JPH01316978A - Ceramic superconductive memory element - Google Patents
Ceramic superconductive memory elementInfo
- Publication number
- JPH01316978A JPH01316978A JP63148577A JP14857788A JPH01316978A JP H01316978 A JPH01316978 A JP H01316978A JP 63148577 A JP63148577 A JP 63148577A JP 14857788 A JP14857788 A JP 14857788A JP H01316978 A JPH01316978 A JP H01316978A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- current
- superconductor
- superconducting
- loop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
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- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
少なくとも一部がセラミック超電導体からなる導線をも
つ超電導ループの電流を制御する記憶素子に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a memory element for controlling the current of a superconducting loop having a conductor wire at least partially made of a ceramic superconductor.
〈従来の技術〉
従来、超電導の特性を用いた記憶装置には、ジョセフソ
ン素子が用いられていた。ジョセフソン素子を接続した
ループを貫く磁束量子(フラクソイド)の有無を、記憶
状態の“1”と“0”に対応させていた。<Prior Art> Conventionally, Josephson elements have been used in memory devices that utilize the characteristics of superconductivity. The presence or absence of magnetic flux quanta (fluxoid) passing through the loop connecting the Josephson elements was made to correspond to the memory states of "1" and "0".
しかし、従来の超電導記憶装置で用いるジョセル
フノン素子はニオブか鉛、又は、それらの合金どからな
る超電導体の間に極めて薄い絶縁膜を介在させた接合を
もつ構造である。However, the Joself non-element used in conventional superconducting memory devices has a structure in which a very thin insulating film is interposed between superconductors made of niobium, lead, or alloys thereof.
〈発明が解決しようとする問題点〉
前記のジョセフソン素子で、介在させる絶縁膜は、超電
導電子をトンネル効果で通過させる数10あること、更
に、出力レベルが低いこと、極低温でないと使用できな
いことが実用化を妨げていた。<Problems to be solved by the invention> In the above-mentioned Josephson element, there are several tens of intervening insulating films that allow superconducting electrons to pass through through the tunnel effect, and furthermore, the output level is low and it cannot be used unless it is at an extremely low temperature. This hindered its practical application.
本発明は、以上のジョセフソン素子の記憶素子がもつ問
題点を解消し、製造りの問題が少なく、動作特性が優れ
、取扱が容易な超電導記憶素子を提供することを目的と
している。It is an object of the present invention to solve the above-described problems of the Josephson element memory element, and to provide a superconducting memory element that has fewer problems in manufacturing, has excellent operating characteristics, and is easy to handle.
〈問題点を解決するための手段〉
上記の目的を達成する本発明の超電導記憶素子↓
ば、少なくとその一部が、磁界の影響が太きくなる粒界
を有するセラミック超電導体で構成した超電導ループか
らなり、その粒界をもつセラミック超電導体の超電導状
態を、近接して設けられた制御用の導体線に流す電流で
発生する磁界で制御するものである。<Means for solving the problems> The superconducting memory element of the present invention which achieves the above object The superconducting state of a ceramic superconductor consisting of loops and grain boundaries is controlled by a magnetic field generated by a current flowing through a control conductor wire provided nearby.
以上の構成の超電導記憶素子に前記の粒界を有する超電
導部をはさむ位置に電源と信号検出用のリード線部を設
け、前記のセラミック超電導体部に近接して設けた導体
線の電流による磁界を作用させて、その超電導ループ内
へ磁束を蓄える書込みと、その磁束の放出で読取りと消
去動作を行なう超電導記憶装置を構成するものである。In the superconducting memory element having the above configuration, a power source and a lead wire section for signal detection are provided at positions sandwiching the superconducting section having the grain boundaries, and a magnetic field due to the current of the conductor wire provided close to the ceramic superconducting section is provided. This constitutes a superconducting memory device that performs writing by accumulating magnetic flux in the superconducting loop, and reading and erasing by releasing the magnetic flux.
〈作用〉
セラミック超電導体はその粒界の状態により、微弱な磁
界の印加によってその超電導状態が破れ第2号(198
8年発行と記載されている。本発明は、以上の特性を、
記憶素子の動作をする超電導ループのスイッチ部に応用
するものである。<Effect> Due to the state of its grain boundaries, the superconducting state of ceramic superconductors is broken by the application of a weak magnetic field.
It is stated that it was published in 1988. The present invention has the above characteristics,
It is applied to the switch section of a superconducting loop that operates as a memory element.
