JPH0147110B2 - - Google Patents
Info
- Publication number
- JPH0147110B2 JPH0147110B2 JP58161631A JP16163183A JPH0147110B2 JP H0147110 B2 JPH0147110 B2 JP H0147110B2 JP 58161631 A JP58161631 A JP 58161631A JP 16163183 A JP16163183 A JP 16163183A JP H0147110 B2 JPH0147110 B2 JP H0147110B2
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- winding
- battery
- power
- magnetic bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004804 winding Methods 0.000 claims description 28
- 230000001172 regenerating effect Effects 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 2
- 230000006698 induction Effects 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2380/00—Electrical apparatus
- F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Stopping Of Electric Motors (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Description
【発明の詳細な説明】
(イ) 産業上の利用分野
この発明は、磁気軸受を用いた真空ポンプ等の
真空回転装置における磁気軸受の制動制御装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION (A) Field of Industrial Application The present invention relates to a braking control device for a magnetic bearing in a vacuum rotating device such as a vacuum pump using a magnetic bearing.
(ロ) 従来技術とその問題点
真空ポンプ等の真空回転装置の高性能化に伴
い、軸受には非接触式の磁気軸受が使用されるよ
うになつた。この磁気軸受装置は、軸受用巻線に
よつて回転子を固定子に非接触状態となるように
宙に浮かせて回転させるため、磁気軸受装置への
給電停止と同時に軸受用巻線への給電を停止する
と、回転子を浮かす軸受用巻線の力が消失し、慣
性によつて回転している回転子が固定子と接触
し、回転子及び固定子が破損することになる。従
つて、停電になると制動して停止させなければな
らないが、この制動は基本的にはバツクアツプ用
バツテリにより軸受用巻線に給電し行なつてい
る。(b) Prior art and its problems With the improvement in performance of vacuum rotating devices such as vacuum pumps, non-contact magnetic bearings have come to be used as bearings. In this magnetic bearing device, the rotor is rotated in the air by the bearing winding so that it does not come in contact with the stator. Therefore, the power supply to the bearing winding is stopped at the same time as the power supply to the magnetic bearing device is stopped. When the rotor is stopped, the force of the bearing winding that lifts the rotor disappears, and the rotor rotating due to inertia comes into contact with the stator, resulting in damage to the rotor and stator. Therefore, when a power outage occurs, the motor must be braked to stop the motor, but this braking is basically carried out by supplying power to the bearing windings using a backup battery.
従来の真空回転装置は誘導電動機によつて駆動
しているため、第１図に示すように、誘導電動機
１の交流電源が遮断されると、固定子巻線２を直
流励磁して電動機を一種の同機発電機とし、二次
抵抗３を通して電流を流し制動力を発生させるも
のである。これは、回転速度に対し、制動トルク
が大きく変化する欠点がある。 Conventional vacuum rotating equipment is driven by an induction motor, so when the AC power to the induction motor 1 is cut off, the stator winding 2 is excited with DC to turn the motor into a type of state, as shown in Figure 1. This is a homogeneous generator, and current is passed through the secondary resistor 3 to generate braking force. This has the disadvantage that the braking torque varies greatly with the rotational speed.
これに対し、真空回転装置をブラシレス直流電
動機により駆動するものがある。これは、第２図
に示すように、停電時に電動機４を発電機として
作用させ、端子電圧を抵抗５で短絡し、回転子の
運動エネルギを抵抗の熱損失として吸収する制動
法が取られている。この制動法は、誘導電動機の
ようにバツクアツプ用バツテリ等の他の電源装置
を必要としない点は優れているが、回転子の運動
エネルギが無駄に消費されるという欠点がある。 On the other hand, there are devices in which the vacuum rotation device is driven by a brushless DC motor. As shown in Fig. 2, a braking method is adopted in which the motor 4 acts as a generator during a power outage, the terminal voltage is short-circuited through the resistor 5, and the kinetic energy of the rotor is absorbed as heat loss in the resistor. There is. This braking method is advantageous in that unlike induction motors, it does not require other power supplies such as backup batteries, but it has the disadvantage that the kinetic energy of the rotor is wasted.
