JPH01311408A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH01311408A JPH01311408A JP14053388A JP14053388A JPH01311408A JP H01311408 A JPH01311408 A JP H01311408A JP 14053388 A JP14053388 A JP 14053388A JP 14053388 A JP14053388 A JP 14053388A JP H01311408 A JPH01311408 A JP H01311408A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- magnetic
- gap
- depth
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 99
- 239000010409 thin film Substances 0.000 claims description 12
- 239000003302 ferromagnetic material Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 abstract description 17
- 239000010432 diamond Substances 0.000 abstract description 17
- 239000011521 glass Substances 0.000 abstract description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910034327 TiC Inorganic materials 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000000593 degrading effect Effects 0.000 abstract 1
- 230000003292 diminished effect Effects 0.000 abstract 1
- 229910003465 moissanite Inorganic materials 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 239000011162 core material Substances 0.000 description 9
- 238000004804 winding Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 241000282326 Felis catus Species 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は磁気記録再生装置に用いられる磁気ヘッドに係
り、特にビデオテープレコーダ（ＶＴＲ）の映像信号等
に使用される短波長の記録・再生に最適な磁気ヘッドに
関する。Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a magnetic head used in a magnetic recording/reproducing device, and particularly to a magnetic head used in a magnetic recording/reproducing device, and particularly for recording/reproducing short wavelengths used for video signals of a video tape recorder (VTR). Regarding the magnetic head that is most suitable for
（従来技術）
第３図は従来の磁気ヘッド１０の斜視図、第４図は第３
図に示すＡ−Ａ”切断線に沿った磁気ヘッド１０の断・
面図である。１１．１１”はフェライト磁性材料等から
なる磁気コア半休であり、−方の磁気コア半体１１の突
合せ面には巻線溝１２が形成され、両コア半休１１．１
１’は非磁性材からなるギャップ材を介して突合され、
テープ摺動面１３上にギヤ・ｙブ長約０．２５μＩの磁
気ギャップ１４が形成されている。１５はトラック嘉規
制湧であり、テープ摺動面１３上の磁気ギャップ１４の
両端部から巻線溝１２にかけて、トラック［１を規制す
るための半月状の溝として形成されている。トラックａ
ｔは約２７μｍとしである。(Prior Art) FIG. 3 is a perspective view of a conventional magnetic head 10, and FIG. 4 is a perspective view of a conventional magnetic head 10.
A cut of the magnetic head 10 along the A-A” cut line shown in the figure.
It is a front view. 11.11'' is a magnetic core half-hole made of ferrite magnetic material or the like, and a winding groove 12 is formed on the abutting surface of the negative magnetic core half 11, and both core half-holes 11.1
1' are butted together via a gap material made of non-magnetic material,
A magnetic gap 14 having a gear length of approximately 0.25 μI is formed on the tape sliding surface 13 . Reference numeral 15 denotes a track control groove, which is formed as a half-moon-shaped groove for regulating the track [1] from both ends of the magnetic gap 14 on the tape sliding surface 13 to the winding groove 12. track a
t is approximately 27 μm.
１６は５００℃以上の軟化点を有するモールドガラスで
あり、トラック幅規制溝１５と巻線溝１２の一部にかけ
て溶融充填されている。16 is molded glass having a softening point of 500° C. or higher, and is melted and filled into the track width regulating groove 15 and part of the winding groove 12.
１７は巻線ガイドであり、このガイド１７と巻線溝１２
とを利用して図示しないコイルが巻回される。17 is a winding guide, and this guide 17 and the winding groove 12
A coil (not shown) is wound using this.
１は磁気ギャップ１４の深さを示し、例えば家庭用１７
２インチＶＴＲ等ではＣＯ−γ酸化鉄が使われているた
め耐摩耗性を考慮して約４０μＩとしである。1 indicates the depth of the magnetic gap 14, for example, 17 for household use.
Since CO-γ iron oxide is used in 2-inch VTRs and the like, the intensifier should be approximately 40 μI in consideration of wear resistance.
第５図は本発明になる磁気ヘッドと従来の磁気ヘッドの
再生出力特性を実験的に求めたグラフであり横軸に周波
数（Ｍｌ（ｚ）、縦軸に再生出力（ｄＢ）をとっである
。Figure 5 is a graph obtained experimentally of the reproduction output characteristics of the magnetic head according to the present invention and the conventional magnetic head, with the horizontal axis representing frequency (Ml(z)) and the vertical axis representing reproduction output (dB). .
