JPH0161170B2 - - Google Patents

Info

Publication number
JPH0161170B2
JPH0161170B2 JP22746282A JP22746282A JPH0161170B2 JP H0161170 B2 JPH0161170 B2 JP H0161170B2 JP 22746282 A JP22746282 A JP 22746282A JP 22746282 A JP22746282 A JP 22746282A JP H0161170 B2 JPH0161170 B2 JP H0161170B2
Authority
JP
Japan
Prior art keywords
probe
pedestal
detection
vibration detection
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22746282A
Other languages
Japanese (ja)
Other versions
JPS59120923A (en
Inventor
Minoru Nomura
Yoshuki Kitamura
Tsutomu Watanabe
Noburo Tanii
Keizo Myake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP22746282A priority Critical patent/JPS59120923A/en
Publication of JPS59120923A publication Critical patent/JPS59120923A/en
Publication of JPH0161170B2 publication Critical patent/JPH0161170B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】 本発明は機械装置などの回転部の振動を検出す
る振動検出プローブに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vibration detection probe that detects vibrations of a rotating part of a mechanical device or the like.

振動検出プローブには各機械に固定する固定方
式と持ち運び可能な可搬方式とあり、また検出セ
ンサとして動電形・圧電形などがあるが、本発明
は特に圧電素子を用いた可搬形の振動検出プロー
ブにかゝわる。第1図は従来の振動検出プローブ
の正面断面図である。この振動検出プローブは探
触針と検出部とホルダー部とから構成されてい
る。探触針1は円錐状をなし、その基部のフラン
ジ部分にはねじ2が刻設され、その上面に台座3
が一体的に固着されている。二つの圧電振動子
4,4′を電極板10を介して接合した圧電素子
が負荷質量9と検出部筐体5の内側底面との間に
ねじにより螺着され、さらにこの検出部筐体5が
ねじ6により前記台座3に螺着されている。ホル
ダー部7は検出部筐体5を覆うように探触針1の
フランジ部分でねじ2により螺着されている。探
触針1の先端部を振動している被検出体に当接す
ると負荷質量9が振動することにより圧電振動子
4,4′に生じた電圧信号は電極板10からのリ
ード線と検出部筐体5とを経てケーブル8により
計測器本体(図示しない)に導かれる。この振動
検出プローブは第2図の振動共振特性に示すよう
に複数個の共振点をもつている。同図でaは探触
針1の先端部と被検出体との接触に起因する接触
共振であり、bは検出部筐体5と台座3との接触
に起因する接触共振である。cは縦共振と呼ばれ
るもので、探触針1の形状・寸法・材質によりき
まるものである。振動検出プローブはbの接触共
振を利用して感度をたかめ振動検出を行なう。し
かしこの接触共振は接触面の状態で個々に異な
り、ねじ6の締付けトルクにより移動する。また
隣接する縦共振との結合共振により共振点附近の
周波数特性が微妙にかわる。従つて個々の振動検
出プローブごとに出力が変わり較正を要するとい
う欠点があつた。
There are two types of vibration detection probes: a fixed type that is fixed to each machine and a portable type that can be carried around.Also, there are electrodynamic types and piezoelectric types as detection sensors. Relating to detection probes. FIG. 1 is a front sectional view of a conventional vibration detection probe. This vibration detection probe is composed of a probe needle, a detection section, and a holder section. The probe needle 1 has a conical shape, a screw 2 is carved in the flange part of its base, and a pedestal 3 is provided on the top surface of the probe needle 1.
are integrally fixed. A piezoelectric element in which two piezoelectric vibrators 4 and 4' are joined together via an electrode plate 10 is screwed between the load mass 9 and the inner bottom surface of the detection unit housing 5, and is further screwed into the detection unit housing 5. is screwed onto the base 3 with screws 6. The holder part 7 is screwed onto the flange portion of the probe needle 1 with screws 2 so as to cover the detection part housing 5 . When the tip of the probe 1 comes into contact with a vibrating object to be detected, the load mass 9 vibrates, and the voltage signal generated in the piezoelectric vibrators 4 and 4' is transmitted to the lead wire from the electrode plate 10 and the detection section. The cable 8 passes through the housing 5 and is guided to the main body of the measuring instrument (not shown). This vibration detection probe has a plurality of resonance points, as shown in the vibration resonance characteristics of FIG. In the figure, a indicates contact resonance caused by the contact between the tip of the probe 1 and the object to be detected, and b indicates contact resonance caused by the contact between the detection unit housing 5 and the pedestal 3. c is called longitudinal resonance, and is determined by the shape, dimensions, and material of the probe needle 1. The vibration detection probe uses contact resonance b to increase sensitivity and perform vibration detection. However, this contact resonance differs depending on the condition of the contact surface, and moves depending on the tightening torque of the screw 6. Furthermore, the frequency characteristics near the resonance point change slightly due to coupled resonance with adjacent longitudinal resonances. Therefore, there was a drawback that the output varied for each vibration detection probe and calibration was required.

