JPH0128530B2 - - Google Patents

Info

Publication number
JPH0128530B2
JPH0128530B2 JP3870880A JP3870880A JPH0128530B2 JP H0128530 B2 JPH0128530 B2 JP H0128530B2 JP 3870880 A JP3870880 A JP 3870880A JP 3870880 A JP3870880 A JP 3870880A JP H0128530 B2 JPH0128530 B2 JP H0128530B2
Authority
JP
Japan
Prior art keywords
tuning fork
vibration
electrodes
electrode
torsional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3870880A
Other languages
Japanese (ja)
Other versions
JPS56136015A (en
Inventor
Hirofumi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP3870880A priority Critical patent/JPS56136015A/en
Publication of JPS56136015A publication Critical patent/JPS56136015A/en
Publication of JPH0128530B2 publication Critical patent/JPH0128530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21Crystal tuning forks
    • H03H9/215Crystal tuning forks consisting of quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は音叉型水晶振動子の電極構造に関す
る。特に、振動モードとしては屈曲モードと捩り
モードを結合させた音叉型屈曲捩り水晶振動子に
関する。本発明の目的は捩りモードのクリスタ
ル。インピーダンス(CIと呼ぶ)を小さくする
ことにある。本発明の他の目的は低周波数温度特
性の優れた音叉型屈曲捩れ水晶振動子を安定して
提供することにある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrode structure of a tuning fork type crystal resonator. In particular, the present invention relates to a tuning fork-type bent torsional crystal resonator in which a bending mode and a torsion mode are combined as vibration modes. The object of the invention is a torsional mode crystal. The goal is to reduce impedance (called CI). Another object of the present invention is to stably provide a tuning fork type bent torsional crystal resonator having excellent low frequency temperature characteristics.

時計に使用されている水晶振動子、特に、音叉
型屈曲水晶振動子は現在完全に実用期を迎えてい
る。しかし、現在、多数使用されているからと言
つて全く問題点が無いわけでなく、この振動子に
も種々な欠点がある。その中でも大きな欠点は周
波数温度特性が広い温度範囲にわたつて不充分で
あるため、時計の精度に限界があつた。そこで、
最近ではこれらの振動子を2本使用して、更に、
周波数温度特性を改善した方式を提案しているが
この方式は2本の振動子の組合せが難しく、同時
に、2本水晶を使用するので高価になつてしまう
という欠点があつた。更には、1本の水晶振動子
で周波数温度特性の優れたATカツト水晶振動子
があるがこの振動子の周波数がMHz帯と高く、時
計用としては消費電流が多く、現時点では使用で
きないのが現状である。それ故に、1個の振動子
で、しかも低周波数で周波数温度特性の優れた水
晶振動子が要求されていたが、最近、低周波数
で、しかも、周波数温度特性の優れた屈曲捩れ水
晶振動子が提案されている。しかし、その電気的
特性、即ち、主振である屈曲モードと副振である
捩りモードのCI値による周波数温度特性の変化
等全く知られていない。そこで、本発明は主振で
ある屈曲モードのCI値を劣化させることなく、
周波数温度特性の優れた水晶振動子を安定して得
るには副振である捩りモードのCI値を改善する
ことが非常に大切であることが分かつた。以下、
図面に沿つて本発明を説明する。
Crystal resonators used in watches, especially tuning fork-shaped bent crystal resonators, are now fully in use. However, just because a large number of vibrators are currently in use does not mean that there are no problems, and this vibrator also has various drawbacks. Among these, the major drawback was that the frequency-temperature characteristics were inadequate over a wide temperature range, which placed a limit on the accuracy of the clock. Therefore,
Recently, using two of these oscillators, furthermore,
Although a method with improved frequency-temperature characteristics has been proposed, this method has the disadvantage that it is difficult to combine two oscillators, and at the same time, it is expensive because it uses two crystals. Furthermore, there is an AT-cut crystal oscillator that is a single crystal oscillator and has excellent frequency-temperature characteristics, but the frequency of this oscillator is high in the MHz band, and it consumes a lot of current for watches, so it cannot be used at present. This is the current situation. Therefore, there was a demand for a single crystal resonator with low frequency and excellent frequency-temperature characteristics.Recently, bent torsional crystal resonators with low frequency and excellent frequency-temperature characteristics have been developed. Proposed. However, nothing is known about its electrical characteristics, ie, the change in frequency temperature characteristics depending on the CI value of the bending mode, which is the main vibration, and the torsion mode, which is the secondary vibration. Therefore, the present invention has been developed so that the CI value of the bending mode, which is the main vibration, does not deteriorate.
In order to stably obtain a crystal resonator with excellent frequency-temperature characteristics, it was found that it is very important to improve the CI value of the torsional mode, which is the secondary vibration. below,
The present invention will be explained along with the drawings.