この発明は、以上の欠点を解消するもので、磁
気軸受装置への給電が停止すると、回転子の運動
エネルギをバツクアツプ用バツテリを介して軸受
用巻線へ与えることによりバツテリ容量を小さく
することができる磁気軸受使用真空回転装置の制
動制御装置を提供することを目的とするものであ
る。 This invention solves the above-mentioned drawbacks. When the power supply to the magnetic bearing device is stopped, the battery capacity can be reduced by applying the kinetic energy of the rotor to the bearing winding via the backup battery. The object of the present invention is to provide a brake control device for a vacuum rotating device using a magnetic bearing.
(ハ) 問題点を解決するための手段
上記目的を達成するために、この発明は、軸受
用巻線と回転駆動用巻線を少なくとも備え、真空
回転装置を駆動する磁気軸受装置において、軸受
用巻線に給電するバツテリと、磁気軸受装置への
給電の停止を検出する給電停止検出器と、この給
電停止検出器からの停止信号により回転駆動用巻
線を回生制動回路を介してバツテリに接続する切
換手段とからなり、回動制動回路は回転駆動用巻
線から発生される電圧を直流電圧に変換してバツ
テリへ供給することを特徴とするものである。(C) Means for Solving the Problems In order to achieve the above object, the present invention provides a magnetic bearing device for driving a vacuum rotating device, which includes at least a bearing winding and a rotation drive winding. A battery that supplies power to the winding, a power supply stop detector that detects the stop of power supply to the magnetic bearing device, and a stop signal from this power supply stop detector connects the rotational drive winding to the battery via a regenerative braking circuit. The rotary braking circuit is characterized in that it converts the voltage generated from the rotary drive winding into a DC voltage and supplies it to the battery.
(ニ) 実施例
第３図に示すように、真空ポンプ等の真空回転
装置を駆動する磁気軸受装置１０は、回転軸１１
を回転駆動させる回転駆動用巻線１２と、回転軸
１１を浮かせる軸受用巻線１３を少なくとも備
え、真空回転装置は回転軸１１と連動する。(D) Example As shown in FIG. 3, a magnetic bearing device 10 that drives a vacuum rotating device such as a vacuum pump has a rotating shaft 11.
The vacuum rotation device is interlocked with the rotation shaft 11 and includes at least a rotation drive winding 12 that rotationally drives the rotary shaft 11 and a bearing winding 13 that floats the rotation shaft 11 .
交流電源１４は電源スイツチ１５を介してモー
タ駆動回路１６に電力を供給しており、モータ駆
動回路１６には磁気軸受装置１０へ給電している
か否かを検出するリレー１７が並列に挿入されて
いる。モータ駆動回路１６はリレー１７のメーク
接点１８1，１８2，１８3を介して回転駆動用巻
線１２に接続され、回転駆動用巻線１２はリレー
１７のブレーク接点１９1，１９2，１９3を介し
て回生制動制御回路２０に接続されている。 The AC power supply 14 supplies power to a motor drive circuit 16 via a power switch 15, and a relay 17 is inserted in parallel to the motor drive circuit 16 to detect whether or not power is being supplied to the magnetic bearing device 10. There is. The motor drive circuit 16 is connected to the rotational drive winding 12 via the make contacts 18 1 , 18 2 , 18 3 of the relay 17 , and the rotational drive winding 12 is connected to the break contacts 19 1 , 19 2 , 19 of the relay 17 . 3 to the regenerative braking control circuit 20.
また、上記交流電源１４は、交流を直流に変換
する直流電源回路２１に給電している。この直流
電源回路２１は、正、負の直流電圧を出力し、こ
の正出力端子２１ａと零出力端子２１ｂ間及び零
出力端子２１ｂと負出力端子２１ｃ間には逆流防
止用ダイオード２２ａ，２２ｂを介して正及び負
電圧を発生するバツクアツプ用バツテリ２３ａ，
２３ｂが挿入され、両バツテリ２３ａ，２３ｂが
磁気軸受制御回路２４へ給電している。この磁気
軸受制御回路２４は、図示されていないが、回転
軸１１の半径方向の位置等を検出するセンサから
の信号によつて軸受用巻線１３を制御し、回転軸
１１が所定の位置になるようにする。 The AC power supply 14 also supplies power to a DC power supply circuit 21 that converts AC into DC. This DC power supply circuit 21 outputs positive and negative DC voltages, and backflow prevention diodes 22a and 22b are connected between the positive output terminal 21a and the zero output terminal 21b and between the zero output terminal 21b and the negative output terminal 21c. a backup battery 23a that generates positive and negative voltages;
23b is inserted, and both batteries 23a, 23b are feeding power to the magnetic bearing control circuit 24. Although not shown, this magnetic bearing control circuit 24 controls the bearing winding 13 based on a signal from a sensor that detects the radial position of the rotating shaft 11, etc., so that the rotating shaft 11 is in a predetermined position. I will make it happen.
