JPH0178023U - - Google Patents
Info
- Publication number
- JPH0178023U JPH0178023U JP1987172645U JP17264587U JPH0178023U JP H0178023 U JPH0178023 U JP H0178023U JP 1987172645 U JP1987172645 U JP 1987172645U JP 17264587 U JP17264587 U JP 17264587U JP H0178023 U JPH0178023 U JP H0178023U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- sample holder
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001788 irregular Effects 0.000 claims description 2
- 238000000609 electron-beam lithography Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
Landscapes
- Electron Beam Exposure (AREA)
Description
第１図は本案の一実施例を示す平面図、第２図
は第１図の断面図である。
２……不定形試料、３……回転調整台、４……
Ｚ調整台、６……押え部材。
FIG. 1 is a plan view showing an embodiment of the present invention, and FIG. 2 is a sectional view of FIG. 1. 2... Irregular sample, 3... Rotation adjustment table, 4...
Z adjustment table, 6...pressing member.
Claims (1)
料を装置へ装着または取り出すための介在部材で
ある描画試料ホルダに於いて、規格化された試料
以外の不定形試料を描画できるよう保持する手段
を備えたことを特徴とする電子線描画装置の試料
ホルダ。 ２ 実用新案登録請求の範囲第１項に於いて、試
料を保持する手段は、試料形状に合せて一定形状
をした押え部材が移動するよう構成したことを特
徴とする電子線描画装置の試料ホルダ。 ３ 実用新案登録請求の範囲第１項に於いて、固
定した試料を試料ホルダの基準に対して移動でき
るよう構成したことを特徴とする電子線描画装置
の試料ホルダ。[Claims for Utility Model Registration] 1. In order to draw a sample with an electron beam drawing device, a drawing sample holder, which is an intervening member for attaching or taking out the sample from the device, may be used to draw a sample with an irregular shape other than a standardized sample. A sample holder for an electron beam lithography system, characterized by comprising means for holding the sample so that it can be drawn. 2. A sample holder for an electron beam lithography apparatus according to claim 1 of the utility model registration claim, wherein the means for holding the sample is configured such that a holding member having a fixed shape moves according to the shape of the sample. . 3. A sample holder for an electron beam lithography apparatus according to claim 1 of the utility model registration claim, characterized in that the fixed sample is movable with respect to a reference of the sample holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172645U JPH0178023U (en) | 1987-11-13 | 1987-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172645U JPH0178023U (en) | 1987-11-13 | 1987-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0178023U true JPH0178023U (en) | 1989-05-25 |
Family
ID=31464603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172645U Pending JPH0178023U (en) | 1987-11-13 | 1987-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0178023U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198663A (en) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | Sample transport holder |
-
1987
- 1987-11-13 JP JP1987172645U patent/JPH0178023U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198663A (en) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | Sample transport holder |
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