JPH01321402A - heatless reflector - Google Patents

heatless reflector

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Publication number
JPH01321402A
JPH01321402A JP63154866A JP15486688A JPH01321402A JP H01321402 A JPH01321402 A JP H01321402A JP 63154866 A JP63154866 A JP 63154866A JP 15486688 A JP15486688 A JP 15486688A JP H01321402 A JPH01321402 A JP H01321402A
Authority
JP
Japan
Prior art keywords
heat
mirror
thin film
base material
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63154866A
Other languages
Japanese (ja)
Other versions
JP2714397B2 (en
Inventor
Koichiro Tsutsui
筒井 紘一郎
Isamu Iwano
岩野 勇
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Individual
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Individual
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Priority to JP63154866A priority Critical patent/JP2714397B2/en
Publication of JPH01321402A publication Critical patent/JPH01321402A/en
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Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To obtain the non-heat reflecting mirror which is light in weight, is easy to handle, obviates softening of the base material even at a high temp. and has a good specular surface by constituting the base material of a specular surface layer consisting of specific high-purity aluminum and a base layer consisting of heat resistant aluminum. CONSTITUTION:A thin film 2 consisting of the black oxide of the element selected from the group consisting of silicon, titanium and chromium is formed on the surface of the base material 1 consisting of the clad material having the specular surface layer 1a which consists of >=99.8% high-purity aluminum and the base layer 1b which consists of the heat resistant aluminum. Multilayered reflecting films 3 which consists of alternately laminated films of transparent high-refractive index films 4-1 to 4-n and low-refractive index films 5-1 to 5-n and have IR transmittability are formed on the thin film 2 consisting of the black oxide. The mirror finishing to a high degree is possible in this way and the softening of the mirror even after long-time use is obviated. The non-heat reflecting mirror which is light in weight and easy to handle is thus obtd.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、照明器具の反射鏡に関するものである。[Detailed description of the invention] [Industrial application field] TECHNICAL FIELD The present invention relates to a reflecting mirror for a lighting device.

〔従来の技術〕[Conventional technology]

白熱電球、カーボンアークなどを光源に用いた高照度照
明器具、例えばスタジオ投光器や映写機光源部では、金
属膜又は金属板を用いた反射鏡が使われることが多いが
、この反射鏡は、赤外線もよく反射するので、被照射面
の著しい温度上昇を招いたり、照射される人に堪え難い
暑さを感じさせたりするという欠点がある。ガラスを基
材としその表面に多層反射膜を設けたいわゆるコールド
ミラー(冷光鏡)は、可視光線を反射するが赤外線は透
過する性質を持つので、金属性反射鏡のように被照射面
の温度を上昇させることはないが、金属製のもののよう
に薄くできないから、重くて扱いにくく、また破損し易
いから、安全性の点でも問題がある。
High-intensity lighting equipment that uses incandescent bulbs, carbon arcs, etc. as a light source, such as studio floodlights and projector light sources, often uses reflectors made of metal films or metal plates. Since it reflects well, it has the drawback of causing a significant temperature rise on the irradiated surface and making the person being irradiated feel unbearably hot. A so-called cold mirror, which is made of glass and has a multilayer reflective film on its surface, reflects visible light but transmits infrared rays, so unlike a metallic mirror, the temperature of the illuminated surface changes. However, since they cannot be made as thin as metal ones, they are heavy and difficult to handle, and they are easily damaged, which poses a safety problem.

このような問題を解決するため、昭和61年特許願第0
97000号には、金属またはセラミックスよりなる基
材の表面にケイ素、チタン及びクロムから成る群から選
ばれた元素の黒色酸化物の薄膜を蒸着し、該黒色酸化物
の薄膜の上に透明な高屈折率膜と低屈折率膜との交互積
層膜から成る赤外線透過性多層反射膜を形成して成る無
熱反射鏡が開示されている、このような無熱反射鏡であ
ると、赤外線透過性多層反射膜が実質的に可視光線のみ
を反射゛し、赤外線を透過させ、この透過した赤外線′
は、黒色酸化物の薄膜で吸収されて熱エネルギに変換さ
れ、この熱エネルギは基材に伝達された後、伝導又は輻
射により基材背面から放散される。上記基材としては高
純度アルミニウムが最も好ましい。基材をアルミニウム
とすると、電解研磨により容易に鏡面が得られ、コール
ドミラーよりも軽量で扱い易く、また丈夫で破…のおそ
れがないという利点を有する無熱反射鏡が得られる。
In order to solve these problems, patent application No. 0 was filed in 1986.
No. 97000, a thin film of a black oxide of an element selected from the group consisting of silicon, titanium, and chromium is deposited on the surface of a base material made of metal or ceramics, and a transparent high-temperature film is deposited on the thin film of the black oxide. A heat-free reflecting mirror is disclosed in which an infrared-transmitting multilayer reflective film is formed by alternately laminating films of refractive index films and low-refractive index films. The multilayer reflective film substantially reflects only visible light and transmits infrared rays.
is absorbed by the black oxide thin film and converted into thermal energy, which is transferred to the substrate and then dissipated from the back side of the substrate by conduction or radiation. High purity aluminum is most preferred as the base material. When aluminum is used as the base material, a mirror surface can be easily obtained by electrolytic polishing, and a heat-free reflective mirror is obtained which has the advantages of being lighter and easier to handle than a cold mirror, and being durable and free from breakage.

