JPH01264940A - Production of glass base material for optical fiber - Google Patents

Production of glass base material for optical fiber

Info

Publication number
JPH01264940A
JPH01264940A JP4782889A JP4782889A JPH01264940A JP H01264940 A JPH01264940 A JP H01264940A JP 4782889 A JP4782889 A JP 4782889A JP 4782889 A JP4782889 A JP 4782889A JP H01264940 A JPH01264940 A JP H01264940A
Authority
JP
Japan
Prior art keywords
gas
base material
core
bulk density
fluorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4782889A
Other languages
Japanese (ja)
Other versions
JPH0329732B2 (en
Inventor
Koji Kawachi
河内 宏司
Tsunehisa Kyodo
倫久 京藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4782889A priority Critical patent/JPH01264940A/en
Publication of JPH01264940A publication Critical patent/JPH01264940A/en
Publication of JPH0329732B2 publication Critical patent/JPH0329732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01466—Means for changing or stabilising the diameter or form of tubes or rods
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/54—Multiple burner arrangements combined with means for heating the deposit, e.g. non-deposition burner

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To obtain optical fiber having a large difference of specific refractive index between a core and a clad by adjusting a bulk density of a core corresponding part at the outermost peripheral part to be higher than the bulk density of internal part, and heat-treating a heaped body in an atmosphere contg. F-contg. gas for a certain period in a stage for making the heaped body transparent by heating. CONSTITUTION:O2 and H2 are ejected by feeding the gas from a feeding port 4 and 5, respectively, using a multicore tube burner 3A, 3B. At the same time, SiCl4 as feed gas, GeCl4 as dopant gas, etc. are fed through a feeding port 7 together with Ar gas as carrier gas. A reaction is thus caused, and simultaneously, shielding Ar gas is fed through a feeding port 6, causing successive deposition of fine glass particles from a tip end of a starting base material 8 toward an axial direction. Thus, a bulk density of a core corresponding part at an outermost peripheral part is adjusted to a larger bulk density than that of the internal part by elevating a surface temp. Then, obtd. soot base material is heated, if necessary in an atmosphere contg. Cl2, then heated for at least a specified period at 1,150+ or -150 deg.C in an atmosphere contg. F-contg. gas. Thus, F is added easily to only a clad corresponding part.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、光ファイバ用ガラス母材の製造方法に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a glass preform for optical fibers.

特に、本発明は、光ファイバ用のガラス微粒子堆積体す
なわちスート母材を高温炉で焼結して透明ガラス化する
際に、クラッド相当部のみにフッ素を容易に添加できる
ような光ファイバ用ガラス母材の製造方法に関するもの
である。
In particular, the present invention provides a glass for optical fibers in which fluorine can be easily added only to the portion corresponding to the cladding when a glass particle deposit for optical fibers, that is, a soot base material, is sintered in a high-temperature furnace to become transparent vitrified. The present invention relates to a method for manufacturing a base material.

従来技術 光ファイバは、通常、第2図に示すように、コア部と呼
ばれる光の通る中心部1と、クラッド部と呼ばれる周辺
部2とから成っている。コア部1の屈折率n、は、光を
伝送する都合上、第2図の屈折率分布に示すように、ク
ラッド部2の屈折率n2より高くしである。
As shown in FIG. 2, a conventional optical fiber usually consists of a central portion 1 called a core portion through which light passes, and a peripheral portion 2 called a cladding portion. The refractive index n of the core portion 1 is higher than the refractive index n2 of the cladding portion 2, as shown in the refractive index distribution in FIG. 2, for the convenience of transmitting light.

そして、コアとクラッドの比屈折率差Δn:Δn= 1
712−n、 l /n+ を高くすることができ、クラッド面で全反射する受光角
を大きくすることができ、光ガラスファイバを曲げた場
合のパワーロスが少なくなる等の利点がある。このΔn
を高くする方法としては、火災加水分解において、スー
ト母材のコア相当部にGeO2、Al2O3、Tie、
等の金属酸化物ドーパントを添加して、コア部1の屈折
率n、を大きくする方法か、スート母材のクラッド相当
部にフッ素系ガスを添加してクラッド部の屈折率n2を
下げる方法が考えられる。
Then, the relative refractive index difference Δn between the core and the cladding: Δn=1
712-n, l/n+ can be increased, the receiving angle of total reflection on the cladding surface can be increased, and there are advantages such as reducing power loss when bending the optical glass fiber. This Δn
As a method for increasing the temperature, GeO2, Al2O3, Tie,
There is a method of increasing the refractive index n of the core portion 1 by adding a metal oxide dopant such as, or a method of lowering the refractive index n2 of the cladding portion by adding a fluorine-based gas to a portion of the soot base material corresponding to the cladding. Conceivable.

