のためのパラジウムのみから成る膜
の場合を示す。この結果が示すように本発明の水素分離
膜の水素透過度は、パラジウム膜のそれよりも大きいこ
とが分かる。Note that curve 3 shows the case of a film made only of palladium for comparison. As shown by these results, the hydrogen permeability of the hydrogen separation membrane of the present invention is greater than that of the palladium membrane.
本発明の水素分離膜を数気圧の水素圧下で繰り返し水素
透過試験を行ったがき裂は発生しなかった。また、炭素
あるいはオイルミストなどによる水素分離性能の劣化は
、２００〜３００℃での空気を導入するベーキング処理
により回復した。Hydrogen permeation tests were repeatedly conducted on the hydrogen separation membrane of the present invention under several atmospheres of hydrogen pressure, but no cracks were found. Furthermore, deterioration in hydrogen separation performance due to carbon or oil mist was recovered by baking treatment at 200 to 300°C by introducing air.
実施例２゜
アルゴン中のアーク溶解法によりｖ−１５原子％Ｎｉ合
金を溶製し、その水素圧カー組成等温曲線を測定した。Example 2 A v-15 atomic % Ni alloy was produced by arc melting in argon, and its hydrogen pressure Kerr composition isotherm curve was measured.
その結果を第２図に示す。図中の曲線は１７５℃におけ
る吸収曲線（１−ａ）と放出曲線（１−ｂ）、２５０℃
における吸収曲線（２−ａ）と放出曲線（２−ｂ）、３
５０℃における吸収曲線（３−ａ）と放出曲線（３−ｂ
）を示す。いずれの圧力−組成等温曲線においても、一
定の水素圧で１急激に水素濃度が増大する所謂プラトー
が認められないことから、測定温度、圧力範囲において
水素化物が形成されないことが分かる。すなわち、この
合金は水素脆性を起こしにくいことが分かる。The results are shown in FIG. The curves in the figure are the absorption curve (1-a) at 175°C and the emission curve (1-b) at 250°C.
Absorption curve (2-a) and release curve (2-b) in 3
Absorption curve (3-a) and release curve (3-b) at 50°C
) is shown. In any of the pressure-composition isotherm curves, there is no so-called plateau in which the hydrogen concentration suddenly increases at a constant hydrogen pressure, indicating that no hydride is formed in the measured temperature and pressure range. In other words, it can be seen that this alloy is less likely to cause hydrogen embrittlement.
また、同一温度における水素吸収・放出曲線において大
きな差がない。すなわち、ヒステリシスが小さいことか
ら水素吸収・放出過程において塑性変形が殆んど起らず
、耐久性がよいことを示している。Furthermore, there is no significant difference in the hydrogen absorption/release curves at the same temperature. In other words, since the hysteresis is small, almost no plastic deformation occurs during the hydrogen absorption/release process, indicating good durability.
第１図Ｐｄ膜（曲線３）、及び表面にｌＱｎｍののパラ
ジウムメッキしたＶ−１５原子％Ｎｉ合金膜（曲線１）
とＶ−１５原子％Ｃｏ合金膜（曲線２）の水素透過度と
温度の関係図、第２図はＶ−１５原子％Ｎｉ合金の水素
圧カー組成等温曲線図を示す。吸収曲線（１−ａ）、放
出曲線（１−ｂ）は１７５℃、吸収曲線（２−ａ）、放
出曲線（２−ｂ）は２５０℃、吸収曲線（３−ａ）、放
出曲線（３−ｂ）は３５０℃における場合を示す。
特許出願人 科学技術庁金属材料技術研究所長中 川
龍 −Figure 1: Pd film (curve 3) and V-15 atomic% Ni alloy film whose surface is plated with lQnm palladium (curve 1).