然しなから、上記無熱反射鏡を長時間使用すると基材が
高温となり、これが高純度アルミ“である場合には軟化
して変形し、又耐熱性の÷ルミ合金を使用すると電解研
磨等によっても鏡面仕上げが困難であるという問題点が
あった。
However, if the above-mentioned heat-free reflector is used for a long time, the base material becomes high temperature, and if it is made of high-purity aluminum, it will soften and deform, and if a heat-resistant ÷ lumi alloy is used, it will be damaged by electrolytic polishing etc. However, there was a problem in that mirror finishing was difficult.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

本発明は、叙上の問題点を解決するためなされたもので
あり、その目的とするところは、軽量で扱い易く、高温
においても基材が軟化することなく、良好な鏡面を有す
る無熱反射鏡を提供することにある。
The present invention was made to solve the above problems, and its purpose is to provide a heat-free reflective material that is lightweight and easy to handle, does not soften the base material even at high temperatures, and has a good mirror surface. It's about providing a mirror.

〔問題点を解決するための手段〕[Means for solving problems]

上記の目的は、基材の表面にケイ素、チタン及びクロム
から成る群から選ばれた元素の黒色酸化物の’IJ膜を
蒸着し、該黒色酸化物の薄膜の上に透明な高屈折率膜と
低屈折率膜との交互積層膜から成る赤外線透過性多層反
射膜を形成して成る無熱反射鏡において、上記基材が、
99.8%以上の高純度アルミニウムから成る鏡面層と
耐熱アルミニウム合金から成る基層とにより構成される
クラッド材から成ることを特徴とする上記の無熱反射鏡
によって達成し得る。
The above purpose is to deposit an 'IJ film of a black oxide of an element selected from the group consisting of silicon, titanium and chromium on the surface of a substrate, and to deposit a transparent high refractive index film on the thin film of the black oxide. In a heat-free reflecting mirror formed by forming an infrared-transmissive multilayer reflective film consisting of an alternately laminated film of and a low refractive index film, the base material is
This can be achieved by the heat-free reflecting mirror described above, which is made of a cladding material composed of a mirror layer made of 99.8% or more high-purity aluminum and a base layer made of a heat-resistant aluminum alloy.

〔作   用〕[For production]

上記の如き構成の無熱反射鏡であると、基材が、99.
8%以上の高純度アルミニウムから成る鏡面層と耐熱ア
ルミニウム合金から成る基層とにより構成されているか
ら、高純度アルミニウムから成る鏡面層は電解研磨等の
手段により高度の鏡面仕上げが可能であり、また基層は
耐熱アルミニウム合金から成るため長時間の使用によっ
ても軟化することのない優れた無熱反射鏡を提供し得る
ものである。
In the heat-free reflecting mirror configured as above, the base material is 99.
Since it is composed of a mirror layer made of 8% or more high-purity aluminum and a base layer made of a heat-resistant aluminum alloy, the mirror layer made of high-purity aluminum can be finished to a high mirror finish by means such as electrolytic polishing. Since the base layer is made of a heat-resistant aluminum alloy, it is possible to provide an excellent heat-free reflecting mirror that does not soften even after long-term use.

〔実 施 例〕〔Example〕

以下、図面を参照、しつ−本発明の構成を具体的に説明
する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of the present invention will be specifically described below with reference to the drawings.

第1図は本発明にか\る無熱反射鏡の一実施例を示す断
面図、第2図は第1図に示した無熱反射鏡の分光反射曲
線である。
FIG. 1 is a cross-sectional view showing an embodiment of a heat-free reflecting mirror according to the present invention, and FIG. 2 is a spectral reflection curve of the heat-free reflecting mirror shown in FIG. 1.