本発明の目的は上記の欠点を除去し、構造上安
定な、信頼のできる測定が可能な振動検出プロー
ブを提供することにある。
The object of the present invention is to eliminate the above-mentioned drawbacks and to provide a vibration detection probe which is structurally stable and allows reliable measurements.

本発明による振動検出プローブは探触針と検出
部とホルダー部とからなり、探触針が外周に周溝
を有する台座と一体構造をなし、前記台座に検出
部の圧電素子が締付けねじにより直接装着されて
いることを特徴とする。
The vibration detection probe according to the present invention consists of a probe needle, a detection part, and a holder part, and the probe needle has an integral structure with a pedestal having a circumferential groove on the outer periphery, and the piezoelectric element of the detection part is directly attached to the pedestal by a tightening screw. It is characterized by being installed.

以下図面を参照して本発明を詳しく説明する。
第3図が本発明の一実施例の正面断面図である。
基部のフランジ部分にねじ102が刻設されてい
る探触針101は台座103と一体構造になつて
いる。圧電振動子104,104′負荷質量10
5よりなる検出部の圧電素子は、第1図のように
筐体に組込まず、直接に締付けねじ106で前記
台座103に螺着されている。ホルダー部は探触
針101のフランジ部分にねじ102により螺着
された金属円筒カバー111とそれに螺合する円
筒カバー112との二段構造になつている。第1
図の従来例では筐体が検出部からの電圧信号の一
の伝達路であつたが、本発明の構造ではホルダー
部の金属円筒カバー111と、前記の二つの円筒
カバー111,112の間隙に押圧力をうけて挾
持されている金属性のコネクタ保持板110とが
伝達路になる。すなわち圧電振動子104,10
4′には極性を異にする電圧が発生し、台座10
3、金属円筒カバー111、コネクタ保持板11
0を経てコネクタ109でケーブルのシールド線
に伝達される。圧電振動子104,104′を区
画する電極板107はリード線によりコネクタ1
09でケーブル108の芯線に連結されている。
The present invention will be described in detail below with reference to the drawings.
FIG. 3 is a front sectional view of one embodiment of the present invention.
The probe needle 101, which has a screw 102 carved into the flange portion of its base, has an integral structure with a pedestal 103. Piezoelectric vibrator 104, 104' load mass 10
The piezoelectric element of the detection section 5 is not assembled into the housing as shown in FIG. 1, but is directly screwed onto the base 103 with a tightening screw 106. The holder part has a two-tiered structure including a metal cylindrical cover 111 screwed onto the flange portion of the probe needle 101 with screws 102 and a cylindrical cover 112 screwed onto the metal cylindrical cover 111. 1st
In the conventional example shown in the figure, the casing was one transmission path for the voltage signal from the detection section, but in the structure of the present invention, the metal cylindrical cover 111 of the holder section and the gap between the two cylindrical covers 111 and 112 are The metallic connector holding plate 110, which is held under pressure, serves as a transmission path. That is, piezoelectric vibrators 104, 10
4', voltages with different polarities are generated, and the pedestal 10
3. Metal cylindrical cover 111, connector holding plate 11
0 and is transmitted to the shield wire of the cable at the connector 109. The electrode plate 107 that partitions the piezoelectric vibrators 104 and 104' is connected to the connector 1 by a lead wire.
09 is connected to the core wire of the cable 108.

