JPH0184439U - - Google Patents

Info

Publication number
JPH0184439U
JPH0184439U JP1987180480U JP18048087U JPH0184439U JP H0184439 U JPH0184439 U JP H0184439U JP 1987180480 U JP1987180480 U JP 1987180480U JP 18048087 U JP18048087 U JP 18048087U JP H0184439 U JPH0184439 U JP H0184439U
Authority
JP
Japan
Prior art keywords
wafer
holder
scratches
irregularly shaped
cleavage direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987180480U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987180480U priority Critical patent/JPH0184439U/ja
Publication of JPH0184439U publication Critical patent/JPH0184439U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図イは本考案に係るウエーハ分割装置の平
面図、第１図ロは第１図イの―線断面図、第
２図は傷入れが行われた不定形ウエーハの一例を
示す斜視図、第３図はウエーハ分割装置の従来例
を示す平面図、第４図は第３図の―線断面図
である。 ２１……ホルダー、２３……マウント用テープ
、２４……カバーテープ、２５……凸板、２６…
…押圧部材、２６ａ……底面、２６ｂ……凹溝、
Ａ……不定形ウエーハ、Ｃ……傷部。

Claims (1)

  1. 【実用新案登録請求の範囲】 一側辺に劈開方向を向く傷部が等間隔に形成さ
    れた不定形ウエーハを、傷部を基準として劈開方
    向に分割するためのウエーハ分割装置を、 上記不定形ウエーハをシート状をした２枚のテ
    ープ間に挟持した状態で保持するホルダと、 ホルダに保持された不定形ウエーハの傷部上方
    に上下動自在に配置され、かつ、不定形ウエーハ
    の傷部を有する上面を押圧する底面に不定形ウエ
    ーハの劈開方向に沿つた凹溝が形成された押圧部
    材と、 ホルダに保持された不定形ウエーハの下面側に
    、不定形ウエーハの劈開方向に沿い、かつ、上記
    傷部と対向するように配置され上記押圧板の凹溝
    と対応嵌挿可能な凸板とによつて構成したことを
    特徴とするウエーハ分割装置。
JP1987180480U 1987-11-26 1987-11-26 Pending JPH0184439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987180480U JPH0184439U (ja) 1987-11-26 1987-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987180480U JPH0184439U (ja) 1987-11-26 1987-11-26

Publications (1)

Publication Number Publication Date
JPH0184439U true JPH0184439U (ja) 1989-06-05

Family

ID=31471998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987180480U Pending JPH0184439U (ja) 1987-11-26 1987-11-26

Country Status (1)

Country Link
JP (1) JPH0184439U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009149046A (ja) * 2007-11-28 2009-07-09 Denso Corp 基板の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763845A (en) * 1980-10-06 1982-04-17 Nec Corp Dividing device for semicondutor wafer
JPS60137038A (ja) * 1983-12-26 1985-07-20 Toshiba Corp 半導体ウエ−ハのへき開方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763845A (en) * 1980-10-06 1982-04-17 Nec Corp Dividing device for semicondutor wafer
JPS60137038A (ja) * 1983-12-26 1985-07-20 Toshiba Corp 半導体ウエ−ハのへき開方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009149046A (ja) * 2007-11-28 2009-07-09 Denso Corp 基板の製造方法

Similar Documents

Publication Publication Date Title
EP0362811A3 (en) Polishing apparatus
JPH0184439U (ja)
JPH0329939U (ja)
USD268885S (en) Measuring receptacle with rim held removable bottom
JPS57177579A (en) Photosemiconductor device
JPS6194804U (ja)
JPS61200381U (ja)
JPS6185149U (ja)
JPS5961426U (ja) タブレツト
JPS6257950U (ja)
JPS6355330U (ja)
JPS6345344Y2 (ja)
JPS5848404U (ja) フインガコンポ−ザ
JPS629230U (ja)
JPS63189561U (ja)
JPS5912527U (ja) 鋼材切断装置
JPS6292098U (ja)
JPS6188149U (ja)
JPS5830902U (ja) カセツト蓋装置
JPH0351326U (ja)
JPS6250837U (ja)
JPS58174651U (ja) 太陽熱集熱器
JPS61103137U (ja)
JPH02142091U (ja)
JPS62150100U (ja)