JPH0183434U - - Google Patents
Info
- Publication number
- JPH0183434U JPH0183434U JP1987171140U JP17114087U JPH0183434U JP H0183434 U JPH0183434 U JP H0183434U JP 1987171140 U JP1987171140 U JP 1987171140U JP 17114087 U JP17114087 U JP 17114087U JP H0183434 U JPH0183434 U JP H0183434U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- liquid raw
- supply pipe
- gas supply
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005587 bubbling Effects 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 4
- 239000002994 raw material Substances 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図は本考案に係るバブリング装置の一実施
例を示す正面断面図である。
１…密閉容器、１ｃ…油溜まり部、２…ガス送
出管、３…キヤリアガス供給管、３ａ…小孔。
FIG. 1 is a front sectional view showing an embodiment of a bubbling device according to the present invention. DESCRIPTION OF SYMBOLS 1... Airtight container, 1c... Oil reservoir part, 2... Gas delivery pipe, 3... Carrier gas supply pipe, 3a... Small hole.
Claims (1)
心に向かつて下り傾斜させるとともに、その中心
に下向きに膨出する液溜まり部を形成し、その液
溜まり部内に先端部が臨むようにキヤリアガス供
給管を垂下させ、このキヤリアガス供給管の先端
部を半球状となし、そこにガス吹出し用の小孔を
複数個形成したことを特徴とする液体原料のバブ
リング装置。 (2) 上記各小孔は、放出される気泡の体積が同
一となるように、高さ方向で互いに径が異なつて
いることを特徴とする実用新案登録請求の範囲第
１項記載の液体原料のバブリング装置。[Scope of Claim for Utility Model Registration] (1) The bottom wall of the sealed container in which the liquid raw material is stored is tilted downward toward the center, and a liquid pool is formed in the center that bulges downward. A bubbling device for a liquid raw material, characterized in that a carrier gas supply pipe is suspended so that its tip faces inside the tube, the tip of the carrier gas supply pipe is semispherical, and a plurality of small holes for gas blowing are formed therein. Device. (2) The liquid raw material according to claim 1 of claim 1, wherein each of the small holes has a different diameter in the height direction so that the volume of the bubbles released is the same. bubbling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171140U JPH0183434U (en) | 1987-11-09 | 1987-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171140U JPH0183434U (en) | 1987-11-09 | 1987-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183434U true JPH0183434U (en) | 1989-06-02 |
Family
ID=31462706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171140U Pending JPH0183434U (en) | 1987-11-09 | 1987-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183434U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516304A (en) * | 1999-12-11 | 2003-05-13 | エピケム リミテッド | Method and apparatus for supplying a precursor to a plurality of epitaxial reactor sections |
-
1987
- 1987-11-09 JP JP1987171140U patent/JPH0183434U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516304A (en) * | 1999-12-11 | 2003-05-13 | エピケム リミテッド | Method and apparatus for supplying a precursor to a plurality of epitaxial reactor sections |
| JP2011137235A (en) * | 1999-12-11 | 2011-07-14 | Sigma Aldrich Co | Method for bulk supply of organometallic precursor to a plurality of epitaxial reactor sites |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0183433U (en) | ||
| JPS6378899U (en) | ||
| JPS6346152U (en) | ||
| JPS63120829U (en) | ||
| JPS6256197U (en) | ||
| JPS6423473U (en) | ||
| JPS6163299U (en) | ||
| JPS59110095U (en) | water purification device | |
| JPS59147095U (en) | liquid dispenser | |
| JPS621641U (en) | ||
| JPS6293052U (en) | ||
| JPS6362137U (en) | ||
| JPH0438272U (en) | ||
| JPH01151830U (en) | ||
| JPS62128798U (en) | ||
| JPH0317058U (en) | ||
| JPH0217135U (en) | ||
| JPS62167588U (en) | ||
| JPS63126256U (en) | ||
| JPS61134975U (en) | ||
| JPS63179603U (en) | ||
| JPH0415233U (en) | ||
| JPH0479206U (en) | ||
| JPS63199962U (en) | ||
| JPS58161861U (en) | liquid pouring container |