JPH0126554B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The invention of this application relates to a water-cooled laser reflector, and particularly to a cooling device for a high-power laser reflector.

High-power lasers are currently used in various fields. The emitted laser beam is deflected by a plurality of reflecting mirrors and used according to its purpose. Reflectors used in high-power lasers usually have a high reflectance, but they are constantly heated to high temperatures, and the mirror itself absorbs thermal energy and becomes a high-temperature body, resulting in changes in the curvature of the reflector and damage to surrounding parts. High temperatures can have an adverse effect, sometimes changing the mirror's properties and even destroying it. Therefore, conventional methods have been used to cool the reflecting mirror in order to prevent these deteriorations. One conventional example will be described below with reference to the accompanying drawings.

The inner surface of the body 2 is formed into a cavity, and a laser reflector 6 (also referred to as a laser mirror) that reflects the laser beam B is attached to the front surface of the cavity, and a pipe 10 is connected to the back cover 8 of the body 2, and the water supply port 12 of this pipe Cooling water is supplied into the body 2 through a pipe 10. When the cooling water fills and circulates inside the body 2, it cools the laser mirror 6 mounted on the front and the body 2, and is discharged from the drain port 14. In this manner, the cooling water flows and circulates through the cavity of the mirror 6, thereby cooling the mirror and preventing generation of unnecessarily high heat. In addition, if the cooling water is cut off for some reason, such as due to pipe breakage or water leakage, or if less than the required amount of water can be supplied, the laser oscillation must be immediately stopped to prevent damage and deterioration of the laser mirror. For this purpose, a flow rate detector 16 is attached to a pipe or the like separately from the body 2. However, when the water is cut off or the water is reduced below the required amount, the flow rate detector 16 sends a signal to stop the laser oscillation.
A signal is transmitted to turn off the power to the laser oscillator main body (not shown).

However, the conventional water-cooled laser reflector has the following defects, and there are many points to be improved. In other words, (1) efficient cooling cannot be obtained because the center of the mirror cannot be intensively cooled; therefore, the mirror is susceptible to deterioration, and if the amount of cooling water is carelessly increased, the internal pressure will increase and the mirror will become deformed. let Furthermore, (2) a large space is required to separately install a detection device for measuring the flow rate of cooling water, and if the pipe connecting between the body 2 and the flow rate detector 16 is damaged or leaks, the pipe In some cases, the amount of cooling water flowing through the pump had an error that could not be measured by the flow rate detector 16.

The invention of this application has been devised and improved to overcome the deficiencies of the prior art. An embodiment of the present invention will be described below based on the accompanying drawings. Attachment 2
3 and 3 show a perspective view and a cross-sectional view, respectively, in which a laser reflector 22 is attached to the front surface of the Mirabody 20, and a laser reflector 22 is provided between the back cover 24 equipped with a diaphragm 34 (to be described later) and the laser reflector 22. A cooling water supply pipe 30 with a nozzle 28 in the cavity 26
into the body 20 and insert the nozzle 28 into the body 20.
is positioned toward substantially the center of the back surface of the laser reflecting mirror 22. Also, a sensor 36 such as a switch is installed on the outside of the back cover 24, close to the diaphragm 34.
will be established. Reference numeral 32 denotes a drain hole connected to an external drain port 38, and its diameter is smaller than that of the nozzle 28 of the supply pipe 30.

The cooling water supplied from the supply pipe 30 is intensively jetted from the nozzle 28 toward the center of the back surface of the laser reflector 22, fills the cavity 26, and circulates.
The laser reflecting mirror 22, the body 20, etc. are cooled, and then sent out through the rear drain hole 32 to the external drain port 38.
The cooling water that fills and circulates inside the cavity 26 is designed to maintain a predetermined water volume and water pressure under normal conditions, but in order to cope with abnormal situations where the water volume and water pressure often change above or below the predetermined water pressure. Treatment must be taken.