第1図は本発明の屈曲捩り水晶振動子の厚みt
を変えたときの屈曲モード振動FMと捩りモード
TMとの結合状態を示す図である。仮に、両方の
モード間に全く結合がないとすれば捩りモード振
動TMはほぼ厚みtに関して周波数は傾きを有
する直線で変化することが知られている、又、屈
曲モード振動FMは厚みtには周波数はほとんど
無関係であるから両方の振動モードは厚みtを変
化させたとき交点Iを持つはずである。しかし、
実際には両方のモード間には結合が生ずるため様
子は若干異なつてくる。今、厚みt1,t2の振動子
について説明すると、t1振動子の捩りモードの共
振周波数を1、屈曲モードの共振周波数を2とす
るとその差△1は△121で与えられる。一
方、厚みt2の振動子の捩りモード振動の共振周波
数を3、屈曲モードの共振周波数を4とするとそ
の差△3は△343で与えられる。ここで理
解されることは異なつた厚みで結合が生じるとい
うことである。換言するならば、t2振動子は屈曲
モード振動と捩りモード振動の周波数差△がt1
振動子よりも大きくても結合するという事である
(△3>△1)。このことは捩りモード振動のCI値
が各々に於いて異なつていることを意味してい
る。即ち、捩り振動のCI値が小さいほど結合を
起こしやすいという事であり第1図では、CI1>
CI2の関係がある。屈曲モードと捩りモードの周
波数差が大きいほど主振である屈曲振動のリアク
タンス特性を劣化させることないから主振のCI
値を小さくすることができる。このように結合し
た振動子ではいかに副振である捩りモードのCI
値を小さくするかが振動子開発のキーポイントで
あるかが分かる。第2図は副振である捩り振動の
CI値を低くするための本発明の電極構造の一実
施例を示す。X、Y、Z軸は各々、水晶の電気
軸、機械軸、光軸を示し、X軸を回転軸としてθ
度回転したときの図が第2図に示されている。
Y′、Z′軸は回転後の新軸である。音叉型水晶1は
音叉腕1a,1bを有し、音叉腕1aの上面には
電極aが、下面には電極c(図示されてない)、一
方の側面には電極b、他方の側面には電極d(図
示されてない)がそれぞれ配置されている。全
く、同様に、他方の音叉腕1bの上下面及び側面
には電極e,f,g,h,(g,hは図示されて
ない)が配置されている。第3図は第2図の音叉
型水晶振動子の音叉腕のほぼ中央部を切断した断
面図を示す。A,Bは電極端子を示す。今、仮
に、電極端子Aに正、電極端子Bに負の電圧が印
加されたと仮定すると電界は矢印で示したように
働く、説明を簡単にするため左側の音叉腕につい
て説明すると、ab間、cd間の電界とad間、cb間
の電界はX軸方向成分については反対向きの電界
を示す。従つて、今、ab間cb間で伸びの歪を生
じればad間、cd間では縮みの歪みを生じる。そ
れ故、音叉腕は屈曲を生じる。又、本発明の上面
の電極aと下面の電極cは厚みに対して非対称に
配置されているから、振動子の各部では歪量が異
なる。即ち、ab間の歪量の絶対値はad間、並び
にcb間の歪量の絶対値より大きく、cd間の歪量
の絶対値も又、ad間、cb間の歪量の絶対値より
も大きくなる。更に具体的に説明すると今、ab
間に伸びの歪が生じたとき、cd間には縮みの歪
がそれぞれもつと多く発生するという事で、この
変位は音叉腕の水平面内で変位せず、水平面より
少し傾いた方向に変位する。それ故、前述した、
屈曲モード振動と結合した捩り振動モードを引き
起こすことができる。全く同様に、他方の音叉腕
についても歪を生じさせる事ができる。更に、電
極端子A,B間に交流電圧を印加させることによ
つて音叉型屈曲捩り水晶振動子の振動を持続させ
ることが可能である。第4図は、第2図及び第3
図の示す電極を配置したときの本発明の音叉型屈
曲捩り水晶振動子の振動姿態を示す斜視図であ
る。2は屈曲モード振動、3は捩りモード振動を
示し、4は振動2と振動3が合成された屈曲捩れ
モード振動を示す。
Figure 1 shows the thickness t of the bent torsional crystal resonator of the present invention.
Flexural mode vibration F M and torsional mode when changing
FIG. 3 is a diagram showing a bonding state with TM . If there is no coupling between both modes, it is known that the frequency of torsional mode vibration T M changes approximately along a straight line with a slope with respect to thickness t, and that bending mode vibration F M changes approximately with respect to thickness t. Since the frequency is almost unrelated to , both vibration modes should have an intersection point I when the thickness t is changed. but,
In reality, since coupling occurs between both modes, the situation will be slightly different. Now, to explain the oscillators with thicknesses t 1 and t 2 , if the resonance frequency of the torsional mode of the t 1 oscillator is 1 and the resonance frequency of the bending mode is 2 , the difference △ 1 is given by △ 1 = 21. It will be done. On the other hand, if the resonant frequency of torsional mode vibration of a vibrator with thickness t 2 is 3 and the resonant frequency of bending mode is 4 , the difference △ 3 is given by △ 3 = 4 - 3 . What is understood here is that bonding occurs at different thicknesses. In other words, in the t 2 oscillator, the frequency difference △ between bending mode vibration and torsional mode vibration is t 1
This means that even if it is larger than the oscillator, it will couple (△ 3 > △ 1 ). This means that the CI values of torsional mode vibration are different for each. In other words, the smaller the CI value of torsional vibration, the more likely it is to cause coupling, and in Figure 1, CI1>
CI2 is involved. The larger the frequency difference between the bending mode and the torsion mode, the less the reactance characteristics of the main vibration, the bending vibration, will deteriorate, so the CI of the main vibration
