JPH0135899B2 - - Google Patents
Info
- Publication number
- JPH0135899B2 JPH0135899B2 JP7767483A JP7767483A JPH0135899B2 JP H0135899 B2 JPH0135899 B2 JP H0135899B2 JP 7767483 A JP7767483 A JP 7767483A JP 7767483 A JP7767483 A JP 7767483A JP H0135899 B2 JPH0135899 B2 JP H0135899B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- annealing
- chamber
- annealing chamber
- carriage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000137 annealing Methods 0.000 claims description 79
- 238000000034 method Methods 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 15
- 238000010791 quenching Methods 0.000 claims description 15
- 238000011144 upstream manufacturing Methods 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000006698 induction Effects 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 6
- 230000000171 quenching effect Effects 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 2
- 239000007921 spray Substances 0.000 claims 2
- 230000004323 axial length Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000004804 winding Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Heat Treatment Of Articles (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37578182A | 1982-05-06 | 1982-05-06 | |
| US375781 | 1982-05-06 | ||
| US460971 | 1983-01-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5931825A JPS5931825A (ja) | 1984-02-21 |
| JPH0135899B2 true JPH0135899B2 (ko) | 1989-07-27 |
Family
ID=23482309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7767483A Granted JPS5931825A (ja) | 1982-05-06 | 1983-05-04 | 管をスポツト焼なましするための装置及び方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5931825A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206237A (ja) * | 1985-03-08 | 1986-09-12 | Nippon Maikuronikusu:Kk | 半導体ウエハプロ−バ |
-
1983
- 1983-05-04 JP JP7767483A patent/JPS5931825A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5931825A (ja) | 1984-02-21 |
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