上記回生制御回路２０は、磁気軸受装置１０へ
の給電を停止した際に、回転駆動用巻線１２から
リレー１７のブレーク接点１９1，１９2，１９3
を介して供給される交流電力を所定の直流電圧に
変換し逆流防止用ダイオード２５を介してバツテ
リ２３ａ，２３ｂの直列回路へ印加している。 In the regeneration control circuit 20, when the power supply to the magnetic bearing device 10 is stopped, the rotation drive winding 12 is connected to the break contacts 19 1 , 19 2 , 19 3 of the relay 17 .
The alternating current power supplied through the converter is converted into a predetermined direct current voltage and applied to a series circuit of batteries 23a and 23b via a backflow prevention diode 25.
この発明は、以上の構成であるから、電源スイ
ツチ１５をオンするとリレー１７が作動してメー
ク接点１８1〜１８3が閉じ、回転駆動用巻線１２
はモータ駆動回路１６によつて駆動され、バツテ
リ２３ａ，２３ｂは直流電源回路２１を介して磁
気軸受制御回路２４へ給電する。この状態から、
電源スイツチ１５をオフすると、リレー１７もオ
フするからメーク接点１８1〜１８3が開き、ブレ
ーク接点１９1〜１９3が閉じ、回転駆動用巻線１
２によつて発生される電圧は、回生制動制御回路
２０を介してバツテリ２３ａ，２３ｂに供給され
る。また、ときは、バツテリ２３ａ，２３ｂへは
交流電源１４から直流電源回路２１を介して給電
されているから、回転軸１１は浮上を維持して回
転を停止する。 Since the present invention has the above configuration, when the power switch 15 is turned on, the relay 17 is activated and the make contacts 18 1 to 18 3 are closed, and the rotational drive winding 12 is turned on.
are driven by the motor drive circuit 16, and the batteries 23a, 23b supply power to the magnetic bearing control circuit 24 via the DC power supply circuit 21. From this state,
When the power switch 15 is turned off, the relay 17 is also turned off, so the make contacts 18 1 to 18 3 open, the break contacts 19 1 to 19 3 close, and the rotation drive winding 1
2 is supplied to batteries 23a and 23b via a regenerative braking control circuit 20. Further, at this time, since power is supplied to the batteries 23a and 23b from the AC power supply 14 via the DC power supply circuit 21, the rotating shaft 11 maintains its floating state and stops rotating.
次に、電源スイツチ１５がオンの状態で、停電
等によつて磁気軸受装置１０への給電が停止され
たとしても、上記のように、バツテリ２３ａ，２
３ｂへは、その蓄電エネルギだけでなく、回転駆
動用巻線１２によつて発生されるエネルギが回生
制動制御回路２０を介して供給されるから、磁気
軸受制御回路２４は従来より小容量のバツテリ２
３ａ，２３ｂで、回転軸１１が停止するまで浮上
させておくことができる。 Next, even if the power supply to the magnetic bearing device 10 is stopped due to a power outage or the like while the power switch 15 is on, the batteries 23a, 2
3b is supplied with not only the stored energy but also the energy generated by the rotary drive winding 12 via the regenerative braking control circuit 20. Therefore, the magnetic bearing control circuit 24 uses a battery with a smaller capacity than before. 2
3a and 23b, the rotating shaft 11 can be kept floating until it stops.
なお、以上の実施例において、磁気軸受装置１
０への給電の停止と、それに基づく切換えはリレ
ー１６で行なつたが、停電検出用の集積回路と、
トライアツク等の電力制御半導体素子等を用いて
もよい。 In addition, in the above embodiment, the magnetic bearing device 1
Stopping the power supply to 0 and switching based on it were performed by the relay 16, but the integrated circuit for power failure detection and
A power control semiconductor device such as a triax may also be used.
