JPH0181653U - - Google Patents
Info
- Publication number
- JPH0181653U JPH0181653U JP17869187U JP17869187U JPH0181653U JP H0181653 U JPH0181653 U JP H0181653U JP 17869187 U JP17869187 U JP 17869187U JP 17869187 U JP17869187 U JP 17869187U JP H0181653 U JPH0181653 U JP H0181653U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- transmission range
- light
- pattern member
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Electronic Switches (AREA)
Description
第１図、第２図は本考案による露光装置の一実
施例を示す図であり、第１図は透過範囲規制部材
の斜視図、第２図は透過範囲規制部材の作用を示
す側面図、第３図は従来の露光装置を示す側面図
である。
５……マスクガラス（パターン部材）、６……
透過範囲規制部材、７……押え部材、８……帯状
部材（光遮断部材）。
1 and 2 are diagrams showing an embodiment of the exposure apparatus according to the present invention, in which FIG. 1 is a perspective view of a transmission range regulating member, and FIG. 2 is a side view showing the action of the transmission range regulating member. FIG. 3 is a side view showing a conventional exposure apparatus. 5...Mask glass (pattern member), 6...
Transmission range regulating member, 7...pressing member, 8... strip member (light blocking member).
Claims (1)
的に透過する薄板状のパターン部材と、このパタ
ーン部材を押えるとともにパターン部材を透過す
る光の透過範囲を規制する透過範囲規制部材とを
備え、前記透過範囲規制部材の間からの光が前記
パターン部材を透過して露光体の表面に前記マス
クパターンと同じ模様の露光部を形成する露光装
置において、前記透過範囲規制部材は光の透過範
囲を調整できるようにしたことを特徴とする露光
装置。 (2) 前記透過範囲規制部材は、透明な材料で形
成され前記パターン部材を押える押え部材と、こ
の押え部材の周形状に沿つて設けられ少なくとも
いずれか一方が移動可能で不透明な材料で形成さ
れた一対の光遮断部材とを有することを特徴とす
る実用新案登録請求の範囲第１項記載の露光装置
。[Claims for Utility Model Registration] (1) A thin plate-like pattern member with a mask pattern formed on its surface that partially transmits light, and a thin plate-like pattern member that suppresses this pattern member and regulates the transmission range of light that passes through the pattern member. a transmission range regulating member, in which light from between the transmission range regulating members is transmitted through the pattern member to form an exposed portion having the same pattern as the mask pattern on the surface of the exposure body; An exposure apparatus characterized in that the regulating member is configured to adjust a light transmission range. (2) The transmission range regulating member includes a holding member made of a transparent material and holding down the pattern member, and at least one of which is provided along the circumferential shape of the holding member and is made of an opaque material and is movable. The exposure apparatus according to claim 1, further comprising a pair of light blocking members.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17869187U JPH0181653U (en) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17869187U JPH0181653U (en) | 1987-11-24 | 1987-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0181653U true JPH0181653U (en) | 1989-05-31 |
Family
ID=31470299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17869187U Pending JPH0181653U (en) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0181653U (en) |
-
1987
- 1987-11-24 JP JP17869187U patent/JPH0181653U/ja active Pending
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