台座103は外周に周溝113が設けられてい
る。図では周溝113の位置が台座の下方で探触
針101のフランジ部分と接するところにある
が、これより上方においてもよい。
A circumferential groove 113 is provided on the outer periphery of the pedestal 103. In the figure, the position of the circumferential groove 113 is below the pedestal and in contact with the flange portion of the probe needle 101, but it may be located above this.

上記の構造によりこの振動検出プローブの共振
特性が著しく改善される。まず検出部は締付けね
じ106で直接に台座103に螺着しているか
ら、従来例の筐体と台座との接触に起因する第2
図に示したbの接触共振はなくなる。そして本発
明ではcの縦共振を利用して振動検出を行なうの
であるが、縦共振は探触針101と台座103と
の一体構造の形状・寸法・材質で設計によりきま
るものであるから、信頼度の高い振動検出データ
が得られる。ただし上記の構造では圧電振動子1
04,104′の位置が探触針101のフランジ
部分に極めて近くなつているから、振動計測の際
いわゆるベース歪に起因するノイズが発生する。
すなわち計測の際、全体がゴムカバー114で保
護されたプローブを手で把握し、探触針101を
被測定回転部に垂直に保持し測定するが、このと
きの手によるプローブ把握力は極めて大きく、ま
たホルダー部は一部金属円筒カバー111である
から外力の伝達が大きいので検出出力(ノイズ)
が生ずるのである。しかし本発明による構造では
台座103の下部に周溝113を設けることによ
つて有効にベース歪を減少させている。第4図に
周溝113の効果を実験的に検討した結果を示し
ている。周溝部直径と台座直径との比を0.5程度
にすればベース歪による外力による出力は周溝を
設けない場合の10%程度となり1万Gの衝撃を与
えても問題にならない程度になる。このように周
溝113を設けることで外部よりの力の伝達路が
実効的に増大した効果を得る。
The above structure significantly improves the resonance characteristics of this vibration detection probe. First, since the detection unit is screwed directly onto the pedestal 103 with the tightening screw 106, the second
The contact resonance b shown in the figure disappears. In the present invention, vibration detection is performed using the longitudinal resonance of c. However, since the longitudinal resonance is determined by the design of the integral structure of the probe 101 and the pedestal 103, the shape, dimensions, and material are determined by the design. Highly accurate vibration detection data can be obtained. However, in the above structure, piezoelectric vibrator 1
Since the positions of 04 and 104' are extremely close to the flange portion of the probe needle 101, noise due to so-called base distortion occurs during vibration measurement.
That is, during measurement, the probe, which is entirely protected by the rubber cover 114, is grasped by hand, and the probe needle 101 is held perpendicular to the rotating part to be measured. Also, since the holder part is partially made of a metal cylindrical cover 111, the transmission of external force is large, so the detection output (noise) is
occurs. However, in the structure according to the present invention, the base distortion is effectively reduced by providing the circumferential groove 113 in the lower part of the pedestal 103. FIG. 4 shows the results of an experimental study on the effect of the circumferential groove 113. If the ratio of the circumferential groove diameter to the pedestal diameter is set to about 0.5, the output due to external force due to base distortion will be about 10% of that in the case where no circumferential groove is provided, and it will not be a problem even if an impact of 10,000 G is applied. By providing the circumferential groove 113 in this manner, an effect is obtained in which the transmission path for external force is effectively increased.