(ホ) 効果
この発明は、以上のとおり、真空回転装置を駆
動する磁気軸受装置への給電を停止すると、回転
子に発生されるエネルギを回転駆動用巻線によつ
て電力に変換し回生制動制御回路を介してバツテ
リへ供給し、このバツテリにより磁気軸受制御回
路へ給電しているから、磁気軸受制御回路へはバ
ツテリの蓄電エネルギと共に回転子のエネルギが
供給され、バツテリの容量を従来より小さくでき
るという利点がある。(e) Effect As described above, this invention provides regenerative braking by converting the energy generated in the rotor into electric power by the rotational drive winding when the power supply to the magnetic bearing device that drives the vacuum rotating device is stopped. Power is supplied to the battery via the control circuit, and this battery supplies power to the magnetic bearing control circuit, so the rotor energy is supplied to the magnetic bearing control circuit along with the battery's stored energy, making the battery capacity smaller than before. It has the advantage of being possible.
第１図及び第２図は従来例を示す説明図、第３
図はこの発明の一列を示すブロツク図である。
１０……磁気軸受装置、１１……回転軸、１２
……回転駆動用巻線、１３……軸受用巻線、１４
……交流電源、１５……電源スイツチ、１６……
モータ駆動回路、１７……リレー、１８1，１８
２，１８3……メーク接点、１９1，１９2，１９3…
…ブレーク接点、２０……回生制動回路、２１…
…直流電源回路、２２ａ，２２ｂ，２５……逆流
防止用ダイオード、２３ａ，２３ｂ……バツテ
リ、２４……磁気軸受制御回路。
Figures 1 and 2 are explanatory diagrams showing conventional examples;
The figure is a block diagram showing one sequence of the invention. 10... Magnetic bearing device, 11... Rotating shaft, 12
... Rotation drive winding, 13 ... Bearing winding, 14
... AC power supply, 15 ... Power switch, 16 ...
Motor drive circuit, 17...Relay, 18 1 , 18
2 , 18 3 ... Make contact, 19 1 , 19 2 , 19 3 ...
...Break contact, 20...Regenerative braking circuit, 21...
...DC power supply circuit, 22a, 22b, 25... Backflow prevention diode, 23a, 23b... Battery, 24... Magnetic bearing control circuit.
Claims (1)
え、真空回転装置を駆動する磁気軸受装置におい
て、軸受用巻線に給電するバツテリと、磁気軸受
装置への給電の停止を検出する給電停止検出器
と、この給電停止検出器からの停止信号により回
転駆動用巻線を回生制動回路を介してバツテリに
接続する切換手段とからなり、回生制動回路は回
転駆動用巻線から発生される電圧を直流電圧に変
換してバツテリへ供給することを特徴とする磁気
軸受使用真空回転装置の制動制御装置。1. In a magnetic bearing device that includes at least a bearing winding and a rotation drive winding and drives a vacuum rotating device, a battery that supplies power to the bearing winding and a power supply stop detection that detects a stop in power supply to the magnetic bearing device. and a switching means that connects the rotary drive winding to the battery via a regenerative braking circuit in response to a stop signal from the power supply stop detector.The regenerative braking circuit connects the voltage generated from the rotary drive winding to the battery. A braking control device for a vacuum rotating device using magnetic bearings, which converts the voltage into DC voltage and supplies it to a battery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58161631A JPS6055838A (en) | 1983-08-31 | 1983-08-31 | Brake controller of magnetic bearing using vacuum rotary machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58161631A JPS6055838A (en) | 1983-08-31 | 1983-08-31 | Brake controller of magnetic bearing using vacuum rotary machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6055838A JPS6055838A (en) | 1985-04-01 |
| JPH0147110B2 true JPH0147110B2 (en) | 1989-10-12 |
Family
ID=15738854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58161631A Granted JPS6055838A (en) | 1983-08-31 | 1983-08-31 | Brake controller of magnetic bearing using vacuum rotary machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6055838A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6333394U (en) * | 1986-08-13 | 1988-03-03 | ||
| FR2654875B1 (en) * | 1989-11-23 | 1992-03-13 | Cit Alcatel | ELECTRIC POWER SUPPLY ASSEMBLY OF A VACUUM PUMP WITH MAGNETIC BEARINGS, WITH AUXILIARY SUPPLY OF THE BEARINGS IN THE EVENT OF A CURRENT IN THE CURRENT. |
| GB2295016A (en) * | 1994-11-07 | 1996-05-15 | British Nuclear Fuels Plc | A transducer |
| KR960030515A (en) * | 1995-01-24 | 1996-08-17 | 이형도 | Active magnetic bearing system |
-
1983
- 1983-08-31 JP JP58161631A patent/JPS6055838A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6055838A (en) | 1985-04-01 |
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