ところが、前者のドーパント添加によるコア部1の屈折
率n、を大きくする方法の場合には、上記ドーパントの
増加に伴い、以下のような問題が生じる: (1)  ドーパント量を増やすと、ドーパント添加に
伴う光散乱(レイリー散乱)が生じ、伝送損失が増加す
るので、光伝送上好ましくない。なお、この光散乱の大
きさは、ドーパント量に比例する。
However, in the case of the former method of increasing the refractive index n of the core portion 1 by adding a dopant, the following problems occur as the amount of the dopant increases: (1) When the amount of dopant is increased, the dopant addition Light scattering (Rayleigh scattering) occurs, which increases transmission loss, which is unfavorable for optical transmission. Note that the magnitude of this light scattering is proportional to the amount of dopant.

(2)  ドーパントを多量に添加すると、ガラス母材
中に、気泡や単結晶を生じさせ易い。例えば、GeO2
を用いた場合、Ge0zガスに由来する気泡を生じさせ
ることがある。A1□o3ではA1□03結晶のクラス
ターを生じさせ易い。
(2) Adding a large amount of dopants tends to cause bubbles and single crystals in the glass base material. For example, GeO2
When using GeOz gas, bubbles may be generated due to GeOz gas. A1□o3 tends to produce clusters of A1□03 crystals.

かかる気泡や結晶相の存在は光伝送上の損失原因(すな
わち散乱損失)となり、好ましくない。加えて、光ファ
イバの断線の原因となる。
The presence of such bubbles and crystal phases causes loss in optical transmission (ie, scattering loss), which is undesirable. In addition, it may cause the optical fiber to break.

これに対して、後者のクラッド相当部にフッ素系ガスを
添加して屈折率n2を下げる方法は、上記の不都合を解
消する上で非常に有効である。この方法は、コア部にG
eO2等のドーパントを添加して屈折率を高め、クラッ
ド部との間に所定の屈折率差を予め形成した後に、少な
くとも一時期、フッ素系ガスを含む雰囲気で高温加熱す
ることによってクラッド部にフッ素を添加し、クラッド
部の屈折率を下げ、最終的にΔnの高い透明ガラス母材
を得る方法である。
On the other hand, the latter method of lowering the refractive index n2 by adding fluorine-based gas to the portion corresponding to the cladding is very effective in solving the above-mentioned disadvantages. In this method, G
After adding a dopant such as eO2 to increase the refractive index and forming a predetermined refractive index difference between the cladding and the cladding, fluorine is added to the cladding by heating at a high temperature in an atmosphere containing a fluorine-based gas for at least a period of time. In this method, the refractive index of the cladding portion is lowered, and a transparent glass base material with a high Δn is finally obtained.

しかし、この方法の場合にも、以下の様な問題点があっ
た: すなわち、フッ素系ガス雰囲気内において単純に高温加
熱したのでは、スート母材のコア部にまで均一にフッ素
が添加されてしまい、その結果として、Δnが高くなら
ない。
However, this method also had the following problems: If the soot material was simply heated at high temperature in a fluorine-based gas atmosphere, fluorine would not be uniformly added to the core of the soot base material. As a result, Δn does not become high.

しかも、フッ素は非常に反応性に富んでいるため、クラ
ッド部にのみフッ素を添加するための高温炉内の温度制
御、フッ素系ガス濃度および処理時間の制御が非常に難
しい。
Moreover, since fluorine is highly reactive, it is extremely difficult to control the temperature in the high-temperature furnace, the fluorine-based gas concentration, and the treatment time in order to add fluorine only to the cladding.