上記の粒界をもつセラミック超電導体からなる磁気抵抗
素子の特性の1例を、第7図に示した。An example of the characteristics of a magnetoresistive element made of a ceramic superconductor having the above grain boundaries is shown in FIG.
これは、磁界を印加しないときは電気抵抗は完全に零で
、磁界を印加して、その強さを上げると臨界磁界で発生
し、更に、印加磁界を増すと、急速に増大する電気抵抗
を示している。This means that when no magnetic field is applied, the electrical resistance is completely zero, and when a magnetic field is applied and its strength is increased, a critical magnetic field is generated, and when the applied magnetic field is further increased, the electrical resistance rapidly increases. It shows.
以上のセラミック超電導体は、従来の超電導体と異なり
極めて弱い磁界(数ガウス)で、その超−で、超電導特
有の極めて高速で超電導記憶装置に書込みと読出し及び
消去の動作を行なわせるものである。Unlike conventional superconductors, the ceramic superconductor described above uses an extremely weak magnetic field (several Gauss), which allows superconducting storage devices to perform write, read, and erase operations at extremely high speeds unique to superconductors. .
〈実施例〉 以下、図面を参照して本発明の詳細な説明する。<Example> Hereinafter, the present invention will be described in detail with reference to the drawings.
実施例で作製したセラミック超電導体は、第6図に示し
たスプレーパイロリシス法の成膜装置によるもので、安
定化ジルコニアの基板4を、ヒーター5で400℃に加
熱しておき、そこへ硝酸塩の原料y (NO3) s
@ 6H20、Ba (NO3)2及びCu(NO3)
2@ 3H20がYIBa2Cua 07−Xの元素組
成比になるよう秤量し、水溶液にして噴射装置6から断
続的にスプレーして、膜厚を約5μmにし、続いて、9
50℃で60分間と、500℃で10時間の空気中アニ
ールを行ったものである。作製した超電導体膜は、抵抗
が100Kから下がりはじめ、83にで完全な抵抗零を
示した。The ceramic superconductor produced in this example was produced using the spray pyrolysis film forming apparatus shown in FIG. Raw material y (NO3) s
@6H20, Ba (NO3)2 and Cu (NO3)
2@3H20 was weighed so as to have the elemental composition ratio of YIBa2Cua 07-X, made into an aqueous solution, and sprayed intermittently from the sprayer 6 to a film thickness of about 5 μm.
Annealing was performed in air at 50°C for 60 minutes and at 500°C for 10 hours. The resistance of the fabricated superconductor film began to decrease at 100K and reached completely zero resistance at 83K.
次に、セラミック超電導体膜を、第1図に示した超電導
記憶素子のループの部分を形成するため通常のフォトリ
ングラフィ工程と、リン酸系のエツチング液による成形
加工を行った。成形した超電導体のループは、磁界の作
用を受ける超電導体線1と、磁界の作用を受けない超電
導体線2から構成されている。Next, the ceramic superconductor film was subjected to a conventional photolithography process and molded using a phosphoric acid-based etching solution in order to form the loop portion of the superconducting memory element shown in FIG. The molded superconductor loop is composed of a superconductor wire 1 that is subjected to the action of a magnetic field and a superconductor wire 2 that is not affected by the magnetic field.
更に、電極端子a、bと、制御磁界を発生する導体線3
をTiの真空蒸着膜のリフトオフ法で作製した。作製し
たセラミック超電導体は、それを構成する粒子の粒界が
弱接合の状態で、等測的には第8図に示した多数のジョ
セフソン接合121゜121、・・・の集合体になると
考えられ麩。このセラミック超電導体は、弱い磁界の印
加によって、そのジョセフソン接合121.121・・
・から超電導状態が破れ急速に電気抵抗が増大する。Further, electrode terminals a and b, and a conductor wire 3 that generates a control magnetic field.
was produced by a lift-off method of a vacuum-deposited Ti film. The produced ceramic superconductor has weak junctions at the grain boundaries of its constituent particles, and isometrically it becomes an aggregation of a large number of Josephson junctions 121° 121, etc., as shown in Figure 8. It's considered fu. By applying a weak magnetic field, this ceramic superconductor has its Josephson junction 121, 121...
・The superconducting state is broken and the electrical resistance increases rapidly.