而して、本願発明にか−る無熱反射鏡の構造は、第1図
に示す如く、高純度アルミニウムから成る鏡面層1aと
耐熱アルミニウム合金から成る基層1bとを有するクラ
ッド材から成る基材lの表面に、ケイ素、チタン及びク
ロムから成る群から選ばれた元素の黒色酸化物の薄膜2
を蒸着により形成し、該黒色酸化物の薄膜2の上に透明
な高屈折率膜4−1ないし4−nと低屈折率膜5−1な
いし5−nとの交互積層膜から成る赤外線透過性多層反
射膜3を形成して成るものである。
As shown in FIG. 1, the structure of the heat-free reflecting mirror according to the present invention includes a base material made of a cladding material, which has a mirror layer 1a made of high-purity aluminum and a base layer 1b made of a heat-resistant aluminum alloy. A thin film 2 of a black oxide of an element selected from the group consisting of silicon, titanium and chromium on the surface of the
is formed by vapor deposition, and on the black oxide thin film 2, transparent high refractive index films 4-1 to 4-n and low refractive index films 5-1 to 5-n are alternately laminated. It is formed by forming a multilayer reflective film 3.

基材lは、その強度及び重量の観点から厚さ数m111
程度のものが好適であり、その鏡面層1aは例えばJI
S 114000  に規定された合金番号1080の
純度99.8%以上の高純度アルミニウム材が使用され
、これを耐熱アルミニウム合金から成る基層lb上にク
ラッド法によって一体的に結合して成るものである。基
材1の形状は放物面状など反射鏡として必要な形状に成
形されたま−のものでもよいが、必要に応してその背面
に、放熱のためのフィン又は水冷機構を設けて過度の温
度上昇を防ぐようにするのが望ましい。
The base material l has a thickness of several meters from the viewpoint of its strength and weight.
For example, the mirror layer 1a is made of JI
A high-purity aluminum material having a purity of 99.8% or more and having alloy number 1080 specified by S 114000 is used, and is integrally bonded to a base layer lb made of a heat-resistant aluminum alloy by a cladding method. The shape of the base material 1 may be a ball shaped into the shape required for a reflecting mirror, such as a paraboloid, but if necessary, fins or a water cooling mechanism for heat radiation may be provided on the back surface to avoid excessive heat dissipation. It is desirable to prevent temperature rise.

鏡面層1aの表面は電解研磨、化学研磨等の手段によっ
て鏡面仕上げが施され、その上にケイ素、チタン及びク
ロムから成る群から選ばれた元素の黒色酸化物の薄膜2
が蒸着により形成される。
The surface of the mirror layer 1a is mirror-finished by means such as electrolytic polishing or chemical polishing, and a thin film 2 of a black oxide of an element selected from the group consisting of silicon, titanium, and chromium is applied thereon.
is formed by vapor deposition.

黒色酸化物の薄膜2は、真空蒸着の常法によりケイ素、
チタン若しくはクロムの酸化物の薄膜を基材上に形成さ
せるに当り、通常の透明酸化物(SiO,、TiO2又
はCrzO:+)の薄膜を形成させる場合よりも酸素供
給量を制限することにより形成されるものである。この
黒色酸化物の薄膜の微細構造は完全に解明されてはいな
いが、漆畳で、光学顕微鏡で観察する程度では緻密なM
i織に見えるものである。その薄膜は、基材表面が完全
に隠蔽される程度の厚さ(通常150〜400nm程変
)に形成されている。
The black oxide thin film 2 is made of silicon,
When forming a thin film of titanium or chromium oxide on a substrate, the amount of oxygen supplied is more limited than when forming a thin film of normal transparent oxide (SiO, TiO2 or CrzO:+). It is something that will be done. Although the fine structure of this thin film of black oxide has not been completely elucidated, it is a lacquer mat, and when observed with an optical microscope, it shows a dense M
It looks like an i-weave. The thin film is formed to a thickness (usually varying from 150 to 400 nm) that completely covers the surface of the base material.

薄膜2としてチタンの黒色酸化物を用いる場合、制限さ
れた量の酸素を供給しながら鏡面N1aJ=にチタンを
厚さ約200nm程度となるように真空蒸着するもので
ある。
When black oxide of titanium is used as the thin film 2, titanium is vacuum-deposited on the mirror surface N1aJ= to a thickness of about 200 nm while supplying a limited amount of oxygen.

