JPH0163796U - - Google Patents
Info
- Publication number
- JPH0163796U JPH0163796U JP1987158752U JP15875287U JPH0163796U JP H0163796 U JPH0163796 U JP H0163796U JP 1987158752 U JP1987158752 U JP 1987158752U JP 15875287 U JP15875287 U JP 15875287U JP H0163796 U JPH0163796 U JP H0163796U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- rotary drive
- expander
- turbo
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
図面は本考案にかかる一実施例を示す側断面図
である。
図中、３は回転駆動軸、５は動翼、６は静翼、
１２はエキスパンダ、１４は流体噴射手段である
。
The drawing is a side sectional view showing one embodiment of the present invention. In the figure, 3 is a rotary drive shaft, 5 is a rotor blade, 6 is a stationary blade,
12 is an expander, and 14 is a fluid ejecting means.
Claims (1)
多段に且つ径方向外方に延出された動翼を設ける
と共にこれら動翼間に固定側から静翼を配列して
なるターボ分子ポンプにおいて、上記回転駆動軸
にエキスパンダを設け、該エキスパンダに起動時
に作動流体を噴射させて回転駆動軸を昇速させる
流体噴射手段を設けたことを特徴とするターボ分
子ポンプ。 In a turbo-molecular pump in which moving blades are provided in multiple stages in the axial direction of a rotary drive shaft rotationally driven by a motor and extend outward in the radial direction, and stationary blades are arranged between these moving blades from the fixed side, A turbo-molecular pump characterized in that the rotary drive shaft is provided with an expander, and a fluid injection means is provided for injecting working fluid into the expander at startup to increase the speed of the rotary drive shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987158752U JPH0163796U (en) | 1987-10-19 | 1987-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987158752U JPH0163796U (en) | 1987-10-19 | 1987-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163796U true JPH0163796U (en) | 1989-04-24 |
Family
ID=31439363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987158752U Pending JPH0163796U (en) | 1987-10-19 | 1987-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163796U (en) |
-
1987
- 1987-10-19 JP JP1987158752U patent/JPH0163796U/ja active Pending
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