そのため、従来のドーパント分布とカサ密度分布を持っ
たスート母材に対してクラッド相当部にのみフッ素添加
を行うには、温度を±30℃程度の範囲で厳密に制御す
る必要であるため、この方法により所望のΔnの値を有
する光ガラスファイバを作ることは極めて困難であった
。
Therefore, in order to add fluorine only to the portion corresponding to the cladding of a soot base material with a conventional dopant distribution and bulk density distribution, it is necessary to strictly control the temperature within a range of about ±30°C. It has been extremely difficult to produce an optical glass fiber having a desired value of Δn by this method.

発明が解決しようとする課題 本発明の目的は、高温加熱中に、スート母材のコア相当
部にフッ素が添加されないように、スート母材のクラッ
ド相当部のみにフッ素を容易に添加することができる光
ファイバ用ガラス母材の製造方法を提供することにある
。
Problems to be Solved by the Invention The purpose of the present invention is to easily add fluorine only to the cladding portion of the soot base material so that fluorine is not added to the core portion of the soot base material during high-temperature heating. An object of the present invention is to provide a method for manufacturing a glass preform for optical fibers.

発明の構成 本発明の提供する光ファイバ用ガラス母材の製造方法は
、コア相当部とそれを囲んだクラッド相当部から成る光
ファイバ用ガラス微粒子堆積体を作製する際に、コア相
当部の最外周部のカサ密度が内部に比べて高くなる様に
調整し、次いで、この堆積体を加熱透明化する工程の少
なくとも一時期において、フッ素系ガスを含む雰囲気で
加熱処理を施すことを特徴としている。
Composition of the Invention The method for manufacturing a glass preform for optical fiber provided by the present invention is such that when producing a glass particle deposit for an optical fiber consisting of a core-corresponding part and a clad-corresponding part surrounding it, the most important part of the core-corresponding part is The method is characterized in that the bulk density of the outer peripheral part is adjusted to be higher than that of the inner part, and then, at least part of the process of heating and transparentizing the deposited body, heat treatment is performed in an atmosphere containing a fluorine-based gas.

作用 スート母材の製造時に、スート母材のコア相当部の最外
周部のカサ密度を局所的に高くし、そのスート母材を高
温加熱処理すると、カサ密度が高いスート母材のコア相
当部の最外周部の焼結が、その周辺クラッド相当部より
も速い時期に進行する。従って、その後の高温加熱処理
途中のある時期に、雰囲気内へフッ素系ガスを投入して
も、スート母材の早く焼結したコア相当部の最外周部が
フッ素のコア内部浸透を抑える働きをするため、フッ素
はコア内部に添加されずにクラッド相当部にのみ添加さ
れることになる。
Effect When manufacturing the soot base material, the bulk density of the outermost periphery of the core-equivalent part of the soot base material is locally increased, and when that soot base material is heat-treated at a high temperature, the core-equivalent part of the soot base material with high bulk density is The sintering of the outermost portion of the cladding progresses faster than that of the surrounding cladding portion. Therefore, even if a fluorine-based gas is introduced into the atmosphere at some point during the subsequent high-temperature heat treatment, the outermost periphery of the core-corresponding part that sintered quickly in the soot base material has the effect of suppressing the penetration of fluorine into the core. Therefore, fluorine is not added to the inside of the core, but only to the portion corresponding to the cladding.

また、スート母材内のコア相当部の最外周部のカサ密度
を局所的に高くして、そのコア相当部の最外周部が焼結
時に最も早く焼結するようにすることにより、フッ素系
ガス投入時にクラッド相当部にのみにフッ素を添加する
ことができる許容温度範囲を±150℃と大きくできる
。その結果、温度制御が容易になり、反応温度を下げる
ことができる。
In addition, by locally increasing the bulk density at the outermost periphery of the core-equivalent part in the soot base material so that the outermost periphery of the core-equivalent part is sintered fastest during sintering, fluorine-based The allowable temperature range in which fluorine can be added only to the portion corresponding to the cladding during gas injection can be increased to ±150°C. As a result, temperature control becomes easy and the reaction temperature can be lowered.

更に本発明者らは、スート母材の相対密度(スート母材
のカサ密度と透明ガラスの密度との比)が0.45以上
になるとスート母材にフッ素は添加されないことを実験
により確かめた。
Furthermore, the present inventors have confirmed through experiments that fluorine is not added to the soot base material when the relative density of the soot base material (ratio of the bulk density of the soot base material to the density of the transparent glass) is 0.45 or more. .

