JPH01287821A - magnetic recording medium - Google Patents

magnetic recording medium

Info

Publication number
JPH01287821A
JPH01287821A JP63117294A JP11729488A JPH01287821A JP H01287821 A JPH01287821 A JP H01287821A JP 63117294 A JP63117294 A JP 63117294A JP 11729488 A JP11729488 A JP 11729488A JP H01287821 A JPH01287821 A JP H01287821A
Authority
JP
Japan
Prior art keywords
film
magnetic recording
recording medium
tape
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63117294A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63117294A priority Critical patent/JPH01287821A/en
Publication of JPH01287821A publication Critical patent/JPH01287821A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度記録に適した磁気記録媒体に関する。[Detailed description of the invention] Industrial applications The present invention relates to a magnetic recording medium suitable for high-density recording.

従来の技術 近年、高密度記録への要望から、従来の長手記録に於て
も、又新たな発展をみせている垂直磁気記録に於ても、
Go系の強磁性金属薄膜を磁気記録層とする磁気記録媒
体の実用化が強く望まれその研究が盛んである。
Conventional technology In recent years, due to the demand for high-density recording, both conventional longitudinal recording and perpendicular magnetic recording, which is showing new development,
There is a strong desire to put into practical use magnetic recording media in which a Go-based ferromagnetic metal thin film is used as a magnetic recording layer, and research is being actively carried out.

とりわけ、短波長記録での記録減磁が無視できる垂直磁
気記録は、単磁極ヘッドと、パーマロイ薄膜、Go−O
r垂直磁化膜の2層媒体との組み合わせで、極めて優れ
た高密度記録特性を示すものとして知られ〔特公昭58
−91号公報〕、各方面で改良が続けられ、現在確立し
たインターフェース技術として高密度記録化が最も進ん
でいるリングヘッドによるヘリカルスキャン方式でも高
密度記録の可能性が示され〔特開昭61−77128号
公報〕る等、短時間の性能はその進歩に目覚しいものが
あるが、耐久性に於ては十分とは言い難く、保護膜を磁
気記録層上に配設する方法がもっばら、その改良案とし
てとりあげられ各種の試みがなされている〔特開昭61
−151835号公報、特開昭61−151830号公
報、特開昭61−126627号公報〕。
In particular, perpendicular magnetic recording, in which recording demagnetization can be ignored during short wavelength recording, uses a single magnetic pole head, permalloy thin film, and Go-O.
It is known to exhibit extremely excellent high-density recording characteristics when used in combination with a two-layer medium with a perpendicularly magnetized film.
-91 Publication], improvements continued in various fields, and the possibility of high-density recording was demonstrated even with the helical scan method using a ring head, which is currently the most advanced interface technology for high-density recording [JP-A No. 61] Although there have been remarkable advances in short-term performance, such as [Reference No. 77128], it is difficult to say that durability is sufficient, and most methods of disposing a protective film on the magnetic recording layer are Various attempts have been made to improve this idea
-151835, JP 61-151830, JP 61-126627].

発明が解決しようとする課題 しかしながら、耐久性を確保するに必要な保護膜の厚み
は、通常200人前後で、この膜厚による短波長でのス
ペーシング損失は無視できない為、磁性層自体の改良が
課題であった。
Problems to be Solved by the Invention However, the thickness of the protective film required to ensure durability is usually around 200 mm, and the spacing loss at short wavelengths due to this film thickness cannot be ignored, so it is necessary to improve the magnetic layer itself. was the issue.

本発明は上記した事情に鑑み、磁性層自体のC/Nを改
良することで、保護膜により生ずるスベーシング損失が
あっても十分に実用性のあるC/Nを確保できるように
した磁気記録媒体を提供するものである。
In view of the above-mentioned circumstances, the present invention provides a magnetic recording medium that improves the C/N of the magnetic layer itself, thereby making it possible to secure a sufficiently practical C/N even with the subbasing loss caused by the protective film. It provides:

課題を解決するだめの手段 上記した課題を解決するため、本発明の磁気記録媒体は
、高分子フィルム上にBe 、 Hf 、 Zrのうち
いずれかの薄膜を配した上に垂直磁化膜を配するように
したものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention is provided by disposing a thin film of Be, Hf, or Zr on a polymer film, and then disposing a perpendicular magnetization film on the polymer film. This is how it was done.

作用 本発明の磁気記録媒体は、上記した構成により、垂直磁
化膜の結晶配向性が改善されるためと考えられる雑音改
善によるC/N改善がはかれるのと、Be 、 Hf 
、 Zr薄膜の弾性によるものと考えられるヘッドタッ
チの改善による実効出力の改善とがあわせられC/Nが
大幅に改善され、保護膜を配しても実用水準のC/Nが
得られるようになるのである。
Operation The magnetic recording medium of the present invention has the above-described structure, which improves the C/N due to noise improvement, which is thought to be due to the improvement of the crystal orientation of the perpendicularly magnetized film, and also improves the C/N by reducing Be, Hf.
, combined with an improvement in effective output due to improved head touch, which is thought to be due to the elasticity of the Zr thin film, the C/N ratio has been significantly improved, making it possible to obtain a practical level C/N ratio even with a protective film. It will become.

