JPH01320632A - Magnetic recording medium and its production - Google Patents
Magnetic recording medium and its productionInfo
- Publication number
- JPH01320632A JPH01320632A JP15347988A JP15347988A JPH01320632A JP H01320632 A JPH01320632 A JP H01320632A JP 15347988 A JP15347988 A JP 15347988A JP 15347988 A JP15347988 A JP 15347988A JP H01320632 A JPH01320632 A JP H01320632A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- film
- magnetic recording
- magnetic
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、高密度磁気記録に適する磁性薄膜を磁気記録
層とする磁気記録媒体及びその製造方法に関し、さらに
詳しくは摩擦係数が小さくて走行性に優れ、かつ耐久性
に優れた磁気記録媒体及びその製造方法に関する。Detailed Description of the Invention [Industrial Application Field] The present invention relates to a magnetic recording medium having a magnetic recording layer made of a magnetic thin film suitable for high-density magnetic recording, and a method for manufacturing the same, and more specifically relates to a magnetic recording medium suitable for high-density magnetic recording and a method for manufacturing the same. The present invention relates to a magnetic recording medium with excellent properties and durability, and a method for manufacturing the same.
[従来技術]
磁性金属薄膜を磁気記録層とする磁気記録媒体は、金属
磁性材料をスパッタリングや真空蒸着等により、ファイ
ル、ディスク等からなる基板上に波谷して作製される。[Prior Art] A magnetic recording medium having a magnetic recording layer made of a magnetic metal thin film is manufactured by depositing a metal magnetic material on a substrate made of a file, disk, etc. by sputtering, vacuum deposition, or the like.
このような磁気記録媒体は、高密度記録に適した特性を
有する。しかし、磁気ヘッドとの摩擦係数が大きくて、
摩擦や損傷を受は易すがった。また、磁性金属薄膜は、
大気により酸化を受けて、磁気特性が低下する問題を有
する。Such magnetic recording media have characteristics suitable for high-density recording. However, the coefficient of friction with the magnetic head is large,
It was susceptible to friction and damage. In addition, the magnetic metal thin film is
The problem is that magnetic properties deteriorate due to oxidation in the atmosphere.
これらの問題を解消するために、磁性金属薄膜上に保護
膜を設けること等が行われている。この保護膜としてプ
ラズマ重合膜を磁性金属膜上に設けたもの(特開昭58
−88828号、特願昭61−84966号)が提案さ
れている。しかし、これらのものでは、依然十分な摩擦
係数が得られなかった。そこで、保護膜層上に潤滑剤層
を設けたものが提案されている(特開昭59−1546
45号、特開昭62−58416号)。In order to solve these problems, methods such as providing a protective film on the magnetic metal thin film have been carried out. As this protective film, a plasma polymerized film is provided on a magnetic metal film (Japanese Unexamined Patent Publication No. 58
No. 88828 and Japanese Patent Application No. 84966/1983) have been proposed. However, with these materials, a sufficient coefficient of friction has not yet been obtained. Therefore, it has been proposed to provide a lubricant layer on the protective film layer (Japanese Patent Laid-Open No. 59-1546
No. 45, JP-A-62-58416).
[発明が解決しようとする課題]
しかし、これらの磁性金属薄膜上にプラズマ重合保護膜
を設けたもの及び更にその上に潤滑剤層を設けたもので
も、まだ摩擦係数が不十分であった1、シかも実際の使
用時に時間の経過と共に摩擦係数か上昇し耐久性を低下
する。[Problems to be Solved by the Invention] However, even with these magnetic metal thin films provided with a plasma polymerized protective film and further provided with a lubricant layer thereon, the coefficient of friction was still insufficient1. However, during actual use, the coefficient of friction increases over time, reducing durability.
本発明は、かかる点に鑑みてなされたものであり、耐摩
擦性及び耐久性に優れ、極めて良好な磁気特性を発揮す
ることができる磁気記録媒体及びその製造方法を提供す
るものである。The present invention has been made in view of these points, and provides a magnetic recording medium that is excellent in friction resistance and durability and can exhibit extremely good magnetic properties, and a method for manufacturing the same.
