JPH01270632A - Leakage detector - Google Patents
Leakage detectorInfo
- Publication number
- JPH01270632A JPH01270632A JP10053088A JP10053088A JPH01270632A JP H01270632 A JPH01270632 A JP H01270632A JP 10053088 A JP10053088 A JP 10053088A JP 10053088 A JP10053088 A JP 10053088A JP H01270632 A JPH01270632 A JP H01270632A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- cavity
- test object
- jig
- tested
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、真空容器、配管等の微少な欠陥を封入ガス
の洩れにより検知する漏洩検知装置に関するものである
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a leakage detection device that detects minute defects in vacuum containers, piping, etc. by leakage of sealed gas.
第３図は例えば日本原子力学会誌１９８７年版ＮＯ７，
６７頁に示された従来の漏洩検知装置を示す構成図、第
４図は第３図における線ＩＶ−ＩＶに沿った部分拡大断
面図である。（１）は例えば真空容器等の被試験体、（
２）は例えばヘリウムガスなどのプローブガス（２ａ）
を被試験体（１］の内部に供給するプローブガスボンベ
、（３）は被試験体（１）の表面近接部に吸入孔（４ａ
）を有する吸入管（４）と連通して配置された漏洩ガス
検知器、（５）は吸入管（４］の近傍を外気と遮蔽して
空間を形成する例えばポリエチレンシート等でなる遮蔽
シート、 ＋６１は遮蔽シート（５）で形成された空間
に封入されている窒素ガス、（７）は被試験体（１）が
有する欠陥部である。Figure 3 shows, for example, Journal of the Atomic Energy Society of Japan, 1987 edition No. 7,
A configuration diagram showing a conventional leak detection device shown on page 67, and FIG. 4 is a partially enlarged sectional view taken along line IV-IV in FIG. 3. (1) is a test object such as a vacuum container, (
2) is a probe gas (2a) such as helium gas.
The probe gas cylinder (3) supplies the inside of the test object (1) with a suction hole (4a) near the surface of the test object (1).
), a leakage gas detector disposed in communication with the suction pipe (4), (5) a shielding sheet made of, for example, a polyethylene sheet, which forms a space by shielding the vicinity of the suction pipe (4) from the outside air; +61 is nitrogen gas sealed in the space formed by the shielding sheet (5), and (7) is a defective portion of the test object (1).
次に動作について説明する。Next, the operation will be explained.
本装置における被試験体（１）の欠陥部探査は、被試験
体（１）の表面に固着された遮蔽シート（５）の装着範
囲毎になされ、例えば欠陥部（７）を有する遮蔽シー
ト＋５１の装着範囲での探査の場合、被試験体（１）の
内部に充満されたヘリウムガスは欠陥部（７）が存在す
ればここより漏洩し吸入管（４）の吸入孔（４ａ）より
ガス検知器（３）に吸い込まれて漏洩検知され欠陥部は
探査されるユ又、遮蔽シート（５）の装着空間に封入さ
れた窒素ガス（６）は外気を遮断して漏洩ヘリウムガス
の検知感度を高め欠陥部探査を容易にしている。In this device, the defect detection of the test object (1) is carried out for each attachment range of the shielding sheet (5) fixed to the surface of the test object (1).
In the case of exploration in the installation range of the To+51, if there is a defective part (7), the helium gas filled inside the test object (1) will leak from there and enter the suction hole (4a) of the suction pipe (4). Nitrogen gas (6) sealed in the mounting space of the shielding sheet (5) blocks outside air and detects leakage helium gas. Detection sensitivity is increased and defect detection is facilitated.
従来の漏洩検知装置は以ｔのように構成されているので
、欠陥を探査できる範囲は遮蔽シートの固着された範囲
内に限られる。このため被試験体を広範囲に洩れ探査す
る場合には遮蔽シートの位置を順次移動させ、その都度
被試験体表面に固着して遮蔽シート内の窒素ガス封入処
置を必要とするので連続探査ができないなどの課題があ
った。Since the conventional leakage detection device is configured as described below, the range in which defects can be detected is limited to the area to which the shielding sheet is fixed. For this reason, when detecting leaks over a wide area of the test object, the position of the shielding sheet must be moved one after another, and each time it sticks to the surface of the test object, it is necessary to fill the shielding sheet with nitrogen gas, making continuous exploration impossible. There were issues such as:
この発明は上記の様な課題を解消するためになされたも
ので、被試験体に遮蔽シートを固着することなく外気と
遮断をなし連続探査の可能な漏洩検知装置を得ることを
目的とする。This invention was made to solve the above-mentioned problems, and the object is to obtain a leakage detection device that is capable of continuous detection without having to attach a shielding sheet to the test object and is isolated from the outside air.