The value can be reduced. In a vibrator coupled in this way, how can the CI of torsional mode, which is secondary vibration, occur?
It can be seen that reducing the value is the key point in resonator development. Figure 2 shows torsional vibration, which is secondary vibration.
An example of the electrode structure of the present invention for lowering the CI value is shown. The X, Y, and Z axes represent the electrical, mechanical, and optical axes of the crystal, respectively, and the rotational axis is θ.
The view when rotated is shown in FIG.
The Y′ and Z′ axes are the new axes after rotation. The tuning fork crystal 1 has tuning fork arms 1a and 1b, with an electrode a on the top surface of the tuning fork arm 1a, an electrode c (not shown) on the bottom surface, an electrode b on one side, and an electrode B on the other side. Electrodes d (not shown) are arranged respectively. Similarly, electrodes e, f, g, and h (g and h are not shown) are arranged on the upper and lower surfaces and side surfaces of the other tuning fork arm 1b. FIG. 3 shows a cross-sectional view of the tuning fork arm of the tuning fork crystal resonator shown in FIG. 2, taken approximately at the center. A and B indicate electrode terminals. Now, if we assume that a positive voltage is applied to electrode terminal A and a negative voltage is applied to electrode terminal B, the electric field will act as shown by the arrows.To simplify the explanation, we will explain the tuning fork arm on the left. The electric field between cd and the electric field between ad and cb show electric fields in opposite directions with respect to the X-axis direction component. Therefore, if an elongation strain occurs between AB and CB, a contraction strain will occur between AD and CD. Therefore, the tuning fork arm undergoes flexion. Furthermore, since the electrode a on the top surface and the electrode c on the bottom surface of the present invention are arranged asymmetrically with respect to the thickness, the amount of strain differs in each part of the vibrator. In other words, the absolute value of the distortion between AB is greater than the absolute value of the distortion between AD and CB, and the absolute value of the distortion between CD is also greater than the absolute value of the distortion between AD and CB. growing. To be more specific, ab
When there is an elongation strain between CDs, there will be a lot of contraction strain between CDs, so this displacement will not be within the horizontal plane of the tuning fork arm, but will be displaced in a direction slightly tilted from the horizontal plane. . Therefore, as mentioned above,
A torsional vibration mode combined with a bending mode vibration can be induced. In exactly the same way, distortion can be caused on the other tuning fork arm. Furthermore, by applying an alternating current voltage between electrode terminals A and B, it is possible to sustain the vibration of the tuning fork type bent torsion crystal resonator. Figure 4 is similar to Figures 2 and 3.
FIG. 2 is a perspective view showing the vibration state of the tuning fork type bent torsional crystal resonator of the present invention when the electrodes shown in the figure are arranged. 2 indicates bending mode vibration, 3 indicates torsion mode vibration, and 4 indicates bending-torsion mode vibration in which vibration 2 and vibration 3 are combined.