[課題を解決するための手段]
すなわち、本発明は、基板上に磁性膜、保護膜、潤滑剤
膜を順次積層してなる磁気記録媒体において、潤滑剤膜
を非イオン性界面活性剤で形成したことを特徴とする磁
気記録媒体である。[Means for Solving the Problems] That is, the present invention provides a magnetic recording medium in which a magnetic film, a protective film, and a lubricant film are sequentially laminated on a substrate, in which the lubricant film is formed of a nonionic surfactant. This is a magnetic recording medium characterized by the following.
また、本発明は、基板上に磁性膜を形成する工程と、該
磁性膜上にプラズマ重合膜を形成する工程と、非イオン
性界面活性剤と酸素を含んだ気体に該プラズマ重合膜、
該磁性膜を設けた前記基板を晒して該プラズマ重合膜上
に潤滑剤膜を形成する工程とを具備することを特徴とす
る磁気記録媒体の製造方法である。The present invention also includes a step of forming a magnetic film on a substrate, a step of forming a plasma polymerized film on the magnetic film, and a step of forming the plasma polymerized film on a gas containing a nonionic surfactant and oxygen.
This method of manufacturing a magnetic recording medium is characterized by comprising the step of exposing the substrate provided with the magnetic film and forming a lubricant film on the plasma polymerized film.
ここで、磁性金属薄膜の上に設けるプラズマ重合保護膜
は、反応槽内で炭化水素系有機物、ケイ素系有機物等、
更にこれら有機物に酸素、窒素、フッ素を含有したもの
をモノマーとして使用し、これにグロー放電によりプラ
ズマ重合を施して得ることができる。Here, the plasma polymerized protective film provided on the magnetic metal thin film contains hydrocarbon-based organic substances, silicon-based organic substances, etc. in the reaction tank.
Furthermore, it can be obtained by using these organic substances containing oxygen, nitrogen, and fluorine as monomers and subjecting them to plasma polymerization by glow discharge.
このモノマーとしては、一般的に知られているものを使
用できるか、得られたプラズマ重合保護膜の表面成分が
、炭素、水素、酸素により構成され、水素/炭素の元素
比が1以下、酸素/炭素の元素比が0.22以上のもの
であることが望ましい。その理由は、プラズマ重合保護
膜とその上に被着された非イオン系界面活性剤からなる
潤滑剤膜の被着度合を強固にするためである。かかる観
点からモノマーとしては、次のものが好適である。As this monomer, commonly known monomers can be used, or the surface components of the obtained plasma polymerized protective film are composed of carbon, hydrogen, and oxygen, and the elemental ratio of hydrogen/carbon is 1 or less, and oxygen It is desirable that the elemental ratio of /carbon is 0.22 or more. The reason for this is to strengthen the degree of adhesion of the plasma polymerized protective film and the lubricant film made of a nonionic surfactant deposited thereon. From this point of view, the following monomers are suitable.
すなわち、ナフタレン、アントラセン、テトラセン、ペ
ンタセン、ノキサセン、ペリレン、フェナントレン、ク
リセン、トリフェニレン、ピレン、ベンゾピレン、ビオ
ラントレン、コロネン、オペレンジフェニール、ジフェ
ニルメチン、ジベンジル、トリフェニルメタンジフェニ
ルエチレン、ジフェニルアセチン、ターフェニル等であ
る。更に、ベンゼン及びその誘導体も上述のモノマーと
して比較的良好である。Namely, naphthalene, anthracene, tetracene, pentacene, noxacene, perylene, phenanthrene, chrysene, triphenylene, pyrene, benzopyrene, violanthrene, coronene, operenediphenyl, diphenylmethine, dibenzyl, triphenylmethane diphenylethylene, diphenylacetin, terphenyl, etc. It is. Furthermore, benzene and its derivatives are also relatively good as the above-mentioned monomers.
また、これらのモノマーをプラズマ重合する際には、ア
ルゴン、ヘリウム及び酸素等のキャリアガスを併存させ
ると反応速度を増大させることができ好ましい。Further, when plasma polymerizing these monomers, it is preferable to coexist a carrier gas such as argon, helium, or oxygen because the reaction rate can be increased.
