JPH0171053U

JPH0171053U -

Info

Publication number: JPH0171053U
Application number: JP1987168244U
Authority: JP
Priority date: 1987-11-02
Filing date: 1987-11-02
Publication date: 1989-05-11

Description

[Brief explanation of the drawing]

第１図は本考案の原理斜視図、第２図は本考案
による一実施例の構成図、第３図は本考案の補正
説明図、第４図は従来の説明図で、ａは平面図、
ｂ，ｃは断面図を示す。図において、１はＸテーブル、２はＹテーブル
、３は移動テーブル、４はＸ方向駆動機構、５は
Ｙ方向駆動機構、６はＸ方向リニアスケール、７
はＹ方向リニアスケールを示す。 Fig. 1 is a perspective view of the principle of the present invention, Fig. 2 is a configuration diagram of an embodiment of the invention, Fig. 3 is a corrected explanatory diagram of the present invention, Fig. 4 is a conventional explanatory diagram, and a is a plan view. ,
b and c show cross-sectional views. In the figure, 1 is an X table, 2 is a Y table, 3 is a moving table, 4 is an X direction drive mechanism, 5 is a Y direction drive mechanism, 6 is an X direction linear scale, and 7
indicates a Y-direction linear scale.

Claims

[Scope of Utility Model Registration Claims]
A table 2, an X-table 1 having an X-direction drive mechanism 4 for loading the Y-table 2 and transporting the Y-table 2 in the X-direction, and an scale 6 and
Y to detect the amount of movement of the moving table 3 in the Y direction
In the XY table mechanism, which is equipped with a direction linear scale 7 and positions the moving table 3 at a predetermined position by detection of the X direction linear scale 6 and the Y direction linear scale 7, two sets of the X direction linear scales 6 are parallel to each other. An XY table mechanism is provided at both ends of the X table 1 as shown in FIG.