この発明に係る漏洩検知装置は、空洞形状をなしその一
端に形成された開口部を内部がプローブガスで充満され
た被試験体の所定の表面に近接させた空気遮断治具と、
この空気遮断治具の上記空洞内に連通しＬ記空洞内に外
気圧より高い不活性ガスを供給するガス供給装置と５１
：記空気遮断治具の上記空洞内の上記被試験体に近接す
る位置に吸入孔を具備し上記被試験体から漏洩するＬ記
プローブガスの洩れを検知するガス検知器とで構成した
ものである。The leak detection device according to the present invention includes an air blocking jig having a hollow shape and having an opening formed at one end close to a predetermined surface of a test object filled with probe gas;
a gas supply device 51 that communicates with the cavity of the air blocking jig and supplies an inert gas higher than the outside pressure into the cavity L;
: A gas detector equipped with a suction hole in the cavity of the air blocking jig at a position close to the test object and detecting the leakage of the L probe gas leaking from the test object. be.
この発明における漏洩検知装置の不活性ガスは空気遮断
治具内の空気を外部に排除して外気と遮断する。The inert gas of the leak detection device in this invention excludes the air inside the air blocking jig to the outside and isolates it from the outside air.
以下、この発明の一実施例を図について説明する。第１
図はこの発明における漏洩検知装置の一実施例を示す構
成図、第２図は第１図における線ＩＩ−ＩＩに沿った部
分拡大断面図である３図において、（１）ないしく３）
および（７）は第３図および第４図に示す従来の構成と
同様であるのでその説明は省略する。（８）は空洞形状
をなしてその一端の開口部を被試験体（１）の所定位置
に近接させてなる空気遮断治具、（９）はこの空気遮断
治具（８）内に連通管（１ｏ）を通して例えば窒素ガス
などの不活性ガス（９ａ）を供給するガス供給装置５ｏ
旧よ連通管（１ｏ）に設置された不活性ガス（９ａ）の
流量を調整する流量調整バルブ５０２）は空気遮断治具
（８）の空洞内の被試験体（１）に近接する位置に吸入
孔（ＸＺａ）を具備し空気遮断治具の曲端を貫通してガ
ス検知器（３）と連通させた吸入管、０３）は吸入管α
渇に設置されて吸入孔（１２ａ）を開閉するストップバ
ルブである。An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is a configuration diagram showing one embodiment of the leakage detection device according to the present invention, and FIG. 2 is a partially enlarged sectional view taken along line II-II in FIG. 1.
and (7) are the same as the conventional configuration shown in FIGS. 3 and 4, so their explanation will be omitted. (8) is an air blocking jig having a hollow shape with an opening at one end close to a predetermined position of the test object (1), and (9) is a communicating pipe inside this air blocking jig (8). Gas supply device 5o that supplies an inert gas (9a) such as nitrogen gas through (1o)
The flow rate adjustment valve 502) installed in the old communication pipe (1o) to adjust the flow rate of the inert gas (9a) is located close to the test object (1) in the cavity of the air cutoff jig (8). The suction pipe (03) is equipped with a suction hole (XZa) and communicates with the gas detector (3) by passing through the curved end of the air blocking jig.
This is a stop valve that is installed to open and close the suction hole (12a).
上記のように構成された一実施例の動作について説明す
る。The operation of one embodiment configured as described above will be explained.
本装置での欠陥部探査は、まずプローブガスボンへ（２
）より被試験体（１）内えヘリウムガス（２ａ）を充満
させるとともにガス検知器（３）はヘリウムガス（２ａ
）を検知可能状態にセットしておくニ一方、吸入管（４
）の吸入孔ストップバルブａカおよび連通管（ｉ。When detecting defects using this device, first go to the probe gas bomb (2
), the test object (1) is filled with helium gas (2a), and the gas detector (3) is filled with helium gas (2a).
) is set to a detectable state, while the suction pipe (4
) of the suction hole stop valve a and the communication pipe (i).
の流量調整バルブ０旧よ閉の状態にしておき、この状態
から吸入孔ストップバルブａりを徐々に開くとガス検知
器（３）が吸入孔（４ａ）から吸入される空気中のヘリ
ウムを検知して大気中の状況表示をする。Leave the flow rate adjustment valve 0 in the closed state and gradually open the suction hole stop valve a from this state, the gas detector (3) will detect helium in the air sucked in from the suction hole (4a). to display the situation in the atmosphere.
次に空気遮断治具（８）の開口部を被試験体（１）の面
に沿わせて近接させ、ガス供給装置（９）の流量調整バ
ルブ０υを徐々に開き窒素ガス（９ａ）を空気遮断治具
（８）内に微加圧して空気を排除させガス検知器（３）
の状況表示で排除されたことを確認する。この状況下で
被試験体（１］の探査表面に空気遮断治具（８）を沿わ
せて移動させて連続的に探査をなしヘリウムガスの漏洩
を検知して欠陥部の探査をする。Next, the opening of the air blocking jig (8) is brought close to the surface of the test object (1), and the flow rate adjustment valve 0υ of the gas supply device (9) is gradually opened to supply nitrogen gas (9a) to the air. Slightly pressurize the shutoff jig (8) to eliminate air and install the gas detector (3)
Check the status display to confirm that it has been excluded. Under this condition, the air blocking jig (8) is moved along the inspection surface of the test object (1) to conduct continuous inspection to detect leakage of helium gas and search for defective parts.