また、上述のモノマーは、昇華性固体であるので、蒸発
させるために溶融状態のモノマー中に上述のキャリアー
ガスをバブリングさせてモノマーを気化させることかで
きる。Moreover, since the above-mentioned monomer is a sublimable solid, the monomer can be vaporized by bubbling the above-mentioned carrier gas into the molten monomer.
グロー放電に際しては、電源として直流からマイクロ波
まで使用できる。この場合、例えば13.56MHzの
高周波電源を使用すると、エネルギー密度を0.2〜4
W / crj、高周波電源の出力を30〜500W
にするのが好ましい。また、この出力が100W以上で
あり、上述のモノマーを使用した場a1得られたプラズ
マ重合保護膜の元素構成が、水素/炭素の比で1以下、
酸素/炭素の比が0.22以上とすることができる。For glow discharge, power sources ranging from direct current to microwaves can be used. In this case, for example, if a 13.56 MHz high frequency power source is used, the energy density will be 0.2 to 4
W/CRJ, high frequency power supply output 30~500W
It is preferable to In addition, when this output is 100 W or more and the above-mentioned monomer is used, the elemental composition of the plasma polymerized protective film obtained is 1 or less in the hydrogen/carbon ratio,
The oxygen/carbon ratio can be 0.22 or more.
潤滑剤膜は、非イオン性の界面活性剤であり、エチレン
オキサイド系等の一般的な界面活性剤を用いることがで
きる。望ましくは、炭素数が6以上の炭化水素を含む基
を1個以上有し、かつ2個以上の水酸基を有する非イオ
ン性界面活性剤である。かかる非イオン性界面活性剤の
例としては次のものがある。The lubricant film is a nonionic surfactant, and general surfactants such as ethylene oxide can be used. Desirably, it is a nonionic surfactant having one or more groups containing a hydrocarbon having 6 or more carbon atoms and having two or more hydroxyl groups. Examples of such nonionic surfactants include:
但し、Rは、炭素数6以上の炭化水素を含んだアルキル
基もしくはアルコキシアルキル基もしくは不飽和性脂肪
族炭化水素基であり、m+ ’+ pは、1〜15
0までの整数である。However, R is an alkyl group or alkoxyalkyl group containing a hydrocarbon having 6 or more carbon atoms, or an unsaturated aliphatic hydrocarbon group, and m+ '+ p is 1 to 15
It is an integer up to 0.
この界面活性剤は、水酸基が、プラズマ重合保護膜の表
面の極性基であるカルボニル基、エーテル基、水酸基と
ファンデルバールス力により結合より、高い潤滑性が得
れるものと考えられる。It is thought that this surfactant provides high lubricity because the hydroxyl groups bond with carbonyl groups, ether groups, and hydroxyl groups, which are polar groups on the surface of the plasma-polymerized protective film, through Van der Waals forces.
この潤滑剤膜は、上述の界面活性剤を水及びアセトン、
トルエン、ヘキサン、シクロヘキサノン等の溶剤に溶か
して、スピンコード法、デイプ法、噴霧法によりプラズ
マ重合保護膜上に被着することができる。This lubricant film combines the above-mentioned surfactant with water and acetone.
It can be dissolved in a solvent such as toluene, hexane, cyclohexanone, etc. and applied onto a plasma polymerized protective film by a spin code method, a dipping method, or a spray method.
また、界面活性剤を気化させて、その蒸気にプラズマ重
合保護膜を晒して、その上に被着することもできる。更
に、好ましくは、界面活性剤のガスを酸素ガスを含むガ
スと混合して、この混合ガスにプラズマ重合保護膜を晒
すことにより、プラズマ重合保護膜に潤滑剤膜を強固に
被着されることかできる。これは、潤滑剤膜の形成時に
までプラズマ重合保護膜中に残存しているプラズマ重合
時の遊離ラジカル等の残存活性基に、酸素ガス及び/ま
たは酸素ガスと界面活性剤が付加されることにより、強
固な被着が可能となるものと考えられる。この時、界面
活性剤と酸素ガスの濃度は、界面活性剤が1%体積分率
以下、酸素ガスは10%体積分率以上が望ましく、大気
を用いることも可能である。It is also possible to vaporize the surfactant and expose the plasma polymerized protective film to the vapor and deposit it thereon. Furthermore, preferably, the lubricant film is firmly adhered to the plasma polymerized protective film by mixing the surfactant gas with a gas containing oxygen gas and exposing the plasma polymerized protective film to this mixed gas. I can do it. This is because oxygen gas and/or oxygen gas and a surfactant are added to residual active groups such as free radicals during plasma polymerization that remain in the plasma polymerized protective film until the lubricant film is formed. It is thought that strong adhesion is possible. At this time, the concentration of the surfactant and oxygen gas is preferably such that the surfactant has a volume fraction of 1% or less and the oxygen gas has a volume fraction of 10% or more, and atmospheric air can also be used.
