JPH0184053U - - Google Patents
Info
- Publication number
- JPH0184053U JPH0184053U JP1987179150U JP17915087U JPH0184053U JP H0184053 U JPH0184053 U JP H0184053U JP 1987179150 U JP1987179150 U JP 1987179150U JP 17915087 U JP17915087 U JP 17915087U JP H0184053 U JPH0184053 U JP H0184053U
- Authority
- JP
- Japan
- Prior art keywords
- oxygen concentration
- view
- green sheet
- concentration detecting
- flat part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17915087U JPH0522859Y2 ( ) | 1987-11-25 | 1987-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17915087U JPH0522859Y2 ( ) | 1987-11-25 | 1987-11-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0184053U true JPH0184053U ( ) | 1989-06-05 |
| JPH0522859Y2 JPH0522859Y2 ( ) | 1993-06-11 |
Family
ID=31470730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17915087U Expired - Lifetime JPH0522859Y2 ( ) | 1987-11-25 | 1987-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522859Y2 ( ) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2017159144A1 (ja) * | 2016-03-16 | 2018-03-22 | 日本特殊陶業株式会社 | セラミックヒータ |
-
1987
- 1987-11-25 JP JP17915087U patent/JPH0522859Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2017159144A1 (ja) * | 2016-03-16 | 2018-03-22 | 日本特殊陶業株式会社 | セラミックヒータ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522859Y2 ( ) | 1993-06-11 |