すなわち、上記構成のスート母材では、コア相当部の最
外周部の相対密度が0.45になった時点では、クラッ
ド相当部の相対密度は0.45以下であるので、この時
点からフッ素系ガスを投入すれば、コア相当部の内部に
はフッ素は添加されずにクラッド相当部にフッ素が添加
することができる。その結果、Δnの高い屈折率分布が
得られる。
That is, in the soot base material having the above configuration, when the relative density of the outermost peripheral part of the core equivalent part reaches 0.45, the relative density of the cladding part is 0.45 or less, so from this point on, the fluorine-based By introducing gas, fluorine can be added to the cladding portion without adding fluorine to the core portion. As a result, a refractive index distribution with a high Δn can be obtained.

以下、添付図面を参照して本発明をより詳細に説明する
。
Hereinafter, the present invention will be explained in more detail with reference to the accompanying drawings.

第3図は、本発明において使用するスート母材を火災加
水分解反応によって生成する方法を示す概略図である。
FIG. 3 is a schematic diagram showing a method of producing the soot base material used in the present invention by a fire hydrolysis reaction.

多心管バーナ3Aと3Bを用いて、燃焼ガスとして、酸
素を供給口4から、水素を供給口5から供給して、多心
管バーナの最も外側の環状ポートとその内側ポートより
噴出させる。同時に、原料ガスとしての5iC1,を、
また、ドーパント原料としてのGeCl4等を、キャリ
アガスとして用いるArガス等の不活性ガスを供給ロア
から供給して、多心管バーナの中心ポートから送り込み
反応させる。
Using the multicore tube burners 3A and 3B, oxygen and hydrogen are supplied as combustion gases from the supply port 4 and the supply port 5, respectively, and are ejected from the outermost annular port of the multicore tube burner and its inner port. At the same time, 5iC1, as a raw material gas,
Further, GeCl4 or the like as a dopant raw material is supplied from a supply lower with an inert gas such as Ar gas used as a carrier gas, and fed through the center port of the multi-core tube burner to cause a reaction.

また、原料ガスがバーナの先端より数mm離れた空間で
反応する様に、遮蔽用としてArガスを供給口6より供
給して、中央ポートの次の環状ポートより噴出させる。
Further, so that the raw material gas reacts in a space several mm away from the tip of the burner, Ar gas for shielding is supplied from the supply port 6 and is ejected from the annular port next to the central port.

このような状態で、ガラス微粒子体のロッドすなわちス
ート母材を得るように、回転する出発母材8の先端から
軸方向にガラス微粒子を順次堆積させていく。
In this state, glass particles are sequentially deposited in the axial direction from the tip of the rotating starting base material 8 so as to obtain a rod of glass fine particles, that is, a soot base material.

次いで、本発明の方法に従い、カサ密度を局所的に高く
する。
Then, according to the method of the present invention, the bulk density is locally increased.

すなわち、本発明では、第1図に示すような局所的に高
いカサ密度にするために、上バーナ−3Aの供給口4か
ら8β/分の割合で酸素を、供給口6から21/分の割
合でArを夫々供給し、供給口5から水素を31〜i/
分、供給ロアから5iCI4のほかにGeC1,を10
〜50cc/分の範囲で供給する。上バーナ−3Aはカ
サ密度を局所的に高くする働きと共に、クラッド相当部
を合成する働きも兼ねている。
That is, in the present invention, in order to obtain a locally high bulk density as shown in FIG. Ar is supplied respectively at the ratio, and hydrogen is supplied from the supply port 5 at a rate of 31~i/
In addition to 5iCI4 from the supply lower, add 10 GeC1,
Feed at a rate of ~50 cc/min. The upper burner 3A has the function of locally increasing the bulk density and also has the function of synthesizing a portion corresponding to the cladding.

カサ密度を局所的に高くするには水素の流lを上げ、コ
ア相当部の表面温度を高くすればよい。
In order to locally increase the bulk density, the flow of hydrogen may be increased to increase the surface temperature of the portion corresponding to the core.

