JPH0158106U - - Google Patents
Info
- Publication number
- JPH0158106U JPH0158106U JP15424787U JP15424787U JPH0158106U JP H0158106 U JPH0158106 U JP H0158106U JP 15424787 U JP15424787 U JP 15424787U JP 15424787 U JP15424787 U JP 15424787U JP H0158106 U JPH0158106 U JP H0158106U
- Authority
- JP
- Japan
- Prior art keywords
- projection grating
- eyepiece
- epi
- illumination device
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Description
第１図は本考案の一実施例を示すブロツク図、
第２図、第３図は第１図に示す投影格子の例を示
す斜視図、第４図は投影格子の結像図である。
１…対物レンズ、２…結像レンズ、３…ハーフ
ミラー、４…照明光源、５…コンデンサーレンズ
、６…投影格子、７…集光レンズ、８…観察試料
。
FIG. 1 is a block diagram showing an embodiment of the present invention.
2 and 3 are perspective views showing examples of the projection grating shown in FIG. 1, and FIG. 4 is an imaged view of the projection grating. DESCRIPTION OF SYMBOLS 1... Objective lens, 2... Imaging lens, 3... Half mirror, 4... Illumination light source, 5... Condenser lens, 6... Projection grating, 7... Condensing lens, 8... Observation sample.
Claims (1)
落射照明装置とコンデンサーレンズ視野絞り位置
に縞状パターンを所要段差に階段状に形成させる
投影格子を備えることを特徴とする段差観察顕微
鏡。 A step observation microscope characterized by comprising an epi-illumination device incorporated between an objective lens and an eyepiece, and a projection grating that forms a striped pattern in a stepwise manner at a required step at the position of a condenser lens field stop.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15424787U JPH0158106U (en) | 1987-10-07 | 1987-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15424787U JPH0158106U (en) | 1987-10-07 | 1987-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158106U true JPH0158106U (en) | 1989-04-11 |
Family
ID=31430813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15424787U Pending JPH0158106U (en) | 1987-10-07 | 1987-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158106U (en) |
-
1987
- 1987-10-07 JP JP15424787U patent/JPH0158106U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH02121711U (en) | ||
| JPH0158106U (en) | ||
| JPH02140514U (en) | ||
| JPS62167210U (en) | ||
| JPH0221618U (en) | ||
| JPH02121710U (en) | ||
| JPS6165601U (en) | ||
| JPS62199718U (en) | ||
| JPH01115236U (en) | ||
| JPH0271816U (en) | ||
| JPH0227110U (en) | ||
| JPS6025604U (en) | colposcope | |
| JPS58186459U (en) | Surface analysis laser Raman microscope | |
| JPH0420012U (en) | ||
| JPS6335036U (en) | ||
| JPH0347537U (en) | ||
| JPH0396820U (en) | ||
| JPS6420805U (en) | ||
| JPS62199719U (en) | ||
| JPS6235338U (en) | ||
| JPS62132550U (en) | ||
| JPS62166505U (en) | ||
| JPH0210516U (en) | ||
| JPH0316115U (en) | ||
| JPS59143043U (en) | reticle alignment device |