JPH0143705B2 - - Google Patents
Info
- Publication number
- JPH0143705B2 JPH0143705B2 JP56071152A JP7115281A JPH0143705B2 JP H0143705 B2 JPH0143705 B2 JP H0143705B2 JP 56071152 A JP56071152 A JP 56071152A JP 7115281 A JP7115281 A JP 7115281A JP H0143705 B2 JPH0143705 B2 JP H0143705B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge machining
- conductivity
- sintered body
- electric discharge
- electrical conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 19
- 238000003754 machining Methods 0.000 claims description 13
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- 238000009760 electrical discharge machining Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Conductive Materials (AREA)
- Ceramic Products (AREA)
Description
本発明は放電加工をするに充分な導電性を有し
放電加工が可能なセラミツク焼結体に関するもの
である。
近年、セラミツクスの優れた耐熱性、熱遮蔽効
果を利用したセラミツク製品をタービンエンジン
のプレードやノズル、あるいは熱交換器の部材の
如き高温構造材料として使用するための研究開発
が活発に推し進められている。しかし、これらの
セラミツクスは、その焼結体製造技術上の制約か
ら極めて単純な形状でしか得られない為、通常焼
結した後、機械的加工を施して製品を仕上げるこ
とが多い。即ちセラミツク焼結体がそのままで使
用できる場合は良いが、殆どの場合は機械加工が
必要であり、特に上述のような部材の場合は、寸
法精度や複雑形状の要求が多く、多大の時間をか
けて仕上げ加工が行われているのが現状である。
しかしながら、周知のようにセラミツク焼結体は
硬度が極めて高く又脆いためその加工は非常に困
難を極めている。
そこで本発明者らは従来のセラミツク焼結体の
このような雑加工性を改善すべく研究を重ねた結
果本発明に至つたものである。
本発明者等は、種々の加工法の中で特に放電加
工に着目し、従来放電加工は不可能と考えられた
非導電性セラミツクスに導電性を附与する方法を
種々検討した結果、非導電性のセラミツクスに導
電性の良い第二のセラミツク相を形成せしめるこ
とにより放電加工が可能な程度に導電性の良いセ
ラミツク焼結体が得られることを見出した。
非導電性セラミツクスとしては、Al2O3、
Si3N4、ZrO2、MgO等がその耐熱性、強度の点
から構造用部材として用いられている。本発明に
おいて非導電性セラミツクスとしててZrO2を使
用する。これは高温強度、耐摩耗性の点で優れて
いるためである。
そして第2相の導電性セラミツクスとしては、
TiC、TaC等の周期律表、族の炭化物、窒化
物があるがZrO2との組合せにおいてはTiCが最
適である。
この2相の組合せによつて導電性が得られる理
由として、次の2通りが考えられる。
第1に、分散された第2相粒子の全て又はその
1部がマトリツクス相の粒子と反応し、マトリツ
クス相粒子の周囲に電導性の複合相が形成される
が、この複合相が連続することによりセラミツク
ス焼結体の導電性を向上させる。
第2に、分散される第2相粒子の体積率が5%
を越える場合は、導電性第2相が互いに接触する
ことによりセラミツク焼結体の導電性が向上す
る。
上記2つの理由のうち、添加第2相の含有体積
率が少ない時は第1の効果、体積率が5%を越え
る時には、上記第1、第2の効果によつて導電性
が得られると考えられる。
上記の理由により第2相のTiCは40体積%以下
でないと放電加工に適した導電率が得られない。
放電加工性の面で種々の導電率のZrO2−TiC
焼結体について調査した結果、電気伝導度が10-3
Ω-1cm-1以上で104Ω-1cm-1以下の焼結体が加工性
が良く、仕上精度が良いことがわかつた。
放電加工が可能でも仕上精度が悪いと、更に再
研磨加工が必要となり複雑形状の加工の特徴が失
われてしまう。その点で電気伝導度が高くなり過
ぎると加工表面のチツピング現象が生じ、表面粗
度(μm、Rmax)が悪くなり再研磨が必要とな
る。
次に実施例によつて説明する。
実施例 1
ZrO2粉末に第1表に示す種々の体積率のTiC
粉末を添加後、充分に混合し、これを1350℃で30
分、200Kg/cm2の条件下で加圧焼結(ホツトプレ
ス)をして得たセラミツク焼結体について電気伝
導度を測定し、放電加工性の有無を調査した結果
第1表に示した。これにより10-3Ω-1cm-1以上の
電気伝導率のものが放電加工が可能であつた。
放電加工条件:
加工電流 0.2A
Pulse幅 1.3
休止時間 0.5
The present invention relates to a ceramic sintered body that has sufficient electrical conductivity for electric discharge machining and is capable of electric discharge machining. In recent years, research and development has been actively promoted to utilize ceramic products that utilize the excellent heat resistance and heat shielding effect of ceramics as high-temperature structural materials such as turbine engine blades and nozzles, or heat exchanger components. . However, because these ceramics can only be obtained in extremely simple shapes due to limitations in the sintered body manufacturing technology, products are often finished by mechanical processing after sintering. In other words, it is fine if the ceramic sintered body can be used as is, but in most cases machining is required. Particularly in the case of the above-mentioned parts, dimensional accuracy and complicated shapes are required, and it takes a lot of time. Currently, the finishing process is performed over and over again.