なお、上記実施例では被試験体の探査が平坦面の場合に
ついて説明したが、被試験体の探査部が複雑な場合でも
形状に合わせて空気遮断治具（８）の開口部先端を成形
することにより同様の探査が可能である。In addition, in the above embodiment, the case where the inspection of the test object is on a flat surface has been explained, but even if the inspection part of the test object is complex, the opening tip of the air blocking jig (8) can be shaped to match the shape. A similar exploration is possible.
以上のように、この発明によれば空洞形状をなしてその
一端に形成された開口部を内部がプローブガスで充満さ
れた被試験体の所定の表面に近接させた空気遮断治具と
、この空気遮断治具の上記空洞内に連通し上記空洞内に
外気圧より高い不活性ガスを供給するガス供給装置と、
を記空気遮断治具の上記空洞内の上記被試験体に近接す
る位置に吸入孔を具備し上記被試験体から漏洩する上記
プローブガスの洩れを検知するガス検知器で構成したの
で、被試験体に遮蔽部材を固着することなく外気と遮断
をなし連続探査の可能な漏洩検知装置が得られる効果が
ある５As described above, according to the present invention, there is provided an air blocking jig which has a hollow shape and has an opening formed at one end close to a predetermined surface of a test object whose inside is filled with probe gas; a gas supply device that communicates with the cavity of the air blocking jig and supplies an inert gas higher than the outside pressure into the cavity;
The air-blocking jig is equipped with a gas detector equipped with a suction hole at a position close to the test object in the cavity and detects leakage of the probe gas leaking from the test object. This has the effect of providing a leakage detection device that can perform continuous detection without having to attach a shielding member to the body and is isolated from the outside air5.
第１図はこの発明の一実施例による漏洩検知装置を示す
構成図、第２図は第１図における線ｎ−■に涜った部分
拡大断面図、第３図は従来の漏洩検知装置を示す構成図
、第４図は第３図における線ＩＶ−ＩＶに沿った部分拡
大断面図である。図において、（１）は被試験体、（２
）はプローブガスボンベ（２ａ）はプローブガス、（３
）はガス検知器、（８）は空気遮断治具、（９）はガス
供給装置、（９ａ）は不活性ガス、（１２ａ）は吸入孔
である。
なお５図中５同一符号は同一、又は相当部分を示す。Fig. 1 is a configuration diagram showing a leak detection device according to an embodiment of the present invention, Fig. 2 is a partially enlarged sectional view taken along line n-■ in Fig. 1, and Fig. 3 is a diagram showing a conventional leak detection device. The configuration diagram shown in FIG. 4 is a partially enlarged sectional view taken along line IV-IV in FIG. 3. In the figure, (1) is the test object, (2
) is the probe gas cylinder (2a) is the probe gas, (3
) is a gas detector, (8) is an air blocking jig, (9) is a gas supply device, (9a) is an inert gas, and (12a) is a suction hole. Note that the same reference numerals in 5 figures indicate the same or equivalent parts.
Claims (1)
ローブガスで充満された被試験体の所定の表面に近接さ
せた空気遮断治具と、この空気遮断治具の上記空洞内に
連通し上記空洞内に外気圧より高い不活性ガスを供給す
るガス供給装置と、上記空気遮断治具の上記空洞内の上
記被試験体に近接する位置に吸入孔を具備し上記被試験
体から漏洩する上記プローブガスを検知するガス検知器
とを備えた漏洩検知装置。An air blocking jig that has a hollow shape and has an opening formed at one end close to a predetermined surface of a test object whose inside is filled with probe gas, and the above-mentioned cavity of this air blocking jig is communicated with. A gas supply device that supplies an inert gas higher than the outside pressure into the cavity, and a suction hole in the cavity of the air blocking jig at a position close to the test object to prevent leakage from the test object. A leak detection device comprising a gas detector for detecting the probe gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10053088A JPH01270632A (en) | 1988-04-22 | 1988-04-22 | Leakage detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10053088A JPH01270632A (en) | 1988-04-22 | 1988-04-22 | Leakage detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01270632A true JPH01270632A (en) | 1989-10-27 |
Family
ID=14276518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10053088A Pending JPH01270632A (en) | 1988-04-22 | 1988-04-22 | Leakage detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01270632A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04157333A (en) * | 1990-10-19 | 1992-05-29 | Morinobu Sugihara | Method and instrument for detecting leakage water path in building |
| EP0702222A4 (en) * | 1994-04-04 | 1998-09-16 | Otsuka Pharma Co Ltd | Pinhole detector |
-
1988
- 1988-04-22 JP JP10053088A patent/JPH01270632A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04157333A (en) * | 1990-10-19 | 1992-05-29 | Morinobu Sugihara | Method and instrument for detecting leakage water path in building |
| EP0702222A4 (en) * | 1994-04-04 | 1998-09-16 | Otsuka Pharma Co Ltd | Pinhole detector |
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