JPH0151021B2 - - Google Patents
Info
- Publication number
- JPH0151021B2 JPH0151021B2 JP56056553A JP5655381A JPH0151021B2 JP H0151021 B2 JPH0151021 B2 JP H0151021B2 JP 56056553 A JP56056553 A JP 56056553A JP 5655381 A JP5655381 A JP 5655381A JP H0151021 B2 JPH0151021 B2 JP H0151021B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- lens
- electron
- magnetic field
- magnetic pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000004626 scanning electron microscopy Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 230000004075 alteration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56056553A JPS57172643A (en) | 1981-04-15 | 1981-04-15 | High-resolution scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56056553A JPS57172643A (en) | 1981-04-15 | 1981-04-15 | High-resolution scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57172643A JPS57172643A (en) | 1982-10-23 |
| JPH0151021B2 true JPH0151021B2 (fr) | 1989-11-01 |
Family
ID=13030291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56056553A Granted JPS57172643A (en) | 1981-04-15 | 1981-04-15 | High-resolution scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57172643A (fr) |
-
1981
- 1981-04-15 JP JP56056553A patent/JPS57172643A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57172643A (en) | 1982-10-23 |
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