図中、曲線Ａは第１図に示す従来の磁気ヘッド１０にお
いてギャップ深さ１＝４０μｌを有する磁気へンドＨ１
の再生出力特性を示す。In the figure, curve A indicates the magnetic head H1 having a gap depth of 1=40 μl in the conventional magnetic head 10 shown in FIG.
shows the playback output characteristics.
但し、測定条件はへラドチーブ相対速度を５３８ｒａ／
ｓｅｃとし、９８Ｈ２における再生出力をＯｄｅに定
め、磁気テープは次のような特性を有するものを使用し
た。However, the measurement conditions were a relative velocity of 538ra/
sec, the reproduction output in 98H2 was set to Ode, and a magnetic tape having the following characteristics was used.
保磁力（Ｈｃ） ； ９０００ｅ残留磁束密
度（Ｂｒ） ； １５００ Ｇ磁性層厚さ（δ）
； ４μ１
図中、曲線Ｂは第１図に示す従来の磁気ヘッド１０にお
いて、ギャップ深さ１を１＝５μｍと小さくした場合の
再生出力特性であり、全周波数帯域において、曲線Ａ（
Ｊ＝４０μｍ）より約６ｄＢ程度再生出力が上昇してい
ることが分る。Coercive force (Hc); 9000e Residual magnetic flux density (Br); 1500G Magnetic layer thickness (δ)
; 4μ1 In the figure, curve B is the reproduction output characteristic when the gap depth 1 is small as 1=5 μm in the conventional magnetic head 10 shown in FIG.
It can be seen that the reproduction output increases by about 6 dB from J=40 μm).
第６図は第５図に示す従来の磁気ヘッド１０においてギ
ャップ深さ漫の変化と磁気ヘッドのＱとの関係を実験的
に求めたグラフであり、使用周波数ｆ ＝ ５ ＭＨｚ
とし、横軸にギャップ深さ（μｍ）、縦軸にＱの値をと
っである。同図から明らかな様にギャップ深さ４０μｌ
を有する従来の磁気ヘッド１０のＱの値は約３であるの
に対し、ギャップ深さ５μｍを有する従来の磁気ヘッド
１０のＱの値は１２となっており、ギャップ深さ４０μ
ｍのらのに対して約４倍大きいＱの値を示している。FIG. 6 is a graph obtained experimentally of the relationship between the change in the gap depth and the Q of the magnetic head in the conventional magnetic head 10 shown in FIG. 5, and the operating frequency f = 5 MHz.
The horizontal axis represents the gap depth (μm), and the vertical axis represents the Q value. As is clear from the figure, the gap depth is 40 μl.
The Q value of the conventional magnetic head 10 with a gap depth of 5 μm is approximately 3, whereas the Q value of the conventional magnetic head 10 with a gap depth of 5 μm is 12, and the Q value of the conventional magnetic head 10 with a gap depth of 40 μm is approximately 3.
The value of Q is about 4 times larger than that of m.
但し、磁気ヘッドのコイルの巻数は２３ターンとし、ｊ
＝４０μｍにおける５ ＭＨｚでのインダクタンスの値
を２μＨとなるように定めである。However, the number of turns of the magnetic head coil is 23 turns, and
The inductance value at 5 MHz at =40 μm is determined to be 2 μH.
第７図は第３図に示す従来の磁気ヘッドの牽粍特性を実
験的に求めたグラフであり、横軸に時間（ｈ）、縦軸に
摩耗量（μｌ）をとっである。FIG. 7 is a graph showing experimentally obtained resistance characteristics of the conventional magnetic head shown in FIG. 3, with time (h) plotted on the horizontal axis and wear amount (μl) plotted on the vertical axis.
同図から明らかな櫟に、１０００時間以上の使用時間を
保障するには少なくとも最低２５μ以上のギャップ深さ
１が必要であり、安全性を見込むと１＝４０μｍ程度に
する必要がある。It is clear from the figure that in order to guarantee a usage time of 1000 hours or more, a gap depth 1 of at least 25 μm or more is required, and considering safety, it is necessary to set the gap depth 1 to about 40 μm.
