JPH0160541U - - Google Patents
Info
- Publication number
- JPH0160541U JPH0160541U JP15657887U JP15657887U JPH0160541U JP H0160541 U JPH0160541 U JP H0160541U JP 15657887 U JP15657887 U JP 15657887U JP 15657887 U JP15657887 U JP 15657887U JP H0160541 U JPH0160541 U JP H0160541U
- Authority
- JP
- Japan
- Prior art keywords
- holding frame
- wafer
- frame member
- wafer carrier
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15657887U JPH0314048Y2 (2) | 1987-10-12 | 1987-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15657887U JPH0314048Y2 (2) | 1987-10-12 | 1987-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160541U true JPH0160541U (2) | 1989-04-17 |
| JPH0314048Y2 JPH0314048Y2 (2) | 1991-03-28 |
Family
ID=31435244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15657887U Expired JPH0314048Y2 (2) | 1987-10-12 | 1987-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0314048Y2 (2) |
-
1987
- 1987-10-12 JP JP15657887U patent/JPH0314048Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0314048Y2 (2) | 1991-03-28 |
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