第1図の構成で、導体線3と、超電導体線Iの中心間距
離は50μm、各々の線幅をSOμmと50μmにした
。超電導ループの1辺は約%00μmのほぼ正方形にし
た。この導体線3にIOmAの電流を流すと超電導体線
1に04ガウスの磁界が印加され、このとき超電導体線
Iに2mAの電流を流しておくとIOmΩの抵抗を発生
したが、この超電導体
線1の超電導磁気抵抗素子としての特性を測定したのが
第2図である。この図から、超電導線1に流す電流によ
り、その磁気抵抗素子としての特性を制御できることが
分る。In the configuration shown in FIG. 1, the distance between the centers of the conductor wire 3 and the superconductor wire I was 50 μm, and the line widths of each were SO μm and 50 μm. The superconducting loop was approximately square with one side of about 00 μm. When a current of IOmA was passed through the conductor wire 3, a magnetic field of 04 Gauss was applied to the superconductor wire 1, and at this time, when a current of 2mA was passed through the superconductor wire I, a resistance of IOmΩ was generated. FIG. 2 shows the measured characteristics of wire 1 as a superconducting magnetoresistive element. From this figure, it can be seen that the characteristics of the superconducting wire 1 as a magnetoresistive element can be controlled by controlling the current flowing through the superconducting wire 1.
第1図の構成の超電導記憶素子を液体窒素温度77Kに
冷却した状態で、電極端子a−bを介して超電導線部に
#卆4mAの電流を流すとその1と2の線にそれぞれ半
分の2mAづつ流れ、第3図(a)の状態になる。続い
て、導体線3にIOmAの電流を流すと、50μm離れ
たセラミック超電導体線1に約0.4ガウスの磁界が印
加され、常電導状態になり電気抵抗をもつので、電流は
、第3れていた電源を切ると第3図(c)のように超電
導線ループに約4mAの永久電流が流れループ内に磁束
を保つ記憶素子の“書き込み”状態になった。When the superconducting memory element having the configuration shown in Fig. 1 is cooled to a liquid nitrogen temperature of 77 K, and a current of 4 mA is passed through the superconducting wire portion through electrode terminals a and b, half of the current is applied to the 1st and 2nd wires. The current flows at 2 mA each, resulting in the state shown in Fig. 3(a). Next, when a current of IOmA is passed through the conductor wire 3, a magnetic field of about 0.4 Gauss is applied to the ceramic superconductor wire 1, which is 50 μm away, and it becomes a normal conductor and has electrical resistance, so the current When the power was turned off, a persistent current of approximately 4 mA flowed through the superconducting wire loop, maintaining magnetic flux within the loop, as shown in Figure 3(c), and the memory element became in a "writing" state.
この永久電流が流れたのは、超電導ループを超電導電子
が流れる時間より、超電導線が、超電導状態に回復する
時間が早いこと、及び、超電導電子の流れを決定するイ
ンピーダンスが、電源方向より、ループ内が小さくなる
ことなどが考えられる。The reason why this persistent current flowed is that the time for the superconducting wire to recover to the superconducting state is faster than the time for superconducting electrons to flow through the superconducting loop, and the impedance that determines the flow of superconducting electrons It is possible that the inside becomes smaller.
書き込みを行った超電導ループは永久電流によって記憶
が保持される。The memory of the superconducting loop that has been written to is retained by persistent current.
以上のように書き込んだ記憶素子の読出しは、超電導ル
ープへの書き込みと逆に電極すからaの方向へ電流を流
し、超電導線1の部分の電流を臨界電流Ic以上にする
か、導体線3に電流を流し超電導線1に臨界磁界HC以
上の磁界を印加し、抵抗をもって前記の永久電流が消滅
するとき発生する遷移時に発生するパルス電圧を利用す
る破壊読出しの方法を使用した。To read the memory element written in the above manner, a current is caused to flow in the direction of the electrode a in the opposite direction to the writing to the superconducting loop, and the current in the superconducting wire 1 portion is made to be equal to or higher than the critical current Ic, or the conductor wire 3 A destructive readout method was used in which a current was applied to the superconducting wire 1 to apply a magnetic field greater than the critical magnetic field HC, and a pulse voltage generated at the transition when the persistent current disappeared due to resistance was used.
なお書き込み状態から消去状態にするときは、上記の方
法で超電導体線1に抵抗をもたせればよい。Note that when changing from the written state to the erased state, the superconductor wire 1 may be made to have resistance by the method described above.
以上の本発明は、上記の実施例の方法に限定するもので
なく、超電導体線1,2をスパッタ。The present invention described above is not limited to the method of the above embodiments, and the superconductor wires 1 and 2 are sputtered.