一方、下バーナ−3Bは、コア部を合成する働きを持ち
、供給ロアからGeCl4を20cc/分の割合で、ま
た、5iC1nを200cc/分の割合で同時に供給し
、0□/H2火災点中で燃焼させればよい。
On the other hand, the lower burner 3B has the function of synthesizing the core part, and simultaneously supplies GeCl4 from the supply lower at a rate of 20 cc/min and 5iC1n at a rate of 200 cc/min. You can burn it with

なお、上記の条件は一例であって本発明を限定するもの
ではない。
Note that the above conditions are merely examples and do not limit the present invention.

以上のようにして、コア相当部の最外周部のカサ密度が
その内部より高いスート母材が製造できる。
In the manner described above, a soot base material can be manufactured in which the bulk density of the outermost peripheral portion of the core-corresponding portion is higher than that of the inside thereof.

次に、上記スート母材を純石英から成る炉心管やアルミ
ナ製の炉心管などの耐熱性のある炉心管に挿入して高温
加熱することで脱水、焼結する。
Next, the soot base material is inserted into a heat-resistant core tube such as a pure quartz core tube or an alumina core tube, and is heated to a high temperature to dehydrate and sinter it.

この際、先ず、スート母材を脱水することに主眼をおい
て、例えば、800℃〜1100℃の温度範囲でfle
ガスが10β/分、塩素系ガスが100cc/分程度の
流量で供給される雰囲気内で処理することが好ましい。
At this time, first, the main focus is on dehydrating the soot base material, and for example, the fle
It is preferable to perform the treatment in an atmosphere in which the gas is supplied at a flow rate of about 10β/min and the chlorine gas is supplied at a flow rate of about 100 cc/min.

塩素ガスは脱水が目的であり、C12,5OC12、C
0C12、CCl4等を用いることがでる。
The purpose of chlorine gas is dehydration, and C12,5OC12,C
0C12, CCl4, etc. can be used.

脱水温度が800℃以下ではスート母材内の不純物を除
去することはできずかつ脱水にも時間がかかり不利とな
る。また、塩素ガス雰囲気下で1100℃以上加熱する
と、スート母材の収縮が起こり始め、第二段階でフッ素
系ガスを投入しても、スート母材のカサ密度が全体にわ
たって高くなってしまうために、フッ素をスート母材に
添加するのが困難となる。
If the dehydration temperature is below 800° C., impurities in the soot base material cannot be removed and dehydration takes time, which is disadvantageous. In addition, when heated above 1100℃ in a chlorine gas atmosphere, the soot base material begins to shrink, and even if fluorine-based gas is introduced in the second stage, the bulk density of the soot base material increases throughout. , it becomes difficult to add fluorine to the soot matrix.

更に、塩素ガスはドーパントを塩化物として揮発させる
ために、屈折率分布の調整剤としても使用でき、その温
度は1000〜1100℃の範囲が、最も好ましい。
Furthermore, since chlorine gas volatilizes the dopant as chloride, it can also be used as a refractive index distribution adjuster, and the temperature is most preferably in the range of 1000 to 1100°C.

上記第一段階の加熱処理に引続いてフッ素の添加を主眼
とした第二段階の加熱処理を行う。この場合の温度は、
火災加水分解反応で得られたスート母材内のGeO7等
の添加物の分布とカサ密度分布に依存するが、概ね11
50℃±150℃の範囲が好ましい。すなわち、スート
母材を上記の構成にすることにより、1000℃前後で
コア相当部の最外周部が焼結し、その後、1600℃前
後でスート母材全体が焼結完了するまでの加熱処理中に
、雰囲気をフッ素系ガスとすることによって、フンSを
クランド相当部のみに添加することができる。
Following the first-stage heat treatment, a second-stage heat treatment is performed that focuses on adding fluorine. The temperature in this case is
Although it depends on the distribution of additives such as GeO7 in the soot matrix obtained by fire hydrolysis reaction and bulk density distribution, it is approximately 11
A range of 50°C±150°C is preferred. That is, by configuring the soot base material as described above, the outermost peripheral part of the core-corresponding part is sintered at around 1000°C, and then during the heat treatment at around 1600°C until the entire soot base material is sintered. Furthermore, by setting the atmosphere to a fluorine-based gas, it is possible to add sulfur S only to the portion corresponding to the crund.

