JPH0158935U - - Google Patents
Info
- Publication number
- JPH0158935U JPH0158935U JP1987155027U JP15502787U JPH0158935U JP H0158935 U JPH0158935 U JP H0158935U JP 1987155027 U JP1987155027 U JP 1987155027U JP 15502787 U JP15502787 U JP 15502787U JP H0158935 U JPH0158935 U JP H0158935U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- developing device
- wafer
- ultrasonic vibrator
- attaches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155027U JPH0158935U (de) | 1987-10-09 | 1987-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155027U JPH0158935U (de) | 1987-10-09 | 1987-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158935U true JPH0158935U (de) | 1989-04-13 |
Family
ID=31432281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987155027U Pending JPH0158935U (de) | 1987-10-09 | 1987-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158935U (de) |
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1987
- 1987-10-09 JP JP1987155027U patent/JPH0158935U/ja active Pending