以上述べたように本発明は音叉型水晶振動子の
音叉腕の上面と下面の電極配置を厚みに対して、
非対称にすることによつて、捩り振動を起こりや
すくする。換言するならばCI値を低くすること
が可能になつた。その結果、主振である屈曲モー
ド振動と副振である捩りモード振動の結合が生じ
やすくなつた、即ち、主振と副振の周波数差を大
きくしても結合が生じる、それ故、主振のCI値
を劣化させることがなくなり、低周波数で周波数
温度特性の優れた音叉型屈曲捩れ水晶振動子を安
定して提供することができる。同時に1個の水晶
振動子で広い温度範囲にわたつて周波数補償が可
能であるから安くできる。本発明の実施列では上
面と下面の電極配置において、上面は外側に下面
は内側にそれぞれ配置されているが、上面電極を
内側に、下面電極を外側に配置しても全く同じ効
果を有する。
As described above, the present invention allows the electrode arrangement on the upper and lower surfaces of the tuning fork arm of a tuning fork crystal resonator to be adjusted according to the thickness.
By making it asymmetrical, torsional vibration is more likely to occur. In other words, it has become possible to lower the CI value. As a result, coupling between the bending mode vibration, which is the main vibration, and the torsional mode vibration, which is the secondary vibration, has become more likely to occur.In other words, even if the frequency difference between the main vibration and the secondary vibration is large, coupling occurs. Therefore, it is possible to stably provide a tuning fork type bent torsional crystal resonator with excellent frequency temperature characteristics at low frequencies. At the same time, one crystal oscillator can perform frequency compensation over a wide temperature range, making it inexpensive. In the embodiment of the present invention, the electrodes on the top and bottom surfaces are arranged on the outside and the bottom on the inside, but the same effect can be obtained even if the top electrode is placed on the inside and the bottom electrode is placed on the outside.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の屈曲捩り水晶振動子の厚みt
を変えたときの屈曲モード振動の結合状態を示す
特性図、第2図は副振である捩り振動のCI値を
低くするための本発明の電極構造の一実施例を示
す斜視図、第3図は第2図の音叉型水晶振動子の
断面図、第4図は本発明の音叉型屈曲捩り水晶振
動子の振動方向を示すための斜視図である。 1……音叉型水晶、1a,1b……音叉腕、
a,e……上面電極、c,g……下面電極、b,
d,f,h……側面電極。
Figure 1 shows the thickness t of the bent torsional crystal resonator of the present invention.
FIG. 2 is a perspective view showing an embodiment of the electrode structure of the present invention for lowering the CI value of torsional vibration, which is secondary vibration. The figure is a sectional view of the tuning fork type crystal resonator shown in FIG. 2, and FIG. 4 is a perspective view showing the vibration direction of the tuning fork type bent torsional crystal resonator of the present invention. 1... Tuning fork type crystal, 1a, 1b... Tuning fork arm,
a, e...Top electrode, c, g...Bottom electrode, b,
d, f, h...side electrodes.