実施例 以下、図面を参照しながら、本発明の実施例について詳
しく説明する。第1図は、本発明の実施例の磁気記録媒
体の拡大断面図である。第1図で1は、ポリアミド、ポ
リイミド、ポリサルフォン。
EXAMPLES Hereinafter, examples of the present invention will be described in detail with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In Figure 1, 1 is polyamide, polyimide, polysulfone.

ポリエーテルエーテルケトン、ポリエーテルサルフ才ン
、ポリフェニレンサルファイド、ポリエチレンナフタレ
ート等の高分子フィルムで、必要に応じて、水溶性高分
子から成るみみず状の下塗シ層や、5i02 、 Ca
CO3、TiO2、ZrO2等の微粒子を配した微粒子
塗布層等を配したものを用いることもできる。2は、B
e 、 Hf  、 Zrのうちいずれかの薄膜で、ス
パッタリング法、イオンビームデポジション法、電子ビ
ーム蒸着法、イオンブレーティング法等により形成され
るもので、膜厚は300人から30oO人、好ましくは
、500人から16oo八が適当である。この膜厚は、
垂直磁化膜が磁束量として必要な水準より、好ましい膜
厚が1600人から3000人であることから、好まし
い範囲として決るもので、500Å以下では、C/N改
善効果のうち、結晶性改善効果が場所により不均一にな
ることから決る臨界で、1500Å以上になると、ヘッ
ドタッチが不安定になることで逆にC/Nが不安定にな
ることから決る臨界である。
A polymer film such as polyether ether ketone, polyether sulfate, polyphenylene sulfide, polyethylene naphthalate, etc. If necessary, a worm-like undercoat layer made of a water-soluble polymer, 5i02, Ca
It is also possible to use a layer coated with fine particles such as CO3, TiO2, ZrO2, or the like. 2 is B
A thin film of any one of e, Hf, and Zr, formed by a sputtering method, an ion beam deposition method, an electron beam evaporation method, an ion blating method, etc., and the film thickness is from 300 to 3000, preferably , 500 to 1600 people is appropriate. This film thickness is
This is determined as a preferable range because the preferred thickness of the perpendicularly magnetized film is 1,600 to 3,000 Å compared to the required level of magnetic flux, and below 500 Å, the crystallinity improvement effect is less than the C/N improvement effect. The criticality is determined by the fact that it becomes non-uniform depending on the location, and the criticality is determined by the fact that if the thickness exceeds 1500 Å, the head touch becomes unstable, and conversely, the C/N becomes unstable.

3は、Co−0r 、 Go−Ti 、 Co−Zr 
、 Go−Ru 。
3 is Co-0r, Go-Ti, Co-Zr
, Go-Ru.

Go’−Ta 、 Go−Mo 、 Go −W 、 
Go−Or−Wb 。
Go'-Ta, Go-Mo, Go-W,
Go-Or-Wb.

Go−Ni−Or等の垂直磁化膜で、膜厚は1500人
から3000人の範囲が好ましく、スパッタリング法、
電子ビーム蒸着法、イオンブレーティング法等で形成さ
れるものである。4は保護膜で、BO膜、TiC膜、B
N膜、ダイアモンド状硬質炭素薄膜、プラズマ重合膜等
の薄膜と、脂肪酸アミド、パーフルオロホリエーテル、
高級アルコール等の潤滑剤を組み合わせたものが良く用
いられるもので、好ましい膜厚は、100人から200
人である。
A perpendicular magnetization film such as Go-Ni-Or, with a film thickness preferably in the range of 1,500 to 3,000, is formed by sputtering,
It is formed by an electron beam evaporation method, an ion blating method, or the like. 4 is a protective film, BO film, TiC film, B
Thin films such as N film, diamond-like hard carbon thin film, plasma polymerized film, fatty acid amide, perfluorophoriether, etc.
A combination of lubricants such as higher alcohols is often used, and the preferred film thickness is 100 to 200 mm.
It's a person.

本発明の磁気記録媒体は、磁気ディスク、磁気テープの
いずれでもよいが、磁気テープの実施例を比較例との対
比で更に具体例を以下に示す。
The magnetic recording medium of the present invention may be either a magnetic disk or a magnetic tape, and specific examples of magnetic tape will be shown below in comparison with comparative examples.