（解決すべき課題）
従来の家庭用ＶＴＲにおいては、水平解像度２４０本、
輝度信号Ｓ／Ｎ４３ｄＢが標準規格として設定されてい
るが、更に高画質化に向けて水平解像度４００本以上、
輝度信号Ｓ／Ｎ４５ｄＢ以上を実現することが求められ
ており、磁気ヘッドの再生出力の向上、磁気ヘッドのＱ
値を高めることよってアンプ系システムノイズの低減を
計る必要があった。そこで、ギャップ深さ１を従来の４
０μｍから５μｍ程度に小とすることにより第６図に示
す様に、Ｑの値を１１徨度に大きくすることが出来ると
共に、第５図に示す櫟に再生出力ら１＝５μｌで６ｄＢ
程改善することが可能となるが、しかし、第７図に示す
様に、ギャップ深さ１を５μ頂程度にすると、第７図か
ら明らかな様に寿命時間は３００時間以下となり、装置
の長時間の使用をユーザーに保障出来ないという間ｕ点
があった。(Problems to be solved) Conventional home VTRs have a horizontal resolution of 240 lines,
A brightness signal S/N of 43 dB is set as the standard, but in order to further improve image quality, a horizontal resolution of 400 lines or more is required.
It is required to achieve a brightness signal S/N of 45 dB or more, improve the reproduction output of the magnetic head, and improve the Q of the magnetic head.
It was necessary to reduce the amplifier system noise by increasing the value. Therefore, we decided to change the gap depth from 1 to the conventional 4.
By reducing the size from 0 μm to about 5 μm, the Q value can be increased to 11 degrees as shown in Figure 6, and the reproduction output is 6 dB at 1 = 5 μl as shown in Figure 5.
However, as shown in Fig. 7, if the gap depth 1 is set to about 5 μm, the life time becomes less than 300 hours, and the length of the device increases. There was a point U in that it was not possible to guarantee the use of time to users.
また、従来の磁気ヘッド１０ではコア材として使用する
Ｍ ｎ Ｚ ｎフェライト材の熱伝導率が略１、２ｘｌ
Ｏ’ ｃａｔ／ａｎ−ｓ −Ｋ テｊ５ルｔ：ｔｔＬ、
モールドガラス１６の熱伝導率はｔ、４ｘｉｏ’ｃａｔ
／ｃＩｌｌ−３・にと更に小さいため、磁気テープの長
時間走行により熱が発生し、磁気ヘッド１０のテープ摺
動面１３に磁気テープの磁性粉、バインダー粒子等が焼
き付き付着する現象が生じ、これがスペーシングクロス
を誘発し、磁気ヘッドの再生出力を低下させる等の問題
点があった。Furthermore, in the conventional magnetic head 10, the thermal conductivity of the MnZn ferrite material used as the core material is approximately 1.2xl.
O' cat/an-s -K tej5t:ttL,
The thermal conductivity of the molded glass 16 is t, 4xio'cat
Since the magnetic tape is even smaller than /cIll-3, heat is generated when the magnetic tape runs for a long time, and a phenomenon occurs in which the magnetic powder, binder particles, etc. of the magnetic tape are burned and adhered to the tape sliding surface 13 of the magnetic head 10. This causes problems such as spacing crosses and a reduction in the reproduction output of the magnetic head.
〈課題を解決するための手段〉
本発明は上記問題点を解決するためになされたものであ
り、強磁性材料からなる磁気コア間で磁気ギャップを形
成してなる磁気ヘッドのテープ走行面に、ビッカース硬
度で３０００にｇ／ｌｌｌｌＩ２以上の硬度を有する非
磁性超薄膜を形成すると共に、前記磁気ギャップの深さ
を１０μ以下としたことを特徴とする磁気ヘッドを提供
するものである。<Means for Solving the Problems> The present invention has been made in order to solve the above-mentioned problems, and provides a tape running surface of a magnetic head formed by forming a magnetic gap between magnetic cores made of ferromagnetic material. The present invention provides a magnetic head characterized in that a non-magnetic ultra-thin film having a Vickers hardness of 3000 g/lllI2 or more is formed, and the depth of the magnetic gap is 10 μ or less.
（実施例）
第１図は本発明になる磁気ヘッド２０の斜視図、第２図
は第１図に示す磁気へｙド２０の平面図であるが、第３
図に示す従来の磁気ヘッド１０の構成要素と同一構成要
素には同一符号を付し、説明を省略すると共に興なる点
のみを説明する。(Example) FIG. 1 is a perspective view of a magnetic head 20 according to the present invention, and FIG. 2 is a plan view of the magnetic head 20 shown in FIG.
