JPH0160540U - - Google Patents

Info

Publication number
JPH0160540U
JPH0160540U JP15621187U JP15621187U JPH0160540U JP H0160540 U JPH0160540 U JP H0160540U JP 15621187 U JP15621187 U JP 15621187U JP 15621187 U JP15621187 U JP 15621187U JP H0160540 U JPH0160540 U JP H0160540U
Authority
JP
Japan
Prior art keywords
side plate
opening
closing mechanism
storage container
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15621187U
Other languages
English (en)
Other versions
JPH0719151Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987156211U priority Critical patent/JPH0719151Y2/ja
Publication of JPH0160540U publication Critical patent/JPH0160540U/ja
Application granted granted Critical
Publication of JPH0719151Y2 publication Critical patent/JPH0719151Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図イ，ロおよびハは、本考案の一実施例の
構成を示す正面図、側面図、第２図はカセツトケ
ースを示す斜視図である。 ５…収納容器、６…側板、９…開閉機構、１６
…パツキン、２１…固定レバー、２３…連結部材
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 多面体に形成され、搬送物を収納するための収
    納容器において、一側板を開閉自在に支持する開
    閉機構と、前記一側板に隣接した他面板に回動自
    在に取り付けられ、前記一側板に係合／離脱可能
    な固定手段と、前記一側板の内面周囲に取り付け
    られた密封用のパツキンとを具備してなる収納容
    器であつて、搬送台車に取り外し自在に取り付け
    られたことを特徴とする搬送装置の収納容器。
JP1987156211U 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器 Expired - Lifetime JPH0719151Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987156211U JPH0719151Y2 (ja) 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987156211U JPH0719151Y2 (ja) 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器

Publications (2)

Publication Number Publication Date
JPH0160540U true JPH0160540U (ja) 1989-04-17
JPH0719151Y2 JPH0719151Y2 (ja) 1995-05-01

Family

ID=31434544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987156211U Expired - Lifetime JPH0719151Y2 (ja) 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器

Country Status (1)

Country Link
JP (1) JPH0719151Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57126144A (en) * 1981-01-29 1982-08-05 Toshiba Corp Conveying method for wafer
JPS60160539U (ja) * 1984-04-02 1985-10-25 ソニー株式会社 半導体ウエハ等収納容器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57126144A (en) * 1981-01-29 1982-08-05 Toshiba Corp Conveying method for wafer
JPS60160539U (ja) * 1984-04-02 1985-10-25 ソニー株式会社 半導体ウエハ等収納容器

Also Published As

Publication number Publication date
JPH0719151Y2 (ja) 1995-05-01

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