JPH0184186U - - Google Patents

Info

Publication number
JPH0184186U
JPH0184186U JP1988148412U JP14841288U JPH0184186U JP H0184186 U JPH0184186 U JP H0184186U JP 1988148412 U JP1988148412 U JP 1988148412U JP 14841288 U JP14841288 U JP 14841288U JP H0184186 U JPH0184186 U JP H0184186U
Authority
JP
Japan
Prior art keywords
semiconductor
alarm
utility
model registration
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988148412U
Other languages
Japanese (ja)
Other versions
JPH0237105Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988148412U priority Critical patent/JPH0237105Y2/ja
Publication of JPH0184186U publication Critical patent/JPH0184186U/ja
Application granted granted Critical
Publication of JPH0237105Y2 publication Critical patent/JPH0237105Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fire-Detection Mechanisms (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire Alarms (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例の概略図、第２図
はその回路図である。 １……シランガスボンベ、３……格納箱、６…
…窒化膜形成装置、８……除害装置、１０……検
出箱、１１……排気ダクト、Ｇ１，Ｇ２……ガス
検出器。 FIG. 1 is a schematic diagram of an embodiment of this invention, and FIG. 2 is a circuit diagram thereof. 1...silane gas cylinder, 3...storage box, 6...
...Nitride film forming device, 8...Abatement device, 10...Detection box, 11...Exhaust duct, G1 , G2 ...Gas detector.

Claims (1)

【実用新案登録請求の範囲】 １ 半導体製造工程など、処理ガスとして有毒で
可燃性のシランガスを使用する箇所に、該シラン
ガスの漏洩を検出する金属酸化物半導体を検出素
子としたガス検出器を設け、この検出器の出力変
化により警報を発するとともに消火装置などの防
災装置および半導体製造工程などを制御すること
を特徴とする半導体工場などにおける警報および
制御装置。 ２ ガス検出器が排気ダクトに設けられた実用新
案登録請求の範囲第１項記載の半導体工場などに
おける警報および制御装置。 ３ ガス検出器がシランガスボンベが収納された
格納箱に設けられた実用新案登録請求の範囲第１
項記載の半導体工場などにおける警報および制御
装置。 ４ 検出素子としての金属酸化物半導体には白金
黒が含有されている実用新案登録請求の範囲第１
項ないし第３項のいずれかに記載された半導体工
場などにおける警報および制御装置。[Scope of Claim for Utility Model Registration] 1. A gas detector with a metal oxide semiconductor as a detection element for detecting leakage of silane gas is installed in a place where poisonous and flammable silane gas is used as a processing gas, such as in a semiconductor manufacturing process. An alarm and control device in a semiconductor factory, etc., characterized in that it issues an alarm based on a change in the output of this detector and also controls disaster prevention equipment such as a fire extinguisher, a semiconductor manufacturing process, etc. 2. An alarm and control device for a semiconductor factory or the like as set forth in claim 1 of the utility model registration, in which a gas detector is provided in an exhaust duct. 3 Claim No. 1 for Utility Model Registration in which the gas detector is installed in a storage box in which a silane gas cylinder is stored
Alarm and control devices in semiconductor factories, etc., as described in Section 2. 4 Utility model registration claim No. 1 in which the metal oxide semiconductor as a detection element contains platinum black
An alarm and control device in a semiconductor factory or the like according to any one of Items 1 to 3.
JP1988148412U 1988-11-16 1988-11-16 Expired JPH0237105Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988148412U JPH0237105Y2 (en) 1988-11-16 1988-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988148412U JPH0237105Y2 (en) 1988-11-16 1988-11-16

Publications (2)

Publication Number Publication Date
JPH0184186U true JPH0184186U (en) 1989-06-05
JPH0237105Y2 JPH0237105Y2 (en) 1990-10-08

Family

ID=31419715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988148412U Expired JPH0237105Y2 (en) 1988-11-16 1988-11-16

Country Status (1)

Country Link
JP (1) JPH0237105Y2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5396895A (en) * 1977-02-03 1978-08-24 Nitto Electric Ind Co Gas sensor element
JPS5452296U (en) * 1977-09-19 1979-04-11
JPS553510A (en) * 1978-06-21 1980-01-11 Yasunori Nagao Inner cylinder for rotary incinerator
JPS5721350A (en) * 1980-05-28 1982-02-04 Naarden International Nv Perfume composition and use

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5396895A (en) * 1977-02-03 1978-08-24 Nitto Electric Ind Co Gas sensor element
JPS5452296U (en) * 1977-09-19 1979-04-11
JPS553510A (en) * 1978-06-21 1980-01-11 Yasunori Nagao Inner cylinder for rotary incinerator
JPS5721350A (en) * 1980-05-28 1982-02-04 Naarden International Nv Perfume composition and use

Also Published As

Publication number Publication date
JPH0237105Y2 (en) 1990-10-08

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