Components that are the same as those of the conventional magnetic head 10 shown in the figure are denoted by the same reference numerals, and their explanation will be omitted and only important points will be explained.
従来の磁気ヘッド１０と異なる点は、従来の磁気ヘッド
１０のテープ摺動面１３上に、アモルファスダイヤモン
ド、結晶ダイヤモンド、５ｉＣ１ＴＩＣ，ＴＬＮ、５Ｌ
３Ｎ４及びＢＮ等からなる高硬度でしかも熱伝導率がガ
ラスより大なる非磁性の超薄１１２１を形成した点と、
ギャップ深さｊｏを従来のギャップ深さ１に対して極端
に小さくした点である。The difference from the conventional magnetic head 10 is that on the tape sliding surface 13 of the conventional magnetic head 10, amorphous diamond, crystalline diamond, 5iC1TIC, TLN, 5L
The point is that a non-magnetic ultra-thin 1121 made of 3N4, BN, etc. with high hardness and higher thermal conductivity than glass is formed.
The difference is that the gap depth jo is extremely smaller than the conventional gap depth 1.
以下、各実施例について説明する。Each example will be described below.
第１実施例：非磁性の超薄膜２１として、約０．０５μ
ｍ以下のアモルファスダイヤモンドを形成し、ギャップ
深さオ０を約５μとした。First embodiment: approximately 0.05μ as the non-magnetic ultra-thin film 21
An amorphous diamond having a diameter of less than m was formed, and the gap depth O0 was set to about 5 μm.
上記の構成により、再生特性として第５図の曲線Ｃで示
す様な再生特性が得られたが、これはギャップ深さＪ＝
５μｍを有する従来の磁気ヘッド１０の再生特性を示す
曲線Ｂに対してアモルファスダイヤモンドの超薄膜２１
の膜厚（０，０５μｍ）によるスペーシングロス
Ｌ （Ｌ ＝５４．６Ｘ ＋＋、但し、α；スぺＳ
Ｓ λ
一シング量、λ；波長）分だけ再生出力が低下した値に
相当しており、結果的に、深さ１；４０μｌを有する従
来の磁気ヘッド１０の再生特性よりも３ ＭＨｚで５ｄ
Ｂ、５８Ｈ２で４ｄＢ、７ ＭＨｚで３ｄＢ、９８Ｈ２
で２ｄＢ程度再生出力が改善されたことになる。With the above configuration, a reproduction characteristic as shown by curve C in FIG. 5 was obtained as a reproduction characteristic, but this is because the gap depth J=
The amorphous diamond ultra-thin film 21 is
Spacing loss L (L = 54.6X ++, however, α; spacing S
This corresponds to a value in which the reproduction output is lowered by an amount of S λ shinging amount, λ: wavelength), and as a result, the reproduction characteristics are 5 d at 3 MHz compared to the reproduction characteristics of the conventional magnetic head 10 having a depth of 1; 40 μl.
B, 4dB at 58H2, 3dB at 7 MHz, 98H2
This means that the reproduction output has been improved by about 2 dB.
また、Ｑ値は第６図より、１２となり１＝４０μｍの従
来の磁気ヘッド１０のものに比較すると４倍程度向上し
ている。一方、アモルファスダイヤモンドはビッカース
硬度で５ 、 ＯＯ０ＫＩＪ／ｆｆ１ｌＩ２の硬度を有
するため耐牽耗特性は極めて良く、１０００時間の走行
後においてもその摩耗量の測定が不可能な程少なかった
。Further, from FIG. 6, the Q value is 12, which is about four times better than that of the conventional magnetic head 10 with 1=40 μm. On the other hand, amorphous diamond has a Vickers hardness of 5 and a hardness of OO0KIJ/ff1lI2, so its wear resistance is extremely good, and even after running for 1000 hours, the amount of wear was so small that it was impossible to measure it.
また、アモルファスダイヤモンドの超薄膜２１の熱伝導
率は９ｃａｌ／ｃＩＩ−３・にで、従来の磁気ヘッドの
テープ走行面１３を構成しているモールドガラス１６や
磁気コア半休１１．１１’のものより３ケタ以上高くな
るため、熱の発散がよく、焼付き現象等が生じにくくな
り、磁気テープの磁性塗膜物の付着物が少なくなり、安
定した長時間にわたる再生出力を保持することが出来る
。Furthermore, the thermal conductivity of the amorphous diamond ultra-thin film 21 is 9 cal/cII-3·, which is higher than that of the molded glass 16 and the magnetic core half-dead 11.11' that make up the tape running surface 13 of a conventional magnetic head. Since the height is three or more orders of magnitude higher, heat dissipates better, burn-in phenomenon and the like are less likely to occur, and there is less adhesion of the magnetic coating on the magnetic tape, making it possible to maintain stable reproduction output over a long period of time.