Claims (1)

【特許請求の範囲】[Claims] 1 音叉型に形成された振動子で、屈曲モードと
捩りモードの混在する水晶振動子において、前記
音叉型水晶振動子の各々の音叉腕の上、下面及び
両側面にはそれぞれ1本の電極が配置され、上記
各々の音叉腕に配置された上面の電極と下面の電
極は、上、下方向の厚みをはさんで非対称となる
位置に配置され、かつ各電極の接続は、一方の音
叉腕の上、下面の電極と他方の音叉腕の両側面に
配置された電極とに印加される電位の極性と、他
方の音叉腕の上、下面の電極と一方の音叉腕の両
側面に配置された電極とに印加される電位の極性
とが互いに異なるように構成されていることを特
徴とする音叉型水晶振動子の電極構造。
1. In a crystal resonator formed in a tuning fork shape and having a mixture of bending mode and torsional mode, one electrode is provided on the top, bottom, and both sides of each tuning fork arm of the tuning fork type crystal resonator. The electrodes on the upper surface and the electrodes on the lower surface arranged on each of the above tuning fork arms are arranged at asymmetrical positions across the thickness in the upper and lower directions, and each electrode is connected to one tuning fork arm. The polarity of the potential applied to the upper and lower electrodes and the electrodes placed on both sides of the other tuning fork arm, and the polarity of the potential applied to the upper and lower electrodes of the other tuning fork arm and the electrodes placed on both sides of one tuning fork arm. 1. An electrode structure for a tuning fork crystal resonator, characterized in that the polarities of potentials applied to the first and second electrodes are different from each other.
JP3870880A 1980-03-26 1980-03-26 Electrode structure of tuning fork type quartz oscillator Granted JPS56136015A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3870880A JPS56136015A (en) 1980-03-26 1980-03-26 Electrode structure of tuning fork type quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3870880A JPS56136015A (en) 1980-03-26 1980-03-26 Electrode structure of tuning fork type quartz oscillator

Publications (2)

Publication Number Publication Date
JPS56136015A JPS56136015A (en) 1981-10-23
JPH0128530B2 true JPH0128530B2 (en) 1989-06-02

Family

ID=12532808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3870880A Granted JPS56136015A (en) 1980-03-26 1980-03-26 Electrode structure of tuning fork type quartz oscillator

Country Status (1)

Country Link
JP (1) JPS56136015A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1277974B1 (en) * 1995-12-29 1997-11-12 Sviluppo Materiali Spa METHOD FOR THE DETERMINATION AND CONTROL OF THE CONTENT OF DISSOLVED NITROGEN IN LIQUID METALLIC PHASES AND DEVICE FOR ITS

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6316169Y2 (en) * 1979-11-22 1988-05-09

Also Published As

Publication number Publication date
JPS56136015A (en) 1981-10-23

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