これらの混合気体を簡単に作製するためには、ある程度
密閉された容器の内部に、大気と共に界面活性剤を放置
すれば良く、これによって界面活性剤の蒸気圧に相当す
る濃度の混合気体が得られる。この容器の内部にプラズ
マ重合保護膜までを積層した半製品を放置することによ
って、被着処理を行うことができる。また、この時の被
着処理の条件としては、室温〜200℃までの範囲の温
度を使用できるが、60〜120℃の範囲の温度が特に
好ましい。また、処理時間は、界面活性剤の種類に応じ
て60℃では9.6時間、80℃では24時間、100
℃では3時間、120℃では0.5時間程が目安である
。プラズマ重合保護膜の厚みは、50〜500人、潤滑
剤膜の厚みは、プラズマ重合保護膜の1/10〜1/3
が好ましい。In order to easily create these gas mixtures, it is sufficient to leave the surfactant together with the atmosphere inside a somewhat sealed container, and by doing so, a gas mixture with a concentration corresponding to the vapor pressure of the surfactant can be obtained. It will be done. The deposition process can be carried out by leaving the semi-finished product layered up to the plasma polymerized protective film inside this container. Further, as conditions for the adhesion treatment at this time, a temperature in the range of room temperature to 200°C can be used, but a temperature in the range of 60 to 120°C is particularly preferable. Also, depending on the type of surfactant, the treatment time is 9.6 hours at 60℃, 24 hours at 80℃, 100℃
The standard time is 3 hours at ℃, and about 0.5 hours at 120℃. The thickness of the plasma polymerized protective film is 50 to 500, and the thickness of the lubricant film is 1/10 to 1/3 of that of the plasma polymerized protective film.
is preferred.
この潤滑剤膜の厚みは、薄い方が良い。その理由は、厚
すぎると磁気記録装置を組み立てた時、運転時に磁気ヘ
ッドとの間で、盛上がり部を生じ、異常に高い摩擦係数
を示すからである。潤滑剤膜があまりに薄すぎれば潤滑
剤膜の不在部分もしくは薄すぎる部分が局部的に存在し
、所定の耐久性等を発揮できない。The thinner the thickness of this lubricant film, the better. The reason for this is that if the thickness is too thick, when the magnetic recording device is assembled, a raised portion will occur between the magnetic head and the magnetic head during operation, resulting in an abnormally high coefficient of friction. If the lubricant film is too thin, there will be localized areas where the lubricant film is absent or too thin, and the desired durability cannot be achieved.
上述の本発明に係る方法にて形成された潤滑剤膜は、潤
滑剤膜の濃度が低く、比較的長時間にて処理されるため
、極めて均一な膜厚を有し、薄い膜でも十分な耐久性等
を発揮することができるものである。The lubricant film formed by the method according to the present invention described above has a low concentration and is processed for a relatively long time, so it has an extremely uniform film thickness, and even a thin film has a sufficient thickness. It can exhibit durability, etc.
[作用]
本発明に係る磁気記録媒体によれば、ヘッドと磁気記録
媒体間に生じる接触摩擦力を小さ(する。[Function] According to the magnetic recording medium according to the present invention, the contact friction force generated between the head and the magnetic recording medium is reduced.