MOCVD又は電子ビーム蒸着法などKよるセラミック
超電導薄膜で作成してもよく、このときは加工形状の微
細化でIc、Hcを低くすることもできる。又、超電導
線1と2は別工程で作製してもよく、その線の幅を調整
すれば超電導体lと2及び、導体線3も同じ超電導膜か
ら形成することもできる。It may be formed using a ceramic superconducting thin film using K such as MOCVD or electron beam evaporation, and in this case, Ic and Hc can be lowered by miniaturizing the processed shape. Further, the superconducting wires 1 and 2 may be manufactured in separate steps, and by adjusting the width of the wires, the superconductors 1 and 2 and the conductor wire 3 can also be formed from the same superconducting film.
超電導体線1は、第4図に示したように、一部にくびれ
を作りその部分の電流密度を上げ、磁界導体線3を第5
図のようにループの内部を通して、素子面積を小さくす
る配置や、(b)及び(C)のようにその発生する磁界
を効率よく印加する構成などにしてもよ
;≠#弓第5図のように超電導線1又は2と導体線3が
積層状態になるところは、5i02などの無機、又は、
ポリイミド樹脂などの有機絶縁膜を介在させた。また、
超電導ループを構成する超電導導体導線は、導体線の磁
界で制御する部分以外は、粒界を有し磁気感度の高いセ
ラミック超電導体である必要はなく、他の超電導体、又
は、粒界が弱結合でな(Hcの高い超電導層、又はその
層との積層にしてもよい。更に磁界で制御する超電導体
部分を短かくする、超電導ループへの電源端子を超電導
体2の近くへずらすことにより、常時超電導状態の部分
でほぼそのループを構成しておけば、書き込み時その超
電導線部分がループで蓄える磁束を発生しているので、
書き込みをより確実にすることができる。読取りも、説
明した破壊 )読出しでなく光磁気効果膜を設けて光学
的に読出す方法、又は、微小磁気センサのマトリックス
を用いる方法1,1″どかある。As shown in Fig. 4, the superconductor wire 1 is made constricted in a part to increase the current density in that part, and the magnetic field conductor wire 3 is
As shown in the figure, the element area may be reduced through the inside of the loop, or as shown in (b) and (C), the generated magnetic field may be efficiently applied; The part where the superconducting wire 1 or 2 and the conductor wire 3 are layered is made of inorganic material such as 5i02, or
An organic insulating film such as polyimide resin was interposed. Also,
The superconducting conductor wire constituting the superconducting loop does not need to be a ceramic superconductor with grain boundaries and high magnetic sensitivity, except for the part controlled by the magnetic field of the conductor wire, and it is not necessary to use other superconductors or a ceramic superconductor with weak grain boundaries. It is possible to use a superconducting layer with a high Hc or a stack of such layers.Furthermore, by shortening the superconductor portion controlled by the magnetic field and shifting the power supply terminal to the superconducting loop closer to the superconductor 2. If the loop is made up of parts that are always in a superconducting state, the superconducting wire part generates magnetic flux that is stored in the loop when writing.
Writing can be made more reliable. For reading, there are two methods: instead of reading out the destruction described above, there is a method of optically reading out by providing a magneto-optical effect film, or a method of using a matrix of minute magnetic sensors.
以上のように、本発明は上記で説明した実施例に限定さ
れるものではない。As mentioned above, the present invention is not limited to the embodiments described above.
〈発明の効果〉
本発明は、超電導の特性を用いるが従来の作製が極めて
困難な極薄絶縁膜を用いるジョセフノン素子を使わず、
セラミック超電導体の粒界に容易に形成できる弱結合に
よる超電導磁気抵抗効果を用いる記憶素子であり、その
作製が容易で、入・出力も実用的な電力の大きさで耐雑
音性もよく取扱も難しくなく、更に、記録保持に電力を
要しない特徴も持たせることができる。<Effects of the Invention> The present invention utilizes the characteristics of superconductivity, but does not use a Josephnon element that uses an ultra-thin insulating film, which is extremely difficult to manufacture in the past.
It is a memory element that uses the superconducting magnetoresistive effect due to weak bonds that can be easily formed at the grain boundaries of ceramic superconductors.It is easy to manufacture, has practical input and output power, has good noise resistance, and is easy to handle. It is not difficult, and furthermore, it can be provided with the feature that no electric power is required for record keeping.