換言するならば、スート母材のコア相当部内にフッ素が
添加されぬような条件でフッ素系ガスを投入するために
は、スート母材の焼結処理において、コア部の最外周部
の相対密度が0.45以上になった時点でフッ素系ガス
の投入を開始すれば良い。
In other words, in order to introduce fluorine-based gas under conditions such that fluorine is not added to the core-corresponding part of the soot base material, the relative density of the outermost part of the core must be It is sufficient to start supplying the fluorine-based gas when the value becomes 0.45 or more.

従って、温度分布が均一で昇温速度がα(t’/分)の
炉心管で加熱処理した場合、コア相当部の最外周部の相
対密度が0.45となった温度T!からクラッド相当部
の相対密度が0.45となる温度T2までの間に、フッ
素系ガスを投入すれば良い。この場合、温度差ΔT =
T2−TIが大きい程、フッ素系ガスを投入する温度の
許容誤差も大きいことになり、温度制御が容易になる。
Therefore, when heat treatment is performed in a furnace tube with a uniform temperature distribution and a heating rate of α (t'/min), the temperature T at which the relative density of the outermost peripheral part of the core-corresponding part becomes 0.45! The fluorine-based gas may be introduced between the temperature T2 and the temperature T2 at which the relative density of the cladding portion becomes 0.45. In this case, temperature difference ΔT =
The larger T2-TI, the larger the tolerance for the temperature at which the fluorine-based gas is introduced, making temperature control easier.

逆に言えば、ΔTが小さい程、投入温度の厳密な制御が
要求され、不利である。
Conversely, the smaller ΔT is, the more strict control of the input temperature is required, which is disadvantageous.

ΔTを大きくするには、第1図で示すで示すカサ密度の
局所的な高さΔ2が高い程好ましい。しかし、Δ2を高
くしすぎると焼結時に気泡が発生し易くなり、好ましく
ない。そのため、Δ2=0.1〜0.3の範囲となるよ
う火災加水分解を行うことが好ましい。
In order to increase ΔT, it is preferable that the local height Δ2 of the bulk density shown in FIG. 1 be as high as possible. However, if Δ2 is set too high, bubbles are likely to be generated during sintering, which is not preferable. Therefore, it is preferable to perform fire hydrolysis so that Δ2=0.1 to 0.3.

なお、火災加水分解で添加されるGeO7等の添加物の
濃度分布は、クラッド相当部の最内周部分11Aにいわ
ゆる“すそだれ現象”を示すことも製造条件によって観
察される。このときは、予め塩素を投入して屈折率分布
を調整することにより対処できる。
It is also observed that the concentration distribution of additives such as GeO7 added during fire hydrolysis exhibits a so-called "sagging phenomenon" in the innermost peripheral portion 11A of the cladding portion, depending on the manufacturing conditions. This can be dealt with by adding chlorine in advance to adjust the refractive index distribution.

第5図に、本発明におけるスート母材処理のノくターン
の一例を示しである。
FIG. 5 shows an example of the soot base material treatment process according to the present invention.

以下、本発明方法の実施例を示す。Examples of the method of the present invention are shown below.

実施例 第4図(a)に示す相対密度分布を有するシングルモー
ドファイバ用スート母材を800℃の加熱温度に投入し
、塩素ガスを100cc/分及びHeガスを101/分
の割合で供給する雪囲気で3℃/分の昇温速度で105
0℃まで加熱し、次いで、塩素ガスを止め、SF6ガス
を150cc/分の流量で投入して1300℃まで加熱
し、次いで、純粋He雪囲気で1500℃以上に加熱し
て透明ガラス化を行った。
Example A soot base material for a single mode fiber having the relative density distribution shown in FIG. 4(a) is heated to a heating temperature of 800°C, and chlorine gas is supplied at a rate of 100 cc/min and He gas at a rate of 101/min. 105 at a heating rate of 3℃/min in a snowy atmosphere
Heat to 0°C, then stop the chlorine gas, introduce SF6 gas at a flow rate of 150 cc/min and heat to 1300°C, then heat to 1500°C or higher in a pure He snow atmosphere to create transparent vitrification. Ta.