その上の赤外線透過性多層反射膜3は、黒色酸化物の薄
膜2の表面に直接形成されている。この反射膜は、通常
のコールドミラーの表面に形成されている多層反射膜と
同じものである。即ち、Si02 、T i Oz 、
M g F z 、G e等から成る透明な薄膜であっ
て、屈折率の異なるもの2種類、即ち高屈折率の膜4−
1ないし4−〇と低屈折率の膜5−1ないし5−nとを
交互に、通常11〜23層程度積層して成るものである
。そして各層の厚さは、最大反射率が波長500〜60
0nm、最適には約550nmの光において得られ且つ
多層反射膜全体についてみたときの赤外線領域における
反射率が約20%以下となるように選定されている。な
お、最大反射率を示す波長λ。と単層層厚dとの間には
、周知のd−λ。/4という関係がある。
The infrared transmitting multilayer reflective film 3 thereon is formed directly on the surface of the black oxide thin film 2. This reflective film is the same as the multilayer reflective film formed on the surface of a normal cold mirror. That is, Si02, T i Oz,
Two kinds of transparent thin films made of M g F z , Ge, etc. and having different refractive indexes, that is, high refractive index films 4-
1 to 4-0 and low refractive index films 5-1 to 5-n are alternately laminated, usually about 11 to 23 layers. The thickness of each layer has a maximum reflectance of 500 to 600 wavelengths.
It is selected so that it can be obtained with light of 0 nm, optimally about 550 nm, and the reflectance in the infrared region of the entire multilayer reflective film is about 20% or less. Note that the wavelength λ indicates the maximum reflectance. and the monolayer thickness d is the well-known d−λ. There is a relationship of /4.

図示した実施例の場合、赤外線透過性多層反射膜3は、
屈折率2.30の酸化チタン膜4−1ないし4−nと、
屈折率l、38のフッ化マグネシウム膜5−1ないし5
−nとが交互に、合計23層、真空蒸着による多層反射
膜形成の常法に従って積層されて成るものである。そし
て酸化チタン膜4−1ないし4−n及びフン化マグネシ
ウム膜5−1ないし5−nは、それらによる光の反射が
波長的400〜700nmで最大になるよう、各単層膜
厚が約550/4 nmに選ばれている。それにより、
この反射鏡の光線反射率は、第2図に示したように、可
視光線の略全領域では約80%以上であるが、波長70
0nm以上の赤外線領域では約5%以下となるような、
無熱反射鏡として優れた特性を有するものである。
In the illustrated embodiment, the infrared-transmissive multilayer reflective film 3 is
Titanium oxide films 4-1 to 4-n with a refractive index of 2.30,
Magnesium fluoride film 5-1 to 5 with refractive index l, 38
-n are alternately laminated for a total of 23 layers according to a conventional method for forming a multilayer reflective film by vacuum deposition. The titanium oxide films 4-1 to 4-n and the magnesium fluoride films 5-1 to 5-n each have a single layer thickness of about 550 nm so that the light reflection by them is maximum in the wavelength range of 400 to 700 nm. /4 nm. Thereby,
As shown in Figure 2, the light reflectance of this reflecting mirror is approximately 80% or more in almost the entire range of visible light, but
In the infrared region of 0 nm or more, it is about 5% or less,
It has excellent properties as a heat-free reflecting mirror.

[発明の効果] 本発明は狭止の如く構成されるから、本発明によるとき
は、その基材が、99.8%以上の高純度アルミニウム
から成る鏡面層と耐熱アルミニウム合金から成る基層と
により構成されており、高純度アルミニウムから成る鏡
面層は電解研磨等の手段により高度の鏡面仕上げが可能
であり、また基層は耐熱アルミニウム合金から成るため
長時間の使用によっても軟化することがなく、軽量で汲
い易い優れた無熱反射鏡を提供し得るものである。
[Effects of the Invention] Since the present invention is structured in a narrow manner, when the present invention is applied, the base material is formed by a mirror layer made of high purity aluminum of 99.8% or more and a base layer made of a heat-resistant aluminum alloy. The mirror layer made of high-purity aluminum can be polished to a high mirror finish by means such as electrolytic polishing, and the base layer is made of heat-resistant aluminum alloy, so it does not soften even after long-term use and is lightweight. This makes it possible to provide an excellent heat-free reflecting mirror that is easy to pump.