Figure 2 shows the relationship between hydrogen permeability and temperature for the V-15 atomic % Co alloy film (curve 2), and the hydrogen pressure Kerr composition isotherm diagram of the V-15 atomic % Ni alloy. Absorption curve (1-a), release curve (1-b) at 175°C, absorption curve (2-a), release curve (2-b) at 250°C, absorption curve (3-a), release curve (3 -b) shows the case at 350°C. Patent applicant: Ryu Kawa, Director, Research Institute for Metals, Science and Technology Agency −
Claims (1)
部バナジウムからなる合金膜の表面に、パラジウムまた
はパラジウム合金を被覆させたものからなる水素分離膜
。A hydrogen separation membrane comprising an alloy membrane comprising 5 to 20 at % of one or two of Ni and Co, the balance being vanadium, and the surface of the membrane is coated with palladium or a palladium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8812888A JPH01262924A (en) | 1988-04-12 | 1988-04-12 | hydrogen separation membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8812888A JPH01262924A (en) | 1988-04-12 | 1988-04-12 | hydrogen separation membrane |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01262924A true JPH01262924A (en) | 1989-10-19 |
| JPH0474045B2 JPH0474045B2 (en) | 1992-11-25 |
Family
ID=13934280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8812888A Granted JPH01262924A (en) | 1988-04-12 | 1988-04-12 | hydrogen separation membrane |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01262924A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100247557B1 (en) * | 1997-12-24 | 2000-03-15 | 김충섭 | Method for producing a composite membrane for separating hydrogen gas |
| FR2790751A1 (en) * | 1999-03-09 | 2000-09-15 | Agency Ind Science Techn | New hydrogen separation and dissociation membrane, e.g. for high purity hydrogen production or hydrogen isotope separation, is made of an amorphous nickel alloy containing zirconium and or hafnium |
| JP2003095616A (en) * | 2001-09-19 | 2003-04-03 | National Institute For Materials Science | Hydrogen separation and purification equipment |
| US6585033B2 (en) | 2001-02-19 | 2003-07-01 | Fukuda Metal Foil & Powder Co., Ltd. | Process for producing vanadium alloy foil |
| JP2003305346A (en) * | 2002-04-11 | 2003-10-28 | Toyo Kohan Co Ltd | Separation film laminate and production method for component using the same |
| JP2006274298A (en) * | 2005-03-28 | 2006-10-12 | Hitachi Metals Ltd | Double phase alloy for hydrogen separation and purification and method for producing the same |
| WO2006107710A3 (en) * | 2005-04-02 | 2007-04-05 | Bp Corp North America Inc | Hydrogen separation |
| JP2007099528A (en) * | 2005-09-30 | 2007-04-19 | Japan Energy Corp | Production method of high purity hydrogen |
| JP2008055295A (en) * | 2006-08-30 | 2008-03-13 | Ihi Corp | Hydrogen separation membrane |
| WO2008102509A1 (en) | 2007-02-19 | 2008-08-28 | Mitsubishi Gas Chemical Company, Inc. | Hydrogen purification method, hydrogen separation membrane, and hydrogen purification apparatus |
| US7708809B2 (en) | 2002-11-20 | 2010-05-04 | Mitsubishi Materials Corporation | Hydrogen permeable membrane |
| KR101227454B1 (en) * | 2010-10-06 | 2013-01-30 | 한국에너지기술연구원 | A hydrogen permeable alloy and the manufacturing method of hydrogen separation membrane using the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4792598B2 (en) | 2008-03-24 | 2011-10-12 | 株式会社日本製鋼所 | Hydrogen permeation module and method of use thereof |
-
1988
- 1988-04-12 JP JP8812888A patent/JPH01262924A/en active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100247557B1 (en) * | 1997-12-24 | 2000-03-15 | 김충섭 | Method for producing a composite membrane for separating hydrogen gas |
| FR2790751A1 (en) * | 1999-03-09 | 2000-09-15 | Agency Ind Science Techn | New hydrogen separation and dissociation membrane, e.g. for high purity hydrogen production or hydrogen isotope separation, is made of an amorphous nickel alloy containing zirconium and or hafnium |
| US6478853B1 (en) | 1999-03-09 | 2002-11-12 | Secretary Of Agency Of Industrial Science And Technology | Amorphous Ni alloy membrane for separation/dissociation of hydrogen, preparing method and activating method thereof |
| US6585033B2 (en) | 2001-02-19 | 2003-07-01 | Fukuda Metal Foil & Powder Co., Ltd. | Process for producing vanadium alloy foil |