得られたガラス母材の屈折率分布は第4図ら)の様にな
っており、コア相当部はGe○2ドーパント濃度に対応
する屈折率分布を有しており、一方クラッド相当部はフ
ッ素添加量に対応する屈折率分布を有しており、一方ク
ラッド相当部はフッ禦添加量に対応する屈折率の低下を
示していた。事実、XMA分析を行ったところコア相当
部には全くフッ素元素が含まれていないことが確認され
た。コア部は△n値で+0.3%、クラッド相当部は−
0,15%であった。
The refractive index distribution of the obtained glass base material is as shown in Fig. 4), and the core-corresponding part has a refractive index distribution corresponding to the Ge○2 dopant concentration, while the cladding-corresponding part has a refractive index distribution corresponding to the Ge○2 dopant concentration. On the other hand, the portion corresponding to the cladding showed a decrease in refractive index corresponding to the amount of fluorine added. In fact, when XMA analysis was performed, it was confirmed that the core-corresponding portion contained no fluorine element at all. The core part has a △n value of +0.3%, and the cladding equivalent part has a - value.
It was 0.15%.

なお、上記実施例は、シングルモードファイバ用スート
母材であったが、マルチモードファイバ用スート母材に
ついても、同様に本発明を実施することができる。又、
円柱状のマンドレル上に多孔質母材を積層させる“外ス
ス付法”で作製したスート母材でも同様に本発明を実施
することができる。
In addition, although the above-mentioned example was a soot base material for a single mode fiber, the present invention can be implemented in the same way with a soot base material for a multimode fiber. or,
The present invention can be similarly carried out using a soot base material produced by the "external sooting method" in which a porous base material is laminated on a cylindrical mandrel.

発明の効果 以上から明らかな如く、本発明の光ファイバ用ガラス母
材の製造方法によると、高温加熱中に、スート母材のコ
ア相当部にフッ素が添加されず、スート母材のクラッド
相当部のみにフッ素を容易に添加できる。従って、実効
的にΔnが大きな光ファイバを製造することができる。
Effects of the Invention As is clear from the above, according to the method for producing a glass preform for optical fiber of the present invention, fluorine is not added to the core-corresponding portion of the soot preform during high-temperature heating, and the cladding-corresponding portion of the soot preform is not added. Fluorine can be easily added to Therefore, it is possible to effectively manufacture an optical fiber with a large Δn.

また、本発明の光ファイバ用ガラス母材の製造方法によ
ると、スート母材を高温加熱焼結する際にクラッド相当
部にフッ素を添加するために少なくとも一時期フッ素系
ガスを用いる場合において、その製造条件の調整が極め
て容易である。
Further, according to the method for manufacturing a glass preform for optical fiber of the present invention, when a fluorine-based gas is used at least temporarily to add fluorine to a portion corresponding to the cladding when the soot preform is heated and sintered at high temperature, the manufacturing method Adjustment of conditions is extremely easy.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明によるスート母材のカサ密度分布を示す
図、 第2図は光ファイバの屈折率分布構造を示す概略図、 第3図は本発明を実施するための火災加水分解法による
スート母材製造方法の概略図、第4図(a)および(b
)は、本発明の実施例におけるスート母材の相対密度分
布と、ガラス母材の屈折率差を示すグラフ、 第5図は本発明におけるスート母材処理のパターンを示
すグラフである。 (主な参照番号) 1・・・・スート母材のコア相当部、 2・・・・スート母材のクラッド相当部、3A、 3B
・・多心管バーナ、 4・・・・0□供給口、5・・・・H2供給口、6・・
・・遮蔽用Arガス供給口、 7・・・・原料ガス供給口、 8・・・・出発母材 9・・・・スート母材のコア相当部、 10・・・・スート母材のクラッド相当部、11A・・
・クラッド相当部の最内周部、11B・・・コア相当部
の最外周部、 特許出願人 住友電気工業珪式会社、 日本電信電話 式会社
Fig. 1 is a diagram showing the bulk density distribution of the soot base material according to the present invention, Fig. 2 is a schematic diagram showing the refractive index distribution structure of the optical fiber, and Fig. 3 is a diagram showing the bulk density distribution of the soot base material according to the present invention. Schematic diagram of the soot base material manufacturing method, FIGS. 4(a) and (b)
) is a graph showing the relative density distribution of the soot base material and the refractive index difference of the glass base material in Examples of the present invention. FIG. 5 is a graph showing the pattern of soot base material treatment in the present invention. (Main reference numbers) 1... Core equivalent part of soot base material, 2... Clad equivalent part of soot base material, 3A, 3B
...Multi-core tube burner, 4...0□ supply port, 5...H2 supply port, 6...
... Shielding Ar gas supply port, 7... Raw material gas supply port, 8... Starting base material 9... Core equivalent portion of soot base material, 10... Cladding of soot base material Corresponding part, 11A...
・Innermost periphery of the clad equivalent part, 11B...outermost periphery of the core equivalent part, Patent applicant: Sumitomo Electric Industries, Ltd., Nippon Telegraph and Telephone Ltd.