次に、アモルファスダイヤモンドからなる超薄膜２１の
成膜方法について述べる。Next, a method for forming the ultra-thin film 21 made of amorphous diamond will be described.
まず、従来の磁気ヘッド１０のテープ摺動面１３をダイ
ヤモンドラヅビングテープにより鏡面に仕上げた後、こ
の磁気ヘッド１０を高周波プラズマＣＶＤ装置の中にテ
ープ摺動面１３が上方に向く様に設置し、１ｘｌＯ’〜
ｌＸ１０“’（Ｔｏｒｒ）の圧力を有するＣＨ４反応ガ
ス中において、放電パワニ約１００Ｗでプラズマ放電を
起すことによりテープ摺動面１３上に厚さ０．０５μｍ
のアモルファスダイヤモンドの超薄１１１１２１を形成
する。First, the tape sliding surface 13 of the conventional magnetic head 10 is finished to a mirror surface using diamond lapping tape, and then this magnetic head 10 is installed in a high frequency plasma CVD apparatus so that the tape sliding surface 13 faces upward. 1xlO'～
In a CH4 reaction gas having a pressure of lX10"' (Torr), a plasma discharge is generated with a discharge power of about 100 W to form a 0.05 μm thick film on the tape sliding surface 13.
An ultra-thin layer 111121 of amorphous diamond is formed.
侍の時、磁気ヘッド１０に加える温度は最大２００℃程
度で良いため、トラック幅規制溝１５に充填されたモー
ルドガラス１６による磁気コア半休１１．１１’の接合
や磁気ギャップ１４の接合に何ら影響を与えない。In the case of SAMURAI, the temperature applied to the magnetic head 10 is only about 200° C. at most, so there is no effect on the bonding of the magnetic core half-holes 11 and 11' and the bonding of the magnetic gap 14 by the molded glass 16 filled in the track width regulating groove 15. not give.
なお、本例ではアモルファスダイヤモンドの超薄膜２１
の例によって説明したが、これに固定されるものではな
く、非磁性で高熱伝導性と高硬度を有する超薄膜２１、
例えば、ｓｉｃ、’ｒｔｃ、ＴＩＮ、５１３Ｎ４、ＢＮ
等も同様の方法で形成し、利用することが出来る。但し
、ビッカース硬度は３０００にｇ／Ｗｍ２であることが
望ましい。In this example, an ultra-thin film 21 of amorphous diamond is used.
Although the explanation has been made using the example of
For example, sic, 'rtc, TIN, 513N4, BN
etc. can also be formed and used in a similar manner. However, it is desirable that the Vickers hardness is 3000 g/Wm2.
第２実施例；非磁性の超薄膜２１として約０．０５μｍ
以下のダイヤモンドを形成し、ギャップ深さ、ｌ！ｏを
前記同様的５μとした。ダイヤモンドのビッカース硬度
は５，０００にｌ；ｌ／ｍ＋ｏ２以上、または熱伝導率
は９ ｃａｔ／ Ｃ１ｌ ＨＳ ・にである０作用効果
等は前記第１実施例の場合と時開−のため説明を省略す
る。Second embodiment: approximately 0.05 μm as non-magnetic ultra-thin film 21
Form a diamond with gap depth, l! o was set to 5 μ as described above. The Vickers hardness of diamond is 5,000 l;l/m+o2 or more, or the thermal conductivity is 9 cat/C1l HS.0 The effects, etc. will be explained as they differ from those in the first embodiment. Omitted.
次に本実施例の１製造方法を説明する。Next, one manufacturing method of this embodiment will be explained.
従来の磁気ヘッド１０のギャップ深さ１を５μｍにまで
既知のダイヤモンドテープ等で鏡面に研磨した後、テー
プ活動面１３上に、高温高圧法または非平衡プラズマ法
等によって約０．０５μｍのダイヤモンドの超薄膜２１
を形成するが、ここでは高温高圧法について説明する。After polishing the gap depth 1 of the conventional magnetic head 10 to a mirror surface of 5 μm using a known diamond tape or the like, a diamond layer of about 0.05 μm is deposited on the tape active surface 13 by a high temperature/high pressure method or a non-equilibrium plasma method. Ultra thin film 21
However, the high temperature and high pressure method will be explained here.
