JPH0133940Y2 - - Google Patents
Info
- Publication number
- JPH0133940Y2 JPH0133940Y2 JP15920483U JP15920483U JPH0133940Y2 JP H0133940 Y2 JPH0133940 Y2 JP H0133940Y2 JP 15920483 U JP15920483 U JP 15920483U JP 15920483 U JP15920483 U JP 15920483U JP H0133940 Y2 JPH0133940 Y2 JP H0133940Y2
- Authority
- JP
- Japan
- Prior art keywords
- partition plate
- chamber
- exhaust gas
- nitrogen gas
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005192 partition Methods 0.000 claims description 31
- 239000007789 gas Substances 0.000 claims description 27
- 238000002485 combustion reaction Methods 0.000 claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 19
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Gas Burners (AREA)
- Incineration Of Waste (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15920483U JPS6066930U (ja) | 1983-10-14 | 1983-10-14 | 排ガス燃焼筒 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15920483U JPS6066930U (ja) | 1983-10-14 | 1983-10-14 | 排ガス燃焼筒 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6066930U JPS6066930U (ja) | 1985-05-13 |
| JPH0133940Y2 true JPH0133940Y2 (de) | 1989-10-16 |
Family
ID=30350524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15920483U Granted JPS6066930U (ja) | 1983-10-14 | 1983-10-14 | 排ガス燃焼筒 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6066930U (de) |
-
1983
- 1983-10-14 JP JP15920483U patent/JPS6066930U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6066930U (ja) | 1985-05-13 |
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