厚み11.5μmのポリエチレンテレフタレートフィル
ム上に直径60人のZrO2を20ケ/ωm)2配し、
その上に高周波スパッタリング法でBeを680人配し
たものと、Hfを1oOo人配したものと、 Zrを1
000人配したものを準備し、夫々にGo−Cr垂直磁
化膜(Co : aowtL%)を1900人配し、更
にその上に、グラファイトをターゲットにして、高周波
スパッタリング法で90人ダイアモンド状硬質炭素薄膜
を配し、その上に真空蒸着法でパーフルオロステアリン
酸を60人配して8ミリ幅の磁気テープを得た。Be薄
膜を配したものをテープ人、Hf品をテープB、Zr品
をテープCとした。比較例(テープD)として、Be 
、 Hf 、Zrのいずれの薄膜も介さずにGo−Cr
垂直磁化膜を配した以外は実施例と同じ条件で製造した
ものを準備した。テープ人からDを、改造した8ミリビ
デオによシ、ピット長0.2μm、トラックピッチ5μ
mのディジタル記録を、ギャップ長0.15μmのアモ
ルファスヘッドにより行い、帯域12(MHz)の広帯
域C/Nを比較した。
On a polyethylene terephthalate film with a thickness of 11.5 μm, two pieces of ZrO2 with a diameter of 60 pieces (20 pieces/ωm) were placed,
On top of that, 680 pieces of Be were placed by high-frequency sputtering method, 100 pieces of Hf were placed on top of that, and 1 piece was placed with Zr.
1,900 layers of Go-Cr perpendicular magnetization film (Co: awtL%) were placed on each layer, and on top of that, 90 layers of diamond-like hard carbon were deposited using a high-frequency sputtering method using graphite as a target. A thin film was deposited, and 60 perfluorostearic acids were deposited on the thin film using a vacuum evaporation method to obtain a magnetic tape with a width of 8 mm. The product with Be thin film was designated as Tape No., the Hf product was designated as Tape B, and the Zr product was designated as Tape C. As a comparative example (tape D), Be
, Hf, and Zr without intervening thin films.
A device manufactured under the same conditions as in the example except that a perpendicular magnetization film was provided was prepared. Transferred D from the tape to a modified 8mm video, pit length 0.2μm, track pitch 5μm.
Digital recording of 100 MHz was performed using an amorphous head with a gap length of 0.15 μm, and the broadband C/N of band 12 (MHz) was compared.

テープDをQ(dB)として相対比較した結果、テープ
人は+3.3(dB) 、テープBは+2.6(dB)
、テープCは+2.0 (dB)と優れていた。
As a result of relative comparison of Tape D as Q (dB), Tape person is +3.3 (dB) and Tape B is +2.6 (dB).
, Tape C was excellent at +2.0 (dB).

第2図は、Be薄膜を上記した条件以外の膜厚で形成し
た時のC/Nと膜厚の関係を示す特性線図である。
FIG. 2 is a characteristic diagram showing the relationship between C/N and film thickness when a Be thin film is formed with a film thickness other than the conditions described above.

発明の効果 以上のように本発明によれば、高密度記録でのC/Nが
改良された垂直磁気記録用の磁気記録媒体が得られると
いったすぐれた効果がある。
Effects of the Invention As described above, the present invention has the excellent effect of providing a magnetic recording medium for perpendicular magnetic recording with improved C/N in high-density recording.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例の磁気記録媒体の拡大断面図、
第2図は本発明の実施例における特性線図である。 1・・・・・・高分子フィルム、2・・・・・・Be(
Hf 、 Zr )膜、3・・・・・・垂直磁化膜。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名1−
 高分子フィルム 2−・−日e(Hf、1r)a 第1図 第2図 Be頑厚 (わ
FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium according to an embodiment of the present invention;
FIG. 2 is a characteristic diagram in an embodiment of the present invention. 1...Polymer film, 2...Be(
Hf, Zr) film, 3... Perpendicular magnetization film. Name of agent: Patent attorney Toshio Nakao and 1 other person1-
Polymer film 2-・-day e (Hf, 1r) a Figure 1 Figure 2 Be robust (wa

Claims (1)

【特許請求の範囲】[Claims] 高分子フィルム上にBe、Hf、Zrのうちいずれかの
薄膜を配した上に垂直磁化膜を配したことを特徴とする
磁気記録媒体。
A magnetic recording medium characterized in that a thin film of Be, Hf, or Zr is disposed on a polymer film, and a perpendicular magnetization film is disposed on the thin film.
JP63117294A 1988-05-13 1988-05-13 magnetic recording medium Pending JPH01287821A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63117294A JPH01287821A (en) 1988-05-13 1988-05-13 magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63117294A JPH01287821A (en) 1988-05-13 1988-05-13 magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH01287821A true JPH01287821A (en) 1989-11-20

Family

ID=14708194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63117294A Pending JPH01287821A (en) 1988-05-13 1988-05-13 magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH01287821A (en)

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