JPH0159865U - - Google Patents
Info
- Publication number
- JPH0159865U JPH0159865U JP15560587U JP15560587U JPH0159865U JP H0159865 U JPH0159865 U JP H0159865U JP 15560587 U JP15560587 U JP 15560587U JP 15560587 U JP15560587 U JP 15560587U JP H0159865 U JPH0159865 U JP H0159865U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- sensor
- optical fibers
- spatial filter
- illumination section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
第１図は本考案の一実施例の説明図、第２図お
よび第３図は上記一実施例の特性図、第４図は従
来の装置の説明図、第５図および第６図は上記従
来の装置の特性図である。
１ａ，１ｂ，１ｃ，１ｄ，１ｅ，１ｆ，１ｇ，
１ｈ，１ｉ，１ｊ，１ｋ……レテイクル、２……
光フアイバ、３ａ，３ｂ，３ｃ，３ｄ，３ｅ，３
ｆ，３ｇ，３ｈ，３ｉ，３ｊ，３ｋ……照明部、
４……保護管。
Fig. 1 is an explanatory diagram of one embodiment of the present invention, Figs. 2 and 3 are characteristic diagrams of the above embodiment, Fig. 4 is an explanatory diagram of the conventional device, and Figs. 5 and 6 are the above-mentioned characteristics. FIG. 2 is a characteristic diagram of a conventional device. 1a, 1b, 1c, 1d, 1e, 1f, 1g,
1h, 1i, 1j, 1k... Reticle, 2...
Optical fiber, 3a, 3b, 3c, 3d, 3e, 3
f, 3g, 3h, 3i, 3j, 3k... lighting section,
4... Protection tube.
Claims (1)
レテイクルと平板状の光を照射する照明部とから
なり、上記レテイクルと照明部とが交互に配置さ
れた空間フイルタ用センサにおいて、上記レテイ
クルを構成する光フアイバの本数を上記センサの
中央部のレテイクル程多くし両端部のレテイクル
程少なくしたことを特徴とする空間フイルタ用セ
ンサ。 In the spatial filter sensor, the reticle is composed of a reticle formed by arranging a plurality of optical fibers in a line and an illumination section that irradiates flat light, and the reticle and the illumination section are arranged alternately. A sensor for a spatial filter, characterized in that the number of optical fibers is increased as the reticle at the center of the sensor increases, and decreases as the reticle at both ends of the sensor increases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15560587U JPH0159865U (en) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15560587U JPH0159865U (en) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0159865U true JPH0159865U (en) | 1989-04-14 |
Family
ID=31433381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15560587U Pending JPH0159865U (en) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0159865U (en) |
-
1987
- 1987-10-13 JP JP15560587U patent/JPH0159865U/ja active Pending