まず、従来の磁気ヘッド１０を基板材に見たて、この磁
気ヘッド全体を４９０℃に加熱し、ＣＨ４濃度２％圧力
１００ Ｔｏｒｒ中の雰囲気中で約１０分間反応させる
ことにより０，０５μｍのダイヤモンドの超薄膜２１を
テープ摺動面１３に形成して本発明になる磁気ヘッド２
０を得ることが出来た。First, considering the conventional magnetic head 10 as a substrate material, the entire magnetic head is heated to 490°C and reacted for about 10 minutes in an atmosphere with a CH4 concentration of 2% and a pressure of 100 Torr, thereby forming a 0.05 μm diamond. A magnetic head 2 according to the present invention is formed by forming an ultra-thin film 21 on the tape sliding surface 13.
I was able to get 0.
従来の磁気ヘッド１０に加える下地温度は４９０゛Ｃと
モールドガラス１６の軟化温度より低いためモールドガ
ラスの接着強度は低下することはなく、また、磁気コア
半休１１．１１’を形成するＭ ｎ Ｚ ｎ材もＨ２ガ
ラスによって還元されないため、上記の工程によって磁
気ヘッド１０が破壊されることはない。Since the base temperature applied to the conventional magnetic head 10 is 490°C, which is lower than the softening temperature of the molded glass 16, the adhesive strength of the molded glass does not decrease. Since the n material is also not reduced by the H2 glass, the magnetic head 10 is not destroyed by the above process.
上記の第１及び第２実施例においては、ギャップ深さｌ
を５μｍの例として説明したが、実験によれば、ギャッ
プ深さ１ として約Ｎｏ＝１０μｌまで再生出力を高め
るのに有効である。In the above first and second embodiments, the gap depth l
Although the explanation has been given using an example of 5 μm, experiments have shown that it is effective to increase the reproduction output up to about 10 μl with a gap depth of 1.
（発明の効果） 上述の様に本発明になる磁気ヘッドによれば。(Effect of the invention) According to the magnetic head according to the present invention as described above.
強磁性材料からなる磁気コア間で磁気ギャップを形成し
てなる磁気ヘッドのテープ走行面に、ビッカース硬度で
３０００ Ｋｇ／、ｍ２以上の硬度を有する非磁性超薄
膜を形成すると共に、前記磁気ギャップの深さを１０μ
以下としたため耐鷹耗特性を低下させることなく、再生
出力を増加させることが出来、特にＶＴＲの映像信号等
に使用される短波長の記録・再生に最適な磁気ヘッドを
提供することが出来る。A non-magnetic ultra-thin film having a Vickers hardness of 3000 Kg/m2 or more is formed on the tape running surface of a magnetic head in which a magnetic gap is formed between magnetic cores made of ferromagnetic material, and the magnetic gap is 10μ deep
Since the magnetic head is set as follows, it is possible to increase the reproduction output without reducing the wear resistance, and it is possible to provide a magnetic head that is particularly suitable for recording and reproducing short wavelengths used for VTR video signals and the like.