本発明の超電導記憶素子は、先に特願昭63−2952
6などで出願人の1人であるシャープ株式会社から提案
したセラミック超電導論理素子と組み合せで用いること
により超電導の極めて高速の動作を行なうデジタル回路
を構成できる。The superconducting memory element of the present invention was previously disclosed in Japanese Patent Application No. 63-2952.
By using it in combination with a ceramic superconducting logic element proposed by Sharp Corporation, one of the applicants, in No. 6, etc., it is possible to construct a digital circuit that performs extremely high-speed superconducting operations.
第1図は本発明の1実施例の構成図、第2図はセラミッ
ク超電導磁気抵抗効果の一例を示す特性図、第3図は本
発明の実施例の動作図、第4図は本発明の他の実施例の
構成図、第5図は本発明の更に他の実施例の構成図、第
6図は本発明に用いたセラミック超電導体膜の作製方法
を示した図、第7図は本発明の超電導磁気抵抗特性を示
す図、第8図は本発明の超電導体の等価回路図である。
l・・・磁界の作用をうける超電導体線、2・・・超電
導体線、3・・・導体線、4・・・基板、5・・・ヒー
ター、6・・・噴射装置。
代理人 弁理士 杉 山 毅 至(他1名):$2 図
(a) (b)
第4 図
$5 f
第6図
87図
121 +21 121第8図Fig. 1 is a block diagram of an embodiment of the present invention, Fig. 2 is a characteristic diagram showing an example of the ceramic superconducting magnetoresistive effect, Fig. 3 is an operation diagram of the embodiment of the present invention, and Fig. 4 is a diagram of the embodiment of the present invention. Fig. 5 is a block diagram of still another embodiment of the present invention, Fig. 6 is a diagram showing a method for manufacturing a ceramic superconductor film used in the present invention, and Fig. 7 is a diagram of the present invention. FIG. 8, which is a diagram showing the superconducting magnetoresistance characteristics of the invention, is an equivalent circuit diagram of the superconductor of the invention. 1... Superconductor wire subjected to the action of a magnetic field, 2... Superconductor wire, 3... Conductor wire, 4... Substrate, 5... Heater, 6... Injection device. Agent Patent attorney Takeshi Sugiyama (1 other person): $2 Figures (a) (b)
Figure 4 $5 f Figure 6 87 Figure 121 +21 121 Figure 8
Claims (1)
するセラミック超電導体で形成し、前記粒界を有するセ
ラミック超電導体の導線に近接した導体線を設け、前記
導体線に流す電流で発生する磁界の作用で前記超電導ル
ープを流れる電流を制御することを特徴とするセラミッ
ク超電導記憶素子。1. At least a part of the conductor wire of the superconductor loop is formed of a ceramic superconductor having grain boundaries, and a conductor wire is provided close to the conductor wire of the ceramic superconductor having grain boundaries, and a current is generated by flowing through the conductor wire. A ceramic superconducting memory element characterized in that a current flowing through the superconducting loop is controlled by the action of a magnetic field.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63148577A JPH01316978A (en) | 1988-06-16 | 1988-06-16 | Ceramic superconductive memory element |
| US07/365,921 US5041880A (en) | 1988-06-16 | 1989-06-14 | Logic device and memory device using ceramic superconducting element |
| CN 92102162 CN1024056C (en) | 1988-06-16 | 1989-06-16 | memory device using ceramic superconducting element |
| CN89104039A CN1020363C (en) | 1988-06-16 | 1989-06-16 | Logic Devices Using Ceramic Superconducting Elements |
| EP89306161A EP0347258B1 (en) | 1988-06-16 | 1989-06-16 | Logic device using ceramic superconducting element |
| DE68922786T DE68922786T2 (en) | 1988-06-16 | 1989-06-16 | Logical device with a ceramic superconducting element. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63148577A JPH01316978A (en) | 1988-06-16 | 1988-06-16 | Ceramic superconductive memory element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01316978A true JPH01316978A (en) | 1989-12-21 |
Family
ID=15455857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63148577A Pending JPH01316978A (en) | 1988-06-16 | 1988-06-16 | Ceramic superconductive memory element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01316978A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4195303A1 (en) * | 2021-12-13 | 2023-06-14 | Karlsruher Institut für Technologie | Nonlinear element device manufactured by using single layer evaporation |
-
1988
- 1988-06-16 JP JP63148577A patent/JPH01316978A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4195303A1 (en) * | 2021-12-13 | 2023-06-14 | Karlsruher Institut für Technologie | Nonlinear element device manufactured by using single layer evaporation |
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