以上説明したように、本発明による振動検出プ
ローブは探触針および台座の構造・寸法・材質等
によりきまる一意的な縦共振を利用し、また台座
に周溝を設け外力の伝達を防ぎベース歪によるノ
イズを減少することで、プローブを手で把持し振
動計測するに最も適した構造となつている。また
圧電素子を筐体に封入せず直接に台座に固定する
ことからプローブ全体として従来例に比し小形化
され振動計測時の把握が容易である利点を有す
る。
As explained above, the vibration detection probe according to the present invention utilizes unique longitudinal resonance determined by the structure, dimensions, materials, etc. of the probe needle and pedestal, and also has a circumferential groove in the pedestal to prevent transmission of external force and to prevent base distortion. By reducing noise caused by vibration, the structure is most suitable for holding the probe in the hand and measuring vibrations. Furthermore, since the piezoelectric element is not enclosed in a housing and is directly fixed to the pedestal, the probe as a whole has the advantage of being smaller in size than the conventional example and being easier to grasp when measuring vibrations.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の振動検出プローブの正面断面
図、第2図は第1図のプローブの振動共振特性を
示す図、第3図は本発明の一実施例の正面断面
図、第4図はベース歪に関する実験データを示す
図である。 101……探触針、102,106……ねじ、
103……台座、104,104′……圧電振動
子、105……負荷質量、107……電極板、1
08……ケーブル、109……コネクタ、110
……コネクタ保持板、111……金属円筒カバ
ー、112……円筒カバー、113……周溝、1
14……ゴムカバー。
FIG. 1 is a front sectional view of a conventional vibration detection probe, FIG. 2 is a diagram showing the vibration resonance characteristics of the probe in FIG. 1, FIG. 3 is a front sectional view of an embodiment of the present invention, and FIG. FIG. 3 is a diagram showing experimental data regarding base distortion. 101... Probe needle, 102, 106... Screw,
103... Pedestal, 104, 104'... Piezoelectric vibrator, 105... Load mass, 107... Electrode plate, 1
08...Cable, 109...Connector, 110
... Connector holding plate, 111 ... Metal cylindrical cover, 112 ... Cylindrical cover, 113 ... Circumferential groove, 1
14...Rubber cover.

Claims (1)

【特許請求の範囲】[Claims] 1 探触針と検出部とホルダー部とからなる振動
検出プローブにおいて、探触針が外周に周溝を有
する台座と一体構造をなし、前記台座に検出部の
圧電素子が締付けねじにより直接装着されている
ことを特徴とする振動検出プローブ。
1 In a vibration detection probe consisting of a probe needle, a detection part, and a holder part, the probe needle has an integral structure with a pedestal having a circumferential groove on the outer periphery, and a piezoelectric element of the detection part is directly attached to the pedestal with a tightening screw. A vibration detection probe characterized by:
JP22746282A 1982-12-28 1982-12-28 Oscillation detecting probe Granted JPS59120923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22746282A JPS59120923A (en) 1982-12-28 1982-12-28 Oscillation detecting probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22746282A JPS59120923A (en) 1982-12-28 1982-12-28 Oscillation detecting probe

Publications (2)

Publication Number Publication Date
JPS59120923A JPS59120923A (en) 1984-07-12
JPH0161170B2 true JPH0161170B2 (en) 1989-12-27

Family

ID=16861248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22746282A Granted JPS59120923A (en) 1982-12-28 1982-12-28 Oscillation detecting probe

Country Status (1)

Country Link
JP (1) JPS59120923A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7319692B2 (en) * 2021-02-08 2023-08-02 株式会社ミヤワキ Measuring device and its manufacturing method
JP7411237B2 (en) * 2021-02-09 2024-01-11 株式会社ミヤワキ Vibration probes and measurement equipment

Also Published As

Publication number Publication date
JPS59120923A (en) 1984-07-12

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