JPH0184737U - - Google Patents
Info
- Publication number
- JPH0184737U JPH0184737U JP1987179577U JP17957787U JPH0184737U JP H0184737 U JPH0184737 U JP H0184737U JP 1987179577 U JP1987179577 U JP 1987179577U JP 17957787 U JP17957787 U JP 17957787U JP H0184737 U JPH0184737 U JP H0184737U
- Authority
- JP
- Japan
- Prior art keywords
- another
- contact
- passageway
- vacuum
- surrounds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Description
第１図は、本考案の一実施例の真空装置の要部
縦断面図、第２図ないし第４図は、本考案の第２
ないし第４の実施例の真空装置の要部縦断面図で
ある。
１……冷起部材、２……水シール部、３……真
空シール部、４……冷却母材、５……真空室、６
……冷却水路。
FIG. 1 is a vertical cross-sectional view of essential parts of a vacuum device according to an embodiment of the present invention, and FIGS.
FIG. 7 is a longitudinal cross-sectional view of a main part of a vacuum device according to a fourth embodiment. DESCRIPTION OF SYMBOLS 1...Cooling member, 2...Water seal part, 3...Vacuum seal part, 4...Cooling base material, 5...Vacuum chamber, 6
...cooling waterway.
Claims (1)
れた部材と、該部材の一面と当接し該部材に着脱
可能に設けられた他の部材と、該他の部材と前記
部材とで形成された液保有路を囲み前記部材と他
の部材との当接部にそれぞれ別個に設けられたシ
ール部材とを具備したことを特徴とする真空装置
。 A member provided in a vacuum chamber so that at least one surface thereof can be exposed, another member that is in contact with one surface of the member and is removably attached to the member, and a liquid reservoir formed by the other member and the member. 1. A vacuum device comprising: a sealing member that surrounds a passageway and is separately provided at a contact portion between the member and another member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179577U JPH0184737U (en) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179577U JPH0184737U (en) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184737U true JPH0184737U (en) | 1989-06-06 |
Family
ID=31471124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179577U Pending JPH0184737U (en) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184737U (en) |
-
1987
- 1987-11-27 JP JP1987179577U patent/JPH0184737U/ja active Pending