Claims (3)

【特許請求の範囲】[Claims] (1)コア相当部とそれを囲んだクラッド相当部から成
る光ファイバ用ガラス微粒子堆積体を作製する際に、コ
ア相当部の最外周部のカサ密度が内部に比べて高くなる
様に調整し、次いで、この堆積体を加熱透明化する工程
の少なくとも一時期において、フッ素系ガスを含む雰囲
気で加熱処理を施すことを特徴とする光ファイバ用ガラ
ス母材の製造方法。
(1) When producing a glass particle deposit for optical fiber consisting of a core-equivalent part and a clad-equivalent part surrounding it, the bulk density at the outermost periphery of the core-equivalent part is adjusted to be higher than the inside. and then, in at least one period of the step of heating and transparentizing the deposit, heat treatment is performed in an atmosphere containing a fluorine-based gas.
(2)上記のフッ素系ガスを含む雰囲気下で加熱処理す
る前に、予め塩素系ガスを含む雰囲気下で光ファイバ用
ガラス微粒子堆積体を加熱処理することを特徴とする請
求項1に記載の光ファイバ用ガラス母材の製造方法。
(2) The glass particle deposit for optical fibers is heat-treated in advance in an atmosphere containing a chlorine-based gas before being heat-treated in an atmosphere containing a fluorine-based gas. A method for manufacturing a glass base material for optical fibers.
(3)ガラス微粒子堆積体の加熱処理過程において前記
のフッ素系ガスを含む雰囲気下での加熱処理を加熱温度
が1150℃±150℃の範囲で行うことを特徴とする
請求項1または2に記載の光ファイバ用ガラス母材の製
造方法。
(3) According to claim 1 or 2, in the heat treatment process of the glass particle deposit, the heat treatment is performed in an atmosphere containing the fluorine-based gas at a heating temperature in the range of 1150°C ± 150°C. A method for manufacturing a glass base material for optical fiber.
JP4782889A 1989-02-28 1989-02-28 Production of glass base material for optical fiber Granted JPH01264940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4782889A JPH01264940A (en) 1989-02-28 1989-02-28 Production of glass base material for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4782889A JPH01264940A (en) 1989-02-28 1989-02-28 Production of glass base material for optical fiber

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP59009499A Division JPS60161347A (en) 1984-01-24 1984-01-24 Preparation of parent material for optical fiber glass

Publications (2)

Publication Number Publication Date
JPH01264940A true JPH01264940A (en) 1989-10-23
JPH0329732B2 JPH0329732B2 (en) 1991-04-25

Family

ID=12786210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4782889A Granted JPH01264940A (en) 1989-02-28 1989-02-28 Production of glass base material for optical fiber

Country Status (1)

Country Link
JP (1) JPH01264940A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100346220B1 (en) * 2000-09-05 2002-08-01 삼성전자 주식회사 Co-flow diffusion flame burner device for fabricating of optical waveguide
WO2014099645A1 (en) * 2012-12-20 2014-06-26 Corning Incorporated Methods for forming optical fiber preforms with selective diffusion layers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100346220B1 (en) * 2000-09-05 2002-08-01 삼성전자 주식회사 Co-flow diffusion flame burner device for fabricating of optical waveguide
WO2014099645A1 (en) * 2012-12-20 2014-06-26 Corning Incorporated Methods for forming optical fiber preforms with selective diffusion layers

Also Published As

Publication number Publication date
JPH0329732B2 (en) 1991-04-25

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