JPH0184433U - - Google Patents
Info
- Publication number
- JPH0184433U JPH0184433U JP1987181598U JP18159887U JPH0184433U JP H0184433 U JPH0184433 U JP H0184433U JP 1987181598 U JP1987181598 U JP 1987181598U JP 18159887 U JP18159887 U JP 18159887U JP H0184433 U JPH0184433 U JP H0184433U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- transfer arm
- transfer
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Registering Or Overturning Sheets (AREA)
Description
第１図はこの考案のウエハ位置合せ治具を示す
平面図、第２図、第３図はこの考案及び従来のウ
エハ搬送機構の部分詳細図で、第２図は平面図、
第３図は正面図である。
図中、１は搬送アーム、２はウエハ、３はアー
ムローデイング機構、４はウエハ搬出機構、６は
ダミーウエハ、７は穴である。尚、図中同一符号
は同一又は相当部分を示す。
FIG. 1 is a plan view showing a wafer alignment jig of this invention, FIGS. 2 and 3 are partial detailed views of this invention and a conventional wafer transport mechanism, and FIG.
FIG. 3 is a front view. In the figure, 1 is a transfer arm, 2 is a wafer, 3 is an arm loading mechanism, 4 is a wafer unloading mechanism, 6 is a dummy wafer, and 7 is a hole. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
、先端にウエハを載せてウエハの受渡しを行う搬
送アームを有するウエハのローデイング機構にお
いて、搬送ウエハと同一サイズで中心に穴を有す
るダミーウエハを搬送アームの先端に載せ、アー
ムのゼロ合せをするようにしたことを特徴とする
ウエハ搬送アームの位置合せ治具。 In a wafer loading mechanism that has a transfer arm that rotates at a predetermined angle by the arm loading mechanism and transfers the wafer by placing a wafer on the tip, a dummy wafer that is the same size as the transfer wafer and has a hole in the center is placed at the tip of the transfer arm. A positioning jig for a wafer transfer arm, characterized in that the wafer transfer arm is placed on the wafer and the arm is zero-aligned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181598U JPH0184433U (en) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181598U JPH0184433U (en) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184433U true JPH0184433U (en) | 1989-06-05 |
Family
ID=31473078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181598U Pending JPH0184433U (en) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184433U (en) |
-
1987
- 1987-11-26 JP JP1987181598U patent/JPH0184433U/ja active Pending
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