第１図は本発明になる磁気ヘッドの斜視図、第２図は第
１図に示す磁気ヘッドの平面図、第４図は従来の磁気ヘ
ッドの斜視図、第４図は第３図に示す磁気ヘッドの平面
図、第５図は本発明になる磁気ヘッドと従来の磁気ヘッ
ドの再生特性を実験的に求めたグラフ、第６図は第５図
に示す従来の磁気ヘンドにおいてギャップ深さ１の変化
と磁気ヘッドのＱとの関係を実験的に求めたグラフ、第
７図は第３図に示す従来の磁気ヘッドの牽粍特性を実験
的に求めたグラフである。
１１．１１′・・・磁気コア半体、１２・・・巻線溝、
１３・・・テープ摺動面、１４・・・磁気ギャップ、１
５・・・トラック幅規制溝、１６・・・モールドガラス
、１７・・・巻線ガイド、２０・・・磁気ヘッド、２１
・・・超薄膜。
特許出願人 日本ビクター株式会社
代表者 垣本邦夫
第に図
第７図
手続補正書く方式）
昭和６３年９月ユＦ日
事件との関係 特許出願人
住所 神奈川県横浜市神奈用区守屋町３丁目１２番地４
、補正命令の日付
昭和６３年８月３０日（発送口）
６、補正の内容
明細書の第１２頁第９行の「第４図」を「第３図」と補
正する。ミらFIG. 1 is a perspective view of the magnetic head according to the present invention, FIG. 2 is a plan view of the magnetic head shown in FIG. 1, FIG. 4 is a perspective view of a conventional magnetic head, and FIG. 4 is shown in FIG. A plan view of the magnetic head, FIG. 5 is a graph of experimentally determined reproduction characteristics of the magnetic head according to the present invention and a conventional magnetic head, and FIG. 6 is a graph showing the gap depth of 1 in the conventional magnetic head shown in FIG. FIG. 7 is a graph obtained experimentally to show the relationship between the change in Q of the magnetic head and the Q of the magnetic head. FIG. 7 is a graph obtained experimentally to show the drag characteristics of the conventional magnetic head shown in FIG. 11.11'...Magnetic core half, 12...Winding groove,
13... Tape sliding surface, 14... Magnetic gap, 1
5...Track width regulating groove, 16...Mold glass, 17...Winding guide, 20...Magnetic head, 21
...Ultra thin film. Patent applicant: Japan Victor Co., Ltd. Representative: Kunio Kakimoto, Figure 7 (procedural amendments written in 1st page) Relationship to the September 1986 YuF-day incident Patent applicant address: 3-12 Moriya-cho, Kanayō-ku, Yokohama-shi, Kanagawa Prefecture Address 4
, Date of amendment order: August 30, 1988 (shipping address) 6. "Figure 4" on page 12, line 9 of the statement of contents of the amendment is amended to "Figure 3." Mira
Claims (1)
てなる磁気ヘッドのテープ走行面に、ビッカース硬度で
３０００Ｋｇ／ｍｍ＾２以上の硬度を有する非磁性超薄
膜を形成すると共に、前記磁気ギャップの深さを１０μ
以下としたことを特徴とする磁気ヘッド。A non-magnetic ultra-thin film having a Vickers hardness of 3000 Kg/mm^2 or more is formed on the tape running surface of a magnetic head in which a magnetic gap is formed between magnetic cores made of ferromagnetic material, and the magnetic gap is 10μ deep
A magnetic head characterized by the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14053388A JPH01311408A (en) | 1988-06-09 | 1988-06-09 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14053388A JPH01311408A (en) | 1988-06-09 | 1988-06-09 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01311408A true JPH01311408A (en) | 1989-12-15 |
Family
ID=15270883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14053388A Pending JPH01311408A (en) | 1988-06-09 | 1988-06-09 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01311408A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03160605A (en) * | 1989-11-17 | 1991-07-10 | Nissin Electric Co Ltd | Magnetic head and its production |
| JPH0442411A (en) * | 1990-06-08 | 1992-02-13 | Nissin Electric Co Ltd | Magnetic head |
| EP0597541A3 (en) * | 1992-11-13 | 1994-10-05 | Koninkl Philips Electronics Nv | Magnetic head and its manufacturing process. |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62209708A (en) * | 1986-03-11 | 1987-09-14 | Toshiba Corp | Magnetic head |
| JPS62209709A (en) * | 1986-03-11 | 1987-09-14 | Toshiba Corp | Magnetic head |
| JPS63162872A (en) * | 1986-12-25 | 1988-07-06 | Nec Corp | Hard amorphous carbon film |
-
1988
- 1988-06-09 JP JP14053388A patent/JPH01311408A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62209708A (en) * | 1986-03-11 | 1987-09-14 | Toshiba Corp | Magnetic head |
| JPS62209709A (en) * | 1986-03-11 | 1987-09-14 | Toshiba Corp | Magnetic head |
| JPS63162872A (en) * | 1986-12-25 | 1988-07-06 | Nec Corp | Hard amorphous carbon film |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03160605A (en) * | 1989-11-17 | 1991-07-10 | Nissin Electric Co Ltd | Magnetic head and its production |
| JPH0442411A (en) * | 1990-06-08 | 1992-02-13 | Nissin Electric Co Ltd | Magnetic head |
| EP0597541A3 (en) * | 1992-11-13 | 1994-10-05 | Koninkl Philips Electronics Nv | Magnetic head and its manufacturing process. |
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