また、潤滑剤膜とプラズマ重合保護膜を強固に結合させ
る。この結果、長期間の使用に亘って記録媒体の表面を
良好な状態に保持できる。また、本発明方法によれば上
記のような磁気テープ装置及び磁気ディスク装置に好適
な磁気記録媒体を容易に製造できるものである。Further, the lubricant film and the plasma polymerized protective film are firmly bonded. As a result, the surface of the recording medium can be maintained in good condition over a long period of use. Further, according to the method of the present invention, a magnetic recording medium suitable for the above magnetic tape device and magnetic disk device can be easily manufactured.
[実施例] 以下、本発明の実施例について説明する。[Example] Examples of the present invention will be described below.
実施例1
3.5インチアルミ基板上にニッケルーリンをメツキし
た。次いで、これにスパッター法にてクロム及びコバル
ト合金からなる磁性薄膜−を積層したもの(積層体)を
作製した。これを容ff13(1の真空容器内に設置し
、所定の填圧状態まで真空排気した。次いで、アルゴン
ガスを0 、 I Torrの圧力まで導入した。。Example 1 A 3.5-inch aluminum substrate was plated with nickel-phosphorus. Next, a magnetic thin film made of chromium and cobalt alloy was laminated thereon by a sputtering method (a laminate). This was placed in a vacuum container with a capacity of ff13 (1) and evacuated to a predetermined filling pressure state. Then, argon gas was introduced to a pressure of 0.1 Torr.
次に、13.56MHz、200Wの高周波電力を上述
の積層体と対面電極の間に供給し、アルゴンプラズマを
発生させた。Next, a high frequency power of 13.56 MHz and 200 W was supplied between the above-mentioned laminate and the facing electrode to generate argon plasma.
これと同時に、真空容器内に設置された加熱ボ−ト上の
ジベンジル10II3を加熱蒸発させて30秒間プラズ
マ重合を行わせた。これにより約300人の均一な膜厚
でプラズマ重合保護膜を積層体上に形成させて、これを
大気に取り出した。この積層体を、小さなガラス容器に
入れられた300nの水酸基を2つ所有している非イオ
ン性界面活性剤であるポリオキシエチレンステアリルア
ミンエーテルと共に、2.eのガラス容器に入れて若干
空気が出入り可能な状態で密閉した。これを恒温槽にて
100℃、3時間加熱して潤滑剤膜を形成した。このよ
うにして得た磁気記録媒体のプラズマ重合保護膜の元素
成分比を調べたところ炭素1、水素0.9、酸素0.2
6の比率であった。At the same time, dibenzyl 10II3 on a heating boat placed in the vacuum container was heated and evaporated to perform plasma polymerization for 30 seconds. As a result, a plasma-polymerized protective film having a uniform thickness of about 300 people was formed on the laminate, and this was taken out into the atmosphere. This laminate was placed in a small glass container with polyoxyethylene stearylamine ether, a nonionic surfactant possessing two 300n hydroxyl groups.2. It was placed in a glass container (e) and sealed to allow some air to enter and exit. This was heated in a constant temperature bath at 100° C. for 3 hours to form a lubricant film. The elemental ratio of the plasma-polymerized protective film of the magnetic recording medium thus obtained was investigated: carbon: 1, hydrogen: 0.9, oxygen: 0.2.
The ratio was 6.
更に、この磁気記録媒体に磁気ヘッドを接触させて、1
0gの加重を負荷し、90rpmの回転速度で回転させ
てその動摩擦係数を測定した。3分後の動摩擦係数の値
は0.21であり、1時間後の動摩擦係数の値も0.2
1であった。Furthermore, by bringing a magnetic head into contact with this magnetic recording medium, 1
A load of 0 g was applied and the dynamic friction coefficient was measured by rotating at a rotational speed of 90 rpm. The value of the kinetic friction coefficient after 3 minutes is 0.21, and the value of the kinetic friction coefficient after 1 hour is also 0.2.
It was 1.
実施例2
実施例1のジベンジルに代えてシクロヘキサン(液体)
を使用したもののプラズマ重合保護膜の元素成分の比率
は、炭素1、水素1,4、酸素0.2であった。また、
実施例1と同様にしてハ1定した実施例2の磁気記録媒
体の動摩擦係数は、3分値で0.42.1時間値で0.