| JP2003095616A (en) * | 2001-09-19 | 2003-04-03 | National Institute For Materials Science | Hydrogen separation and purification equipment |
| JP2003305346A (en) * | 2002-04-11 | 2003-10-28 | Toyo Kohan Co Ltd | Separation film laminate and production method for component using the same |
| US7708809B2 (en) | 2002-11-20 | 2010-05-04 | Mitsubishi Materials Corporation | Hydrogen permeable membrane |
| JP2006274298A (en) * | 2005-03-28 | 2006-10-12 | Hitachi Metals Ltd | Double phase alloy for hydrogen separation and purification and method for producing the same |
| WO2006107710A3 (en) * | 2005-04-02 | 2007-04-05 | Bp Corp North America Inc | Hydrogen separation |
| JP2007099528A (en) * | 2005-09-30 | 2007-04-19 | Japan Energy Corp | Production method of high purity hydrogen |
| JP2008055295A (en) * | 2006-08-30 | 2008-03-13 | Ihi Corp | Hydrogen separation membrane |
| WO2008102509A1 (en) | 2007-02-19 | 2008-08-28 | Mitsubishi Gas Chemical Company, Inc. | Hydrogen purification method, hydrogen separation membrane, and hydrogen purification apparatus |
| JP5229503B2 (en) * | 2007-02-19 | 2013-07-03 | 三菱瓦斯化学株式会社 | Hydrogen purification method, hydrogen separation membrane, and hydrogen purification apparatus |
| KR101227454B1 (en) * | 2010-10-06 | 2013-01-30 | 한국에너지기술연구원 | A hydrogen permeable alloy and the manufacturing method of hydrogen separation membrane using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0474045B2 (en) | 1992-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5229503B2 (en) | Hydrogen purification method, hydrogen separation membrane, and hydrogen purification apparatus | |
| US8119205B2 (en) | Process for preparing palladium alloy composite membranes for use in hydrogen separation, palladium alloy composite membranes and products incorporating or made from the membranes | |
| JPH01262924A (en) | hydrogen separation membrane | |
| US3344582A (en) | Irreversible hydrogen membrane | |
| CN100420624C (en) | Multiphase alloy for hydrogen separation and purification and method for producing same, metal film for hydrogen separation and purification and method for producing same | |
| Lee et al. | Palladium-copper membrane prepared by electroless plating for hydrogen separation at low temperature | |
| Khatib et al. | Sulfur resistant Pd and Pd alloy membranes by phosphidation | |
| JP2016041420A (en) | Palladium plating separation membrane using polybenzimidazole polymer membrane as support and method for forming the same | |
| JPH02265631A (en) | Alloy film for separation of hydrogen | |
| JPH0429728A (en) | Alloy membrane for separating hydrogen | |
| KR20150007364A (en) | Separation membrane, hydrogen separation membrane including separation membrane and device including hydrogen separation membrane | |
| WO2015020503A1 (en) | Separation membrane, hydrogen separation membrane including separation membrane, and device including hydrogen separation membrane | |
| JP5000115B2 (en) | Hydrogen permeable alloy | |
| KR102012010B1 (en) | Separation membrane, hydrogen separation membrane including separation membrane and device including hydrogen separation membrane | |
| WO2006107710A2 (en) | Hydrogen separation | |
| KR101284115B1 (en) | Yttrium-doped vanadium based metallic membranes for separation of hydrogen and method of separating hydrogen using the same | |
| Köse | Development of Hydrogen Separation Membrane in Palladium Based Ternary Systems | |
| US7597842B2 (en) | Hydrogen permeable alloy | |
| JP2002153739A (en) | Method of manufacturing hydrogen separation membrane | |
| KR100865660B1 (en) | Hydrogen permeable alloy member, preparation method thereof and hydrogen purification method using same | |
| KR102023600B1 (en) | Separation membrane, hydrogen separation membrane including separation membrane and device including hydrogen separation membrane | |
| CA2945286C (en) | Method and system for fabrication of hydrogen-permeable membranes | |
| JP2008194629A (en) | Hydrogen permeable alloy membrane | |
| Pişkin | Deposition and testing of thin film hydrogen separation membranes | |
| Gade | Palladium-gold membranes for hydrogen separations: Development, characterization, and optimization |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |