JPH0183072U - - Google Patents
Info
- Publication number
- JPH0183072U JPH0183072U JP1987175705U JP17570587U JPH0183072U JP H0183072 U JPH0183072 U JP H0183072U JP 1987175705 U JP1987175705 U JP 1987175705U JP 17570587 U JP17570587 U JP 17570587U JP H0183072 U JPH0183072 U JP H0183072U
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- vertically divided
- side wall
- single crystal
- pulling device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の単結晶引上装置用縦分割型黒
鉛ルツボの一例について、その上面説明図、第２
図は該黒鉛ルツボを第１図のＡ―Ａ′線にて縦断
した縦断面説明図、第３図は該黒鉛ルツボの切断
面を有する側壁部分のみを拡大して示した部分説
明図である。
１……黒鉛ルツボ側壁、２……切断面により構
成される切断線。
Fig. 1 is an explanatory top view of an example of the vertically divided graphite crucible for the single crystal pulling device of the present invention;
The figure is an explanatory longitudinal cross-sectional view of the graphite crucible taken along the line AA' in Fig. 1, and Fig. 3 is a partial explanatory view showing an enlarged view of only the side wall portion of the graphite crucible having the cut surface. . 1...Graphite crucible side wall, 2...A cutting line constituted by a cutting surface.
Claims (1)
引上装置用縦分割型黒鉛ルツボにおいて、該縦断
分割の切断面が少くとも側壁部において屈曲して
いることを特徴とする単結晶引上装置用縦分割型
黒鉛ルツボ。 A vertically split graphite crucible for a single crystal pulling device that is vertically divided into two or more pieces, characterized in that the cut plane of the vertical division is bent at least at the side wall. Vertically divided graphite crucible for equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175705U JPH0183072U (en) | 1987-11-17 | 1987-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175705U JPH0183072U (en) | 1987-11-17 | 1987-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183072U true JPH0183072U (en) | 1989-06-02 |
Family
ID=31467490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987175705U Pending JPH0183072U (en) | 1987-11-17 | 1987-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183072U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5637293A (en) * | 1979-09-05 | 1981-04-10 | Ricoh Co Ltd | Single crystal manufacturing refractory crucible |
| JPS58190892A (en) * | 1982-04-28 | 1983-11-07 | Nippon Carbon Co Ltd | Graphite crucible for pulling of silicon single crystal |
-
1987
- 1987-11-17 JP JP1987175705U patent/JPH0183072U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5637293A (en) * | 1979-09-05 | 1981-04-10 | Ricoh Co Ltd | Single crystal manufacturing refractory crucible |
| JPS58190892A (en) * | 1982-04-28 | 1983-11-07 | Nippon Carbon Co Ltd | Graphite crucible for pulling of silicon single crystal |