66であった。Example 2 Cyclohexane (liquid) in place of dibenzyl in Example 1
The ratio of the elemental components of the plasma polymerized protective film was 1 for carbon, 1.4 for hydrogen, and 0.2 for oxygen. Also,
The coefficient of dynamic friction of the magnetic recording medium of Example 2, which was determined in the same manner as in Example 1, was 0.42.1 for 3 minutes and 0.42 for 1 hour.
It was 66.
実施例3
実施例1のジベンジルに代えてベンゼンを用いて実施例
1と同様に磁気記録媒体を作製した。この磁気記録媒体
のプラズマ重合保護膜の元素成分の比率は、炭素1、水
素1、酸素0.22であった。また、実施例1と同様に
して測定した実施例3の磁気記録媒体の動摩擦係数は、
3分値で0.35.1時間値で0.54であった。Example 3 A magnetic recording medium was produced in the same manner as in Example 1, using benzene instead of dibenzyl. The ratio of the elemental components of the plasma polymerized protective film of this magnetic recording medium was 1 carbon, 1 hydrogen, and 0.22 oxygen. In addition, the dynamic friction coefficient of the magnetic recording medium of Example 3 measured in the same manner as Example 1 is as follows:
The 3-minute value was 0.35. The 1-hour value was 0.54.
比較例1
プラズマ重合保護膜の作製までを実施例と同様に行って
得た試料を比較例1品とした。この比較例1品の動摩擦
係数は、3分値及び1時間値ともに1以上であった。Comparative Example 1 Comparative Example 1 was a sample obtained by performing the steps up to the production of a plasma polymerized protective film in the same manner as in the examples. The coefficient of dynamic friction of this Comparative Example 1 product was 1 or more in both the 3-minute value and the 1-hour value.
比較例2
ポリオキシエチレンステアリルアミンエーテルに代えて
水酸基を所有しない化合物であるステアリン酸ブチルを
使用した意思外は、実施例1と同様にして比較例2の磁
気記録媒体を作成した。この磁気記録媒体の動摩擦係数
は、3分値で0.42.1時間値で1以上であった。Comparative Example 2 A magnetic recording medium of Comparative Example 2 was prepared in the same manner as in Example 1, except that butyl stearate, a compound having no hydroxyl group, was used in place of polyoxyethylene stearylamine ether. The coefficient of dynamic friction of this magnetic recording medium was 0.42.1 hours for 3 minutes and 1 or more.
実施例4〜6
実施例1のポリオキシエチレンステアリルアミンエーテ
ルに代えて、水酸基を1つ所有するポリオキシエチレン
ステアリルエーテルを使用して実施例4の磁気記録媒体
を作製し、また、水酸基を2つ所有するステアリン酸モ
ノグリセライドを用いて実施例5の磁気記録媒体を作製
し、更に、ソルビタン酸ステアリルを使用して実施例6
の磁気記録媒体を作製した。これらの磁気記録媒体の動
摩擦係数は下記第1表に示す通りであった。Examples 4 to 6 The magnetic recording medium of Example 4 was produced by using polyoxyethylene stearyl ether having one hydroxyl group in place of the polyoxyethylene stearylamine ether of Example 1, and also using polyoxyethylene stearyl ether having one hydroxyl group. The magnetic recording medium of Example 5 was prepared using stearic acid monoglyceride, and further, stearyl sorbitate was used to prepare the magnetic recording medium of Example 6.
A magnetic recording medium was fabricated. The dynamic friction coefficients of these magnetic recording media were as shown in Table 1 below.
実施例7
実施例1のプラズマ重合保護膜の作製までを同様に行い
、これにポリオキシエチレンステアリルアミンエーテル
をエタノールに0.02重量%溶解させ、スピンコード
により塗布し、乾燥して磁気記録媒体を得た。この磁気
記録媒体の動摩擦係数を下記第1表に併記した。Example 7 The steps up to the preparation of the plasma-polymerized protective film of Example 1 were carried out in the same manner, and polyoxyethylene stearylamine ether was dissolved in ethanol at 0.02% by weight, coated with a spin cord, and dried to form a magnetic recording medium. I got it. The coefficient of dynamic friction of this magnetic recording medium is also listed in Table 1 below.
