JPH0166734U - - Google Patents
Info
- Publication number
- JPH0166734U JPH0166734U JP1987162522U JP16252287U JPH0166734U JP H0166734 U JPH0166734 U JP H0166734U JP 1987162522 U JP1987162522 U JP 1987162522U JP 16252287 U JP16252287 U JP 16252287U JP H0166734 U JPH0166734 U JP H0166734U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- fixed contact
- thin film
- cantilever
- film formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims 1
Landscapes
- Contacts (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
Description
第１図は本考案の一実施例の断面図、第２図は
そのシリコン基板の底面図、第３図はその基板の
平面図、第４図は従来の磁気スイツチの断面図で
ある。 １……シリコン基板、２……カンチレバー、３
，６ａ，６ｂ……磁性薄膜、４，７ａ，７ｂ……
接点薄膜。
そのシリコン基板の底面図、第３図はその基板の
平面図、第４図は従来の磁気スイツチの断面図で
ある。 １……シリコン基板、２……カンチレバー、３
，６ａ，６ｂ……磁性薄膜、４，７ａ，７ｂ……
接点薄膜。
Claims (1)
- シリコン、ガラス等の基板上にパターン状に形
成された磁性薄膜を含む固定接点と、前記基板上
に接合され、固定接点との間に微少な間隙を形成
しているカンチレバーを有するシリコン基板と、
該シリコン基板のカンチレバー上に形成された磁
性薄膜を含む可動接点とを備えたことを特徴とす
る小型磁気スイツチ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162522U JPH073553Y2 (ja) | 1987-10-26 | 1987-10-26 | 小型磁気スイッチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162522U JPH073553Y2 (ja) | 1987-10-26 | 1987-10-26 | 小型磁気スイッチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0166734U true JPH0166734U (ja) | 1989-04-28 |
| JPH073553Y2 JPH073553Y2 (ja) | 1995-01-30 |
Family
ID=31446424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162522U Expired - Lifetime JPH073553Y2 (ja) | 1987-10-26 | 1987-10-26 | 小型磁気スイッチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073553Y2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06223686A (ja) * | 1992-12-15 | 1994-08-12 | Asulab Sa | リード接触器およびその製造方法 |
| JP2016177988A (ja) * | 2015-03-20 | 2016-10-06 | アルプス電気株式会社 | 磁気リードスイッチ |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5276675A (en) * | 1975-12-23 | 1977-06-28 | Seikosha Kk | Method of manufacturing electrodes |
| JPS54104563A (en) * | 1978-02-03 | 1979-08-16 | Alps Electric Co Ltd | Method of making circuit board |
| JPS54144823A (en) * | 1978-05-04 | 1979-11-12 | Nippon Telegr & Teleph Corp <Ntt> | Keyboard of non-keying type |
| JPS55115216A (en) * | 1979-02-27 | 1980-09-05 | Fujitsu Ltd | Method of forming movable electrode on base |
| JPS5710417U (ja) * | 1980-06-20 | 1982-01-20 | ||
| JPS61180354U (ja) * | 1985-04-25 | 1986-11-11 |
-
1987
- 1987-10-26 JP JP1987162522U patent/JPH073553Y2/ja not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5276675A (en) * | 1975-12-23 | 1977-06-28 | Seikosha Kk | Method of manufacturing electrodes |
| JPS54104563A (en) * | 1978-02-03 | 1979-08-16 | Alps Electric Co Ltd | Method of making circuit board |
| JPS54144823A (en) * | 1978-05-04 | 1979-11-12 | Nippon Telegr & Teleph Corp <Ntt> | Keyboard of non-keying type |
| JPS55115216A (en) * | 1979-02-27 | 1980-09-05 | Fujitsu Ltd | Method of forming movable electrode on base |
| JPS5710417U (ja) * | 1980-06-20 | 1982-01-20 | ||
| JPS61180354U (ja) * | 1985-04-25 | 1986-11-11 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06223686A (ja) * | 1992-12-15 | 1994-08-12 | Asulab Sa | リード接触器およびその製造方法 |
| JP2016177988A (ja) * | 2015-03-20 | 2016-10-06 | アルプス電気株式会社 | 磁気リードスイッチ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073553Y2 (ja) | 1995-01-30 |