なお、本発明は狭止の実施例に限定されるものでなく、
例えば基材の形状や寸法は必要に応して種々変更し得る
ものであり、黒色酸化物の薄膜から成る反射膜の厚さ、
赤外線透過性多層反射膜の厚さや層数等は使用目的に応
じて適宜変更し得るものであり、従って、本発明はその
目的の範囲内において上記の説明から当業者が容易に推
考し得るすべての変更実施例を包摂するものである。
Note that the present invention is not limited to the narrowing example,
For example, the shape and dimensions of the base material can be changed in various ways as necessary, and the thickness of the reflective film made of a thin film of black oxide,
The thickness, number of layers, etc. of the infrared-transmissive multilayer reflective film can be changed as appropriate depending on the purpose of use, and therefore, the present invention incorporates all modifications that can be easily deduced by a person skilled in the art from the above description within the scope of its purpose. This includes the modified embodiments of .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明にか−る無熱反射鏡の一実施例を示す断
面図、第2図は第1図に示した無熱反射鏡の分光反射曲
線である。 1−−−−−−−−−−−−−−一基材1 a −−−
−−−−−−−一鏡面層Ib−−−−−−−−−・−基
層 2 −−−−−−−−−−−一黒色酸化物の薄膜3−−
−−−−一・−−−−−−一赤外線透過性多層反射膜4
−1ないし4− n  −一一一−高屈折率膜5−1な
いし5−n−m−低屈折率膜
FIG. 1 is a cross-sectional view showing an embodiment of a heat-free reflecting mirror according to the present invention, and FIG. 2 is a spectral reflection curve of the heat-free reflecting mirror shown in FIG. 1------------ One base material 1 a ---
-----------One specular layer Ib------------ Base layer 2------One black oxide thin film 3---
------1・-----1 Infrared transmitting multilayer reflective film 4
-1 to 4-n -111-high refractive index film 5-1 to 5-n-m-low refractive index film

Claims (1)

【特許請求の範囲】[Claims] 基材の表面にケイ素、チタン及びクロムから成る群から
選ばれた元素の黒色酸化物の薄膜を蒸着し、該黒色酸化
物の薄膜の上に透明な高屈折率膜と低屈折率膜との交互
積層膜から成る赤外線透過性多層反射膜を形成して成る
無熱反射鏡において、上記基材が、99.8%以上の高
純度アルミニウムから成る鏡面層と耐熱アルミニウム合
金から成る基層とにより構成されるクラッド材から成る
ことを特徴とする上記の無熱反射鏡。
A thin film of a black oxide of an element selected from the group consisting of silicon, titanium, and chromium is deposited on the surface of the substrate, and a transparent high refractive index film and a low refractive index film are formed on the black oxide thin film. In a heat-free reflecting mirror formed of an infrared-transmissive multilayer reflective film composed of alternately laminated films, the base material is composed of a mirror layer made of high-purity aluminum of 99.8% or more and a base layer made of a heat-resistant aluminum alloy. The above-mentioned heat-free reflecting mirror is made of a cladding material.
JP63154866A 1988-06-24 1988-06-24 Non-heat reflecting mirror Expired - Lifetime JP2714397B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63154866A JP2714397B2 (en) 1988-06-24 1988-06-24 Non-heat reflecting mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63154866A JP2714397B2 (en) 1988-06-24 1988-06-24 Non-heat reflecting mirror

Publications (2)

Publication Number Publication Date
JPH01321402A true JPH01321402A (en) 1989-12-27
JP2714397B2 JP2714397B2 (en) 1998-02-16

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JP63154866A Expired - Lifetime JP2714397B2 (en) 1988-06-24 1988-06-24 Non-heat reflecting mirror

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112962064A (en) * 2021-02-01 2021-06-15 国家纳米科学中心 High-temperature-resistant optical reflecting film and preparation method and application thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529454A (en) * 1975-07-14 1977-01-25 Yokohama Kiko Kk Reflection mirror manufacturing process
JPS62254104A (en) * 1986-04-28 1987-11-05 Koichiro Tsutsui Manufacturing method of heat-free reflective mirror

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529454A (en) * 1975-07-14 1977-01-25 Yokohama Kiko Kk Reflection mirror manufacturing process
JPS62254104A (en) * 1986-04-28 1987-11-05 Koichiro Tsutsui Manufacturing method of heat-free reflective mirror

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112962064A (en) * 2021-02-01 2021-06-15 国家纳米科学中心 High-temperature-resistant optical reflecting film and preparation method and application thereof

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