実施例8
実施例1の恒温槽で100℃、3時間加熱する代わりに
室内放置を4ケ月間行ない、磁気記録媒体を得た。この
磁気記録媒体の動摩擦係数を下記第1表に併記した。Example 8 Instead of heating at 100° C. for 3 hours in a constant temperature bath as in Example 1, the medium was left indoors for 4 months to obtain a magnetic recording medium. The coefficient of dynamic friction of this magnetic recording medium is also listed in Table 1 below.
第 1 表
このように実施例の磁気記録媒体は、ヘッドと磁気記録
媒体間に生じる接触摩擦力を小さくすることができ、ま
た、潤滑剤膜とプラズマ重合保護膜を強固に結合させて
、繰り返しの使用によっても記録媒体の表面状態を良好
に保持できる。従って、磁気テープ装置及び磁気ディス
ク装置に極めて適当なものである。Table 1 As described above, the magnetic recording medium of the example can reduce the contact friction force generated between the head and the magnetic recording medium, and also has a strong bond between the lubricant film and the plasma polymerized protective film, so that it can be used repeatedly. The surface condition of the recording medium can also be maintained well by using. Therefore, it is extremely suitable for magnetic tape devices and magnetic disk devices.
[発明の効果]
以上説明した如く、本発明に係る磁気記録媒体及びその
製造方法によれば、耐摩擦法及び耐久性に優れて、極め
て良好な磁気特性を発揮することができる磁気記録媒体
を容易に提供できるものである。[Effects of the Invention] As explained above, according to the magnetic recording medium and the manufacturing method thereof according to the present invention, a magnetic recording medium that is excellent in friction resistance and durability and can exhibit extremely good magnetic properties can be obtained. It can be easily provided.
Claims (2)
てなる磁気記録媒体において、潤滑剤膜を非イオン性界
面活性剤で形成したことを特徴とする磁気記録媒体。(1) A magnetic recording medium comprising a magnetic film, a protective film, and a lubricant film sequentially laminated on a substrate, wherein the lubricant film is formed of a nonionic surfactant.
プラズマ重合膜を形成する工程と、非イオン性界面活性
剤と酸素を含んだ気体に該プラズマ重合膜、該磁性膜を
設けた前記基板を晒して該プラズマ重合膜上に潤滑剤膜
を形成する工程とを具備することを特徴とする磁気記録
媒体の製造方法。(2) A step of forming a magnetic film on a substrate, a step of forming a plasma polymerized film on the magnetic film, and a step of forming the plasma polymerized film and the magnetic film in a gas containing a nonionic surfactant and oxygen. A method for manufacturing a magnetic recording medium, comprising the step of exposing the provided substrate to form a lubricant film on the plasma polymerized film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15347988A JPH01320632A (en) | 1988-06-23 | 1988-06-23 | Magnetic recording medium and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15347988A JPH01320632A (en) | 1988-06-23 | 1988-06-23 | Magnetic recording medium and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01320632A true JPH01320632A (en) | 1989-12-26 |
Family
ID=15563472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15347988A Pending JPH01320632A (en) | 1988-06-23 | 1988-06-23 | Magnetic recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01320632A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57164433A (en) * | 1981-04-02 | 1982-10-09 | Fuji Photo Film Co Ltd | Magnetic recording medium and its manufacture |
| JPS6296062A (en) * | 1985-10-23 | 1987-05-02 | Yoshi Inbesutomento Kk | Fried potato food |
| JPS6486312A (en) * | 1986-05-09 | 1989-03-31 | Tdk Corp | Magnetic recording medium |
-
1988
- 1988-06-23 JP JP15347988A patent/JPH01320632A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57164433A (en) * | 1981-04-02 | 1982-10-09 | Fuji Photo Film Co Ltd | Magnetic recording medium and its manufacture |
| JPS6296062A (en) * | 1985-10-23 | 1987-05-02 | Yoshi Inbesutomento Kk | Fried potato food |
| JPS6486312A (en) * | 1986-05-09 | 1989-03-31 | Tdk Corp | Magnetic recording medium |
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