When the amount or water pressure of the cooling water that fills and circulates inside the cavity 26 changes to above or below the specified level, the back cover 24
The diaphragm 34 attached to the diaphragm 34 moves back and forth. This displacement is detected by a sensor 36 such as a switch, and the sensor generates a signal to turn off the power to the laser oscillator main body (not shown) in order to stop laser oscillation. Therefore, the laser reflecting mirror is configured so that it is always cooled with cooling water of a specified amount and pressure, and it is possible to prevent dangers that may occur under abnormal conditions.

In the embodiment of the present invention, the laser reflecting mirror 2
Although the nozzle 28 of the supply pipe 30 is disposed toward the center of the back surface of 2, it is understood that any structure other than the nozzle may be adopted as long as it efficiently cools the center of the back surface. Of course.

FIGS. 4 and 5 illustrate another embodiment.

A middle plate 39 is placed between the laser reflecting mirror 22 and the back cover 24.
A water supply pipe 30 having an opening 40 toward the center of the laser reflecting mirror 22 is provided in the middle plate 39.
Also, a plurality of through holes 42 are bored in the middle plate 39 at equal intervals around the opening 40 of the water supply pipe 30. The cooling water flowing in from the water supply pipe 30 is ejected from the center opening 40 of the water supply pipe 30, cools the back surface of the laser reflector 22, and flows through the plurality of through holes 42 provided around the center opening 40 of the middle plate. The diaphragm 3 enters the gap between the middle plate 39 and the back cover 24.
While contacting and flowing with the water, the water collects at a discharge port 44 formed in the body, and is discharged to the outside through a drainage hole 46. In this way, as in the first embodiment, the cooling effect of the laser reflecting mirror 22 is large, and the flow velocity near the pressure detection diaphragm is averaged, making stable pressure detection possible.

In the water-cooled laser reflector according to the present invention,
Not only can efficient cooling be achieved because the center of the reflector can be centrally cooled, but multiple circulation holes are provided in the middle plate, which averages out the flow velocity near the diaphragm and enables stable pressure detection. In addition, it is useful for preventing deterioration of the reflecting mirror and maintaining its durability, and even if the internal pressure increases due to an increase in the amount of cooling water, it is absorbed by the diaphragm, so deformation of the reflecting mirror can be prevented. Further, unlike the conventional example, there is no need to separately install a flow rate detector, and even if a problem occurs outside of the pipe or the like, there is an effect that it will not be affected by the problem (for example, a flow rate measurement error).

[Brief explanation of drawings]

FIG. 1 is a schematic perspective view of a conventional cooling device for a laser reflecting mirror. FIG. 2 is a perspective view of a laser reflector cooling device according to an embodiment of the present invention. FIG. 3 is a sectional view of the cooling device. FIG. 4 is a sectional view of a cooling device according to another embodiment. FIG. 5 is a plan view of the embodiment shown in FIG. 4 with the laser reflecting mirror removed to show the cooling water circulation holes. 20... Miraboday, 22... Laser reflector, 24
...Back cover, 26...Cavity, 28...Nozzle, 30...Supply pipe, 32...Drain hole, 34...Diaphragm, 3
6... Sensor, 39... Intermediate plate, 40... Center opening of supply pipe, 42... Through hole, 44... Discharge port, 46...
Drain hole, 48...Drain pipe.

Claims (1)

[Claims] 1 A laser reflecting mirror is housed in a body equipped with a back cover, and a middle plate disposed between the laser reflecting mirror and the back cover is provided with a water supply pipe that opens toward the center of the laser reflecting mirror, and the opening A plurality of through holes are bored at equal intervals around the water supply pipe, and the cooling water flowing out from the water supply pipe passes through the through holes and enters the gap formed by the middle plate and the back cover. A water-cooled laser reflector that is characterized by being in contact with a diaphragm and flowing out through a drain port.