However, as is well known, ceramic sintered bodies have extremely high hardness and are brittle, making it extremely difficult to process them. Therefore, the present inventors conducted repeated research to improve the rough machinability of conventional ceramic sintered bodies, and as a result, they arrived at the present invention. The present inventors focused on electric discharge machining among various machining methods, and as a result of examining various methods of imparting conductivity to non-conductive ceramics, which were conventionally thought to be impossible to perform electric discharge machining, the inventors found that non-conductive It has been discovered that by forming a second ceramic phase with good conductivity in a sintered ceramic, a ceramic sintered body with good conductivity to the extent that electric discharge machining is possible can be obtained. Examples of non-conductive ceramics include Al 2 O 3 ,
Si 3 N 4 , ZrO 2 , MgO, etc. are used as structural members because of their heat resistance and strength. In the present invention, ZrO 2 is used as the non-conductive ceramic. This is because it has excellent high temperature strength and wear resistance. As the second phase conductive ceramics,
There are carbides and nitrides of groups in the periodic table such as TiC and TaC, but TiC is optimal in combination with ZrO 2 . There are two possible reasons why this combination of two phases provides conductivity. First, all or a portion of the dispersed second phase particles react with the matrix phase particles to form an electrically conductive composite phase around the matrix phase particles, but this composite phase is continuous. This improves the conductivity of the ceramic sintered body. Second, the volume fraction of the second phase particles to be dispersed is 5%.
When the value exceeds 1, the electrical conductivity of the ceramic sintered body is improved because the electrically conductive second phases come into contact with each other. Among the above two reasons, when the volume fraction of the added second phase is small, the first effect is obtained, and when the volume fraction exceeds 5%, the conductivity is obtained due to the first and second effects. Conceivable. For the above reasons, conductivity suitable for electrical discharge machining cannot be obtained unless the second phase TiC is 40% by volume or less. ZrO 2 −TiC with various conductivities in terms of electrical discharge machinability
As a result of investigating the sintered body, the electrical conductivity was 10 -3
It was found that sintered bodies with Ω -1 cm -1 or more and 10 4 Ω -1 cm -1 or less have good workability and finishing accuracy. Even if electric discharge machining is possible, if the finishing accuracy is poor, further re-polishing will be required, and the characteristics of machining complex shapes will be lost. If the electrical conductivity becomes too high at this point, a chipping phenomenon will occur on the machined surface, and the surface roughness (μm, Rmax) will deteriorate, requiring repolishing. Next, an example will be explained. Example 1 TiC with various volume fractions shown in Table 1 in ZrO 2 powder
After adding the powder, mix thoroughly and heat at 1350℃ for 30 minutes.
