JPH0163131U - - Google Patents
Info
- Publication number
- JPH0163131U JPH0163131U JP1987156797U JP15679787U JPH0163131U JP H0163131 U JPH0163131 U JP H0163131U JP 1987156797 U JP1987156797 U JP 1987156797U JP 15679787 U JP15679787 U JP 15679787U JP H0163131 U JPH0163131 U JP H0163131U
- Authority
- JP
- Japan
- Prior art keywords
- spinner head
- wafer
- pin
- pin support
- pins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Description
第１図ａは本考案によるスピナーヘツドの平面
図、第１図ｂは本考案によるスピナーヘツドの側
面図、第２図ａは従来のスピナーヘツドの平面図
、第２図ｂは従来のスピナーヘツドの側面図、第
３図は本考案のスピナー回転時のピンの傾きを示
す説明図、第４図ａは本考案のピン部の拡大平面
図、第４図ｂは本考案のピン部の拡大側面図であ
る。
１０…スピナーヘツド、１１…固定ピン、１２
…突起、２０…ウエハ、２０ａ…ウエハ表面、２
０ｂ…ウエハ裏面、１００…スピナーヘツド、１
０１…ピン、１０２…突起、１０３…ピン支え、
１０４…重錘。
FIG. 1a is a plan view of a spinner head according to the present invention, FIG. 1b is a side view of a spinner head according to the present invention, FIG. 2a is a plan view of a conventional spinner head, and FIG. 2b is a conventional spinner head. 3 is an explanatory diagram showing the inclination of the pin when the spinner of the present invention rotates, FIG. 4a is an enlarged plan view of the pin portion of the present invention, and FIG. 4b is an enlarged view of the pin portion of the present invention. FIG. 10...Spinner head, 11...Fixing pin, 12
...Protrusion, 20...Wafer, 20a...Wafer surface, 2
0b...Back side of wafer, 100...Spinner head, 1
01...pin, 102...protrusion, 103...pin support,
104... Weight.
Claims (1)
複数個の突起を有し、ウエハ外周部に近接しウエ
ハを取囲みウエハ上面にまで延長した複数個のピ
ンを有するスピナーヘツドにおいて、前記ピンは
スピナーヘツド側面に設けた切込みの該スピナー
ヘツド上面の近傍に設けたピン支えを中心に揺動
出来るように支持され、且、前記ピン支えより下
側のピン部は前記ピン支えより上側のピン部の重
量より重い重錘を取付けたことを特徴とするスピ
ナーヘツド。 In a spinner head that has a plurality of protrusions on the top surface of the spinner head for placing a wafer, and a plurality of pins that are close to the outer periphery of the wafer, surround the wafer, and extend to the top surface of the wafer, the pins are attached to the spinner head. The spinner head is supported so as to be able to swing around a pin support provided near the upper surface of the spinner head in the notch provided on the side surface, and the pin portion below the pin support has the weight of the pin portion above the pin support. A spinner head featuring a heavier weight attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987156797U JPH0163131U (en) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987156797U JPH0163131U (en) | 1987-10-15 | 1987-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163131U true JPH0163131U (en) | 1989-04-24 |
Family
ID=31435662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987156797U Pending JPH0163131U (en) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163131U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02278713A (en) * | 1989-04-19 | 1990-11-15 | Tokyo Electron Ltd | Resist processor |
-
1987
- 1987-10-15 JP JP1987156797U patent/JPH0163131U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02278713A (en) * | 1989-04-19 | 1990-11-15 | Tokyo Electron Ltd | Resist processor |
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