The electrical conductivity of ceramic sintered bodies obtained by hot pressing under conditions of 200 Kg/cm 2 and 200 Kg/cm 2 was measured, and the presence or absence of electrical discharge machinability was investigated. The results are shown in Table 1. As a result, electrical discharge machining was possible for materials with electrical conductivity of 10 -3 Ω -1 cm -1 or higher. Electric discharge machining conditions: Machining current 0.2A Pulse width 1.3 Pause time 0.5
【表】
実施例1においてTiCが40容積%以上でも導電
性は得られるが、本発明の目的である構造用部材
として強度が下がり、耐酸化性の点でも問題があ
り、放電加工に際しても、細いキレツが入り、精
度のよい放電加工は困難であつた。
実施例 2
共沈法によつて作成したZrO2−Y2O3(5mol%)
粉末に第2表に示す体積率のTiC粉末を添加後ボ
ールミルを用いて充分に混合し、これを真空中
1450℃で1時間200Kg/cm2の圧力下でホツトプレ
スして得た焼結体の電気伝導率を測定すると共に
放電加工性の有無を調査した結果を第2表に示し
た。10-3Ω-1cm-1以上の電気伝導率のものが可能
であつた。[Table] In Example 1, conductivity can be obtained even if TiC is 40% by volume or more, but the strength as a structural member, which is the purpose of the present invention, is lowered, there are problems in terms of oxidation resistance, and even during electrical discharge machining. There were thin nicks, making precise electrical discharge machining difficult. Example 2 ZrO 2 −Y 2 O 3 (5 mol%) prepared by coprecipitation method
After adding TiC powder with the volume percentage shown in Table 2 to the powder, it was thoroughly mixed using a ball mill, and this was mixed in a vacuum.
The electrical conductivity of the sintered body obtained by hot pressing at 1450° C. for 1 hour under a pressure of 200 kg/cm 2 was measured, and the presence or absence of electrical discharge machinability was investigated. The results are shown in Table 2. It was possible to have an electrical conductivity of 10 -3 Ω -1 cm -1 or higher.
【表】【table】
【表】【table】
Claims (1)
性のセラミツク相として容積で40%以下、5%以
上のTiCを含有して焼結体の状態で電気伝導度が
10-3Ω-1cm-1以上、104Ω-1cm-1以下の導電性を有
し放電加工が可能であることを特徴とする放電加
工が可能なセラミツク焼結体。1 The main component is non-conductive ZrO2 , and it contains less than 40% and more than 5% TiC by volume as a conductive ceramic phase, so that it has electrical conductivity in the state of a sintered body.
A ceramic sintered body capable of electric discharge machining, characterized in that it has an electrical conductivity of 10 -3 Ω -1 cm -1 or more and 10 4 Ω -1 cm -1 or less and can be subjected to electric discharge machining.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56071152A JPS57188453A (en) | 1981-05-11 | 1981-05-11 | Discharge-workable ceramic sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56071152A JPS57188453A (en) | 1981-05-11 | 1981-05-11 | Discharge-workable ceramic sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57188453A JPS57188453A (en) | 1982-11-19 |
| JPH0143705B2 true JPH0143705B2 (en) | 1989-09-22 |
Family
ID=13452342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56071152A Granted JPS57188453A (en) | 1981-05-11 | 1981-05-11 | Discharge-workable ceramic sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57188453A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59102862A (en) * | 1982-12-03 | 1984-06-14 | 工業技術院長 | Composite sintered ceramics |
| JPS59102861A (en) * | 1982-12-03 | 1984-06-14 | 工業技術院長 | Silicon carbide composite oxide sintered ceramics |
| JPS60103078A (en) * | 1983-11-09 | 1985-06-07 | 日本タングステン株式会社 | Conductive zirconia-based sintered material and its manufacturing method |
| KR900001140B1 (en) * | 1984-10-02 | 1990-02-27 | 가부시끼가이샤 히다찌세이사꾸쇼 | Thin film magnetic head slider and method of manufacturing the material |
| JPS61111969A (en) * | 1984-11-05 | 1986-05-30 | 住友電気工業株式会社 | Electrical discharge machinable conductive silicon nitride sintered body and its manufacturing method |
| JP2556888B2 (en) * | 1987-12-24 | 1996-11-27 | 日立金属株式会社 | Ceramics conductive material with less variation in electrical resistivity |
| JP3541108B2 (en) * | 1995-11-07 | 2004-07-07 | 日本特殊陶業株式会社 | Ceramic sintered body and ceramic mold |
| CN112028640B (en) * | 2020-07-27 | 2021-12-07 | 常熟理工学院 | TiC-ZrO2Preparation method of composite powder and composite fiber |
-
1981
- 1981-05-11 JP JP56071152A patent/JPS57